Plasma characterization of the gas-puff target source dedicated for soft X-ray microscopy using SiC detectors

• Autorzy: Torrisi A. , Wachulak P. , Torrisi L. , Bartnik A. , Węgrzyński Ł. , Fiedorowicz H.

Identyfikatory

DOI

10.1515/nuka-2016-0024

• Konferencja: PLASMA-2015 International Conference on Research and Applications of Plasmas (7-11 September 2015 ; Warsaw, Poland)
• Języki publikacji: EN

Abstrakty

EN

An Nd:YAG pulsed laser was employed to irradiate a nitrogen gas-puff target. The interaction gives rise to the emission of soft X-ray (SXR) radiation in the ‘water window’ spectral range (λ = 2.3÷4.4 nm). This source was already successfully employed to perform the SXR microscopy. In this work, a Silicon Carbide (SiC) detector was used to characterize the nitrogen plasma emission in terms of gas-puff target parameters. The measurements show applicability of SiC detectors for SXR plasma characterization.

Słowa kluczowe

EN

gas-puff target; plasma diagnostic technique; SiC detector; water window; EUV

• Wydawca: Institute of Nuclear Chemistry and Technology
• Czasopismo: Nukleonika
• Rocznik: 2016
• Tom: Vol. 61, No. 2
• Strony: 139--143
• Opis fizyczny: Bibliogr. 19 poz., rys.

Twórcy

autor

Torrisi A.

• Institute of Optoelectronics, Military University of Technology, 2 Kaliskiego Str., 00-908 Warsaw, Poland, Tel.: [phone], Fax: [phone]

autor

Wachulak P.

• Institute of Optoelectronics, Military University of Technology, 2 Kaliskiego Str., 00-908 Warsaw, Poland, Tel.: [phone], Fax: [phone]

autor

Torrisi L.

• Department of Physics Sciences – MIFT, University of Messina, V. le F. S. d’Alcontres 31, 981 66 S. Agata, Messina, Italy

autor

Bartnik A.

• Institute of Optoelectronics, Military University of Technology, 2 Kaliskiego Str., 00-908 Warsaw, Poland, Tel.: [phone], Fax: [phone]

autor

Węgrzyński Ł.

• Institute of Optoelectronics, Military University of Technology, 2 Kaliskiego Str., 00-908 Warsaw, Poland, Tel.: [phone], Fax: [phone]

autor

Fiedorowicz H.

• Institute of Optoelectronics, Military University of Technology, 2 Kaliskiego Str., 00-908 Warsaw, Poland, Tel.: [phone], Fax: [phone]

