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Abstrakty
Cleanrooms, essential in various industries, demand strictly controlled environmental conditions, which significantly impact building energy consumption. Highefficiency air handling systems are crucial in these environments to ensure a continuous supply of clean air and removal of contaminants. However, the substantial energy requirements of these systems pose a significant challenge to sustainable operations. This study focuses on an innovative approach to reduce the energy consumption of air handling systems in cleanrooms through the optimization of laminar airflow. Laminar flow, renowned for its high particle capture efficiency, is commonly employed in cleanrooms. Nevertheless, its operation is energy-intensive. It was proposed a novel concept involving the segmentation of the laminar flow field and the variable adjustment of airflow velocity within individual segments. This approach enables more flexible adaptation of airflow to specific operational requirements while reducing the overall volume of air that needs to be filtered and conditioned. Experimental results demonstrate that the proposed system can significantly reduce the energy consumption of the air handling system without compromising cleanliness. Compared to conventional systems, energy consumption was reduced by up to 60% in winter and 56% in summer, while simultaneously improving air quality in the critical area above the operating table.
Wydawca
Rocznik
Tom
Strony
289--298
Opis fizyczny
Bibliogr. 7 poz., rys., tab.
Twórcy
autor
- Department of Power Engineering, Faculty of Mechanical Engineering, University of Žilina, Univerzitna 8215/1, 010 26 Zilina Slovakia
autor
- Department of Power Engineering, Faculty of Mechanical Engineering, University of Žilina, Univerzitna 8215/1, 010 26 Zilina Slovakia
autor
- Department of Power Engineering, Faculty of Mechanical Engineering, University of Žilina, Univerzitna 8215/1, 010 26 Zilina Slovakia
autor
- Research Centre, University of Žilina, Univerzitna 8215/1, 010 26 Zilina Slovakia
Bibliografia
- 1.Hu, S.C., Chuah, Y.K., 2003. Power consumption of semiconductor fabs in Taiwan. Energy 28, 895-907, DOI: 10.1016/S0360-5442(03)00008-2
- 2.Kapjor, A., Hužvár, J. Greššák, T., 2012. Vzduchotechnika 1. Žilina: EDIS. ISBN 978-80-554- 05839-1.
- 3.Khoo, C.Y., Lee, C.C., Hu, S.C., 2012. An experimental study on the influences of air change rate and free area ratio of raised-floor on cleanroom particle concentrations. Build Environ 48, 84-88, DOI: 10.1016/J.BUILDENV.2011.09.001
- 4.Kircher, K., Shi, X., Patil, S., Zhang, K.M., 2010. Cleanroom energy efficiency strategies: Modeling and simulation. Energy Build 42, 282-289, DOI: 10.1016/J.ENBUILD.2009.09.004
- 5.Mičko, P., Hečko, D., Kapjor, A., Nosek, R., Kolková, Z., Hrabovský, P., Kantová, N.Č., 2022. Impact of the Speed of Airflow in a Cleanroom on the Degree of Air Pollution. Applied Sciences 2022, Vol. 12, Page 2466 12, 2466, DOI: 10.3390/APP12052466
- 6.STN EN ISO 14644-1 (12 5301) 1.5.2016 | Technická norma | NORMSERVIS s.r.o. [WWW Document], n.d. URL https://eshop.normservis.sk/norma/stneniso-14644-1-1.5.2016.html (accessed 11.20.24).
- 7.Tsao, J.M., Hu, S.C., Chan, D.Y.L., Hsu, R.T.C., Lee, J.C.C., 2008. Saving energy in the makeup air unit (MAU) for semiconductor clean rooms in subtropical areas. Energy Build 40, 1387- 1393, DOI: 10.1016/J.ENBUILD.2007.12.005
Uwagi
Opracowanie rekordu ze środków MNiSW, umowa nr POPUL/SP/0154/2024/02 w ramach programu "Społeczna odpowiedzialność nauki II" - moduł: Popularyzacja nauki (2025).
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-2864f9ea-0d5b-401b-9022-4da55f2f40c4
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