Capacitive MEMS accelerometer with open-loop switched-capacitor readout circuit

• Autorzy: Szermer M. , Amrozik P. , Zając P. , Maj C. , Napieralski A.
• Języki publikacji: EN

Abstrakty

EN

MEMS are one of the fastest developing branch in microelectronics. Many integrated sensors are widely used in smart devices i.e. smartphones, and specialized systems like medical equipment. In the paper we present the main parts of a system for measuring human movement which can be used in human balance disorder diagnosis. We describe our design of capacitive accelerometers and dedicated switched-capacitor readout circuit. Both will be manufactured as separate chips in different technological processes. The principle of operation, schematics and layouts of all parts of the system are presented. Preliminary simulations show that the proposed designs are applicable for the considered medical device.

Słowa kluczowe

EN

MEMS; ASIC; accelerometer; integrated circuit; balance disorders

PL

MEMS; ASIC; akcelerometr; układy scalone; zaburzenia równowagi

• Wydawca: Lodz University of Technology. Department of Microelectronics and Computer Science
• Czasopismo: International Journal of Microelectronics and Computer Science
• Rocznik: 2017
• Tom: Vol. 8, nr 4
• Strony: 139--145
• Opis fizyczny: Bibliogr. 60 poz., il. kolor., rys., wykr.

Twórcy

autor

Szermer M.

• Department of Microelectronics and Computer Science, Lodz University of Technology, Łódź, Poland

autor

Amrozik P.

• Department of Microelectronics and Computer Science, Lodz University of Technology, Łódź, Poland

autor

Zając P.

• Department of Microelectronics and Computer Science, Lodz University of Technology, Łódź, Poland

autor

Maj C.

• Department of Microelectronics and Computer Science, Lodz University of Technology, Łódź, Poland

autor

Napieralski A.

• Department of Microelectronics and Computer Science, Lodz University of Technology, Łódź, Poland

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Uwagi

Opracowanie rekordu w ramach umowy 509/P-DUN/2018 ze środków MNiSW przeznaczonych na działalność upowszechniającą naukę (2018).