Numerical and Experimental Analysis of the Response of a SAW Structure with WO₃ Layers on Action of Carbon Monoxide

• Autorzy: Hejczyk T. , Urbańczyk M. , Pustelny T. , Jakubik W.

Identyfikatory

DOI

10.1515/aoa-2015-0003

• Języki publikacji: EN

Abstrakty

EN

The paper presents the results of an analysis of gaseous sensors based on a surface acoustic wave (SAW) by means of the equivalent model theory. The applied theory analyzes the response of the SAW sensor in the steady state affected by carbon monoxide (CO) in air. A thin layer of WO₃ has been used as a sensor layer. The acoustical replacing impedance of the sensor layer was used, which takes into account the profile of the concentration of gas molecules in the layer. Thanks to implementing the Ingebrigtsen equation, the authors determined analytical expressions for the relative changes of the velocity of the surface acoustic wave in the steady state. The results of the analysis have shown that there is an optimum thickness of the layer of CO sensor at which the acoustoelectric effect (manifested here as a change in the acoustic wave velocity) is at its highest. The theoretical results were verified and confirmed experimentally.

Słowa kluczowe

EN

gas sensor; carbon monoxide (CO); piezoelectric substrate; numerical modelling; surface acoustic waves; acoustoelectric effects; Ingebrigtsen's formula

• Wydawca: Instytut Podstawowych Problemów Techniki PAN ; Komitet Akustyki PAN ; Polskie Towarzystwo Akustyczne
• Czasopismo: Archives of Acoustics
• Rocznik: 2015
• Tom: Vol. 40, No. 1
• Strony: 19--24
• Opis fizyczny: Bibliogr. 20 poz., rys., wykr.

Twórcy

autor

Hejczyk T.

• ENTE Sp. z o.o., Gaudiego 7, 44-100 Gliwice, Poland

autor

Urbańczyk M.

• Faculty of Electrical Engineering, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland

autor

Pustelny T.

• Faculty of Electrical Engineering, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland

autor

Jakubik W.

• Institute of Physics, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland

Bibliografia

• 1. Anisimkin V., Verona E. (2001), New capabilities for optimazing SAW sensors, IEEE Transection on Ultrasonics, Ferroelectricsand Frequency Control, 48, 5, 1413–1418.
• 2. Bielecki Z., Janucki J., Kawalec A., Mikolajczyk J., Palka N., Pasternak M., Pustelny T., Wojtas J. (2012), Sensors and systems for the detection of explosive devices an overview, Metrology and Measurement Systems, 19, 1, 3–28.
• 3. Ceeke J., Wang Z. (1999), Acoustic wave sensors, Sensors and Actuators B, 59, 146–153.
• 4. Hejczyk T., Urbańczyk M. (2011), WO3-Pd structure in SAW sensor for hydrogen detection, Acta Physica Polonica A, 120, 4, 616–620.
• 5. Hejczyk T., Urbańczyk M. (2013), Numerical optimization of structures SAW gas sensors, Acta Physica Polonica A, 124, 3, 432–435.
• 6. Hejczyk T., Urbańczyk M., Jakubik W. (2010), Analitical model of semiconductor sensor layers in SAW gas sensors, Acta Physica Polonica A, 118, 6, 1148–1152.
• 7. Hejczyk T., Urbanczyk M., Wituła R., Maciak E. (2012), SAW sensors for detection of hydrocarbons. Numerical analysis and experimental results, Bulletin of the Polish Academy of Sciences: Technical Sciences, 60, 3, 589–595.
• 8. Hossein-Babaei F. (2003), Analysis of thickness dependence of the sensitivity in thin film gas sensors, Sensors and Actuators B, 89, 256–26.
• 9. Kawalec A., Pasternak M., Jasek K. (2008), Measurements results of SAW humidity sensor with nafion layer, European Physical Journal, 154, 1, 123–126.
• 10. Maciak E., Pustelny T. (2013), An optical ammonia (NH3) gas sensing by means of Pd/CuPc interferometric nanostructures based on white light interferometry, Sensors and Actuators B-CHEMICAL, 189, 230–239.
• 11. PATENT No P-394124, 07.03.2011, title “Means of sensor analysis with a porous chemosensitive layer in configuration with surface acoustic wave”.
• 12. Procek M., Pustelny T. (2013), Analysis of the Responses of Metal-Oxide Semiconductor Nanostructures to Nitrogen Dioxide, Acta Physica Polonica A, 124, 3, 529–533.
• 13. Pustelny B., Pustelny T. (2009), Tansverse acoustoelectric effect applying in surface study of GaP:Te(111), Acta Physica Polonica A, 116, 3, 383–384.
• 14. Pustelny T., Ignac-Nowicka J., Jarzabek B., Burian A. (2004), Optical investigations concerning layered methalphthalocyanine nanostructures affected by NO2, Optica. Applicata, 34, 4, 551–561.
• 15. Pustelny T., Ignac-Nowicka J., Opilski Z. (2004), Experimental investigation of thin metalphthalocynine layers CuPc, PbPc, NiPc by plazmon resonance metod to be applied NO2-sensors, Optica. Applicata, 34, 2, 249–264.
• 16. Pustelny T., Opilski A., Pustelny B. (2008), Determination of some kinetic parameters of fast surface states in silicon single crystals by means of surface acoustic wave method, Acta Physica Polonica A, 114, 6A, A183–A190.
• 17. Pustelny T., Procek M., Maciak E., Stolarczyk A., Drewniak S., Urbanczyk M., Setkiewicz M., Gut K., Opilski Z. (2012), Gas sensors based on nanostructuures of semiconductor ZnO and TiO2, Bulletin of the Polish Academy of Sciences: Technical Sciences, 60, 4, 853–859.
• 18. Reibel J., Stahl U. (2000), Gas analysis with SAW sensor systems, Sensors and Actuators B, 65, 173–185.
• 19. Szaszkowski Z. (2003), Dynamics of finite groups acting on the boundary of homogenous rooted tree, Algebra and Discrete Mathematics, 4, 86–91.
• 20. Urbanczyk M., Maciak E., Gut K., Pustelny T., Jakubik W. (2011), Layered thin film nanostructures of Pd/WO3-x as resistance gas sensors, Bulletin of the Polish Academy of Sciences: Technical Sciences