Bibliografia

• 1. Bertilson, M., Von Hofsten, O., Vogt, U., Holmberg, A., & Hertz, H. M. (2009). High-resolution computed tomography with a compact soft x-ray microscope. Opt. Express, 17(13), 11057–11065. DOI: 10.1364/OE.17.011057.
• 2. Da Silva, L. B., Trebes, J. E., Balhorn, R., Mrowka, S., Anderson, E., Attwood, D. T., Barbee Jr, T. W., Brase, J., Corzett, M., & Gray, J. (1992). X-ray laser microscopy of rat sperm nuclei. Science, 258(5080), 269–271. DOI: 10.1126/science.1411525.
• 3. Sarubbi, F., Nihtianov, S. N., Nanver, L. K., Scholtes, T. L. M., & Scholze, F. (2009). High performance silicon-based extreme ultraviolet (EUV) radiation detector for industrial application. In IEEE IECON’2009, 3–5 November 2009, Porto, Portugal (pp. 1877–1882). IEEE.
• 4. Balkanski, M. R., & Wallis, F. (2000). Semiconductor physics and applications. Oxford, New York: Oxford University Press.
• 5. Attwood, D. (1999). Soft x-rays and extreme ultraviolet radiation. Cambridge: Cambridge University Press.
• 6. Torrisi, L., Sciuto, A., Calcagno, L., Musumeci, P., Mazzillo, M., Ceccio, G., & Cannavò, A. (2015). Laser-plasma X-ray detection by using fast 4H-SiC interdigit and ion collector detectors. J. Instrum., 10, P07009. DOI: 10.1088/1748-0221/10/07/P07009.
• 7. Cannavò, A., Torrisi, L., & Calcagno, L. (2016). SiC detector characterization for radiation emitted by laser-generated plasmas. J. Instrum. (submitted).
• 8. Mazzillo, M., Condorelli, G., Castagna, M. E., Catania, G., Sciuto, A., Roccaforte, F., & Raineri, V. (2009). Highly effi cient low reverse biased 4H-SiC Schottky photodiodes for UV-light detection. IEEE Photonic Tech. L, 21(23), 1782–1784. DOI: 10.1109/LPT.2009.2033713.
• 9. Sciuto, A., Roccaforte, F., & Raineri, V. (2008). Electro-optical response of ion-irradiated 4H-SiC Schottky ultraviolet photodetectors. Appl. Phys. Lett., 92, 093505. DOI: 10.1063/1.2891048.
• 10. Lees, J. E., Barnett, A. M., Bassforda, D. J., & Mazzillo, M. (2012). X-ray and electron response of 4H-SiC vertical interdigitated Schottky photodiodes. J. Instrum., 7, P11024. DOI: 10.1088/1748-0221/7/11/P11024.
• 11. Laska, L., Krasa, J., Pfeifer, M., & Rohlena, K. (2002). Angular distribution of ions emitted from Nd:YAG laser-produced plasma. Rev. Sci. Instrum., 73(2), 654–656. DOI: 10.1063/1.1430037.
• 12. Fiedorowicz, H., Bartnik, A., Jarocki, R., Kostecki, J., Krzywiński, J., Mikołajczyk, J., Rakowski, R., Szczurek, A., & Szczurek, M. (2005). Compact laser plasma EUV source based on a gas puff target for metrology applications. J. Alloy. Compd., 401(1/2), 99–103.DOI: 10.1016/j.jallcom.2005.02.069.
• 13. Wachulak, P., Bartnik, A., Fiedorowicz, H., Rudawski, P., Jarocki, R., Kostecki, J., & Szczurek, M. (2010). “Water window” compact, table-top laser plasma soft X-ray sources based on a gas puff target. Nucl. Instrum. Methods Phys. Res. Sect. B-Beam Interact. Mater. Atoms, 268(10), 1692–1700. DOI: 10.1016/j.nimb.2010.02.002.
• 14. Fiedorowicz, H., Bartnik, A., Jarocki, R., Rakowski, R., & Szczurek, M. (2000). Enhanced X-ray emission in the 1-keV range from a laser-irradiated gas puff target produced using the double-nozzle setup. Appl. Phys. B, 70(2), 305–308. DOI: 10.1007/s003400050050.
• 15. Wachulak, P., Bartnik, A., Fiedorowicz, H., Feigl, T., Jarocki, R., Kostecki, J., Rakowski, R., Rudawski, P., Sawicka, M., Szczurek, M., Szczurek, A., & Zawadzki, Z. (2010). A compact, quasi-monochromatic laser-plasma EUV source based on a double-stream gas-puff target at 13.8 nm wavelength. Appl. Phys. B, 100(3), 461–469. DOI: 10.1007/s00340-010-4076-9.
• 16. Wachulak, P., Bartnik, A., Skorupka, M., Kostecki, J., Jarocki, R., Szczurek, M., Wegrzynski, L., Fok, T., & Fiedorowicz, H. (2013). Sub 1-μm resolution water--window microscopy using a compact, laser-plasma SXR source based on a double-stream gas-puff target. Appl. Phys. B, 111(2), 239–247. DOI: 10.1007/s00340-012-5324-y.
• 17. Wachulak, P., Torrisi, A., Bartnik, A., Adjei, D.,Kostecki, J., Wegrzynski, L., Jarocki, R., Szczurek,M., & Fiedorowicz, H. (2015). Desktop water window microscope using a double stream gas puff target source. Appl. Phys. B, 118(4), 573–578. DOI:10.1007/s00340-015-6044-x.
• 18. Wachulak, P., Torrisi, A., Nawaz, M. F., Bartnik, A., Adjei, D., Vondrová, Š., Turňová, J., Jančarek, A., Limpouch, J., Vrbová, M., & Fiedorowicz, H. (2015). A compact “water-window” microscope with 60 nm spatial resolution for applications in biology and nanotechnology. Microsc. Microanal., 21(5), 1214–1223.DOI: 10.1017/S1431927615014750.
• 19. Nalwa, H. S. (1999). Handbook of nanostructured materials and nanotechnology. Academic Press.

Uwagi

EN

This work is supported by the National Centre for Research and Development, Lider programme, award #LIDER/004/410/L-4/12/ NCBR/2013. The authors also acknowledge financial support from the EU FP7 Erasmus Mundus Joint Doctorate Programme EXTATIC under framework partnership agreement FPA-2012-0033 and from the 7th Framework Programme’s Laserlab Europe III project no. 284464. This work was performed at the Military University of Technology, Warsaw, Poland.

PL

Opracowanie ze środków MNiSW w ramach umowy 812/P-DUN/2016 na działalność upowszechniającą naukę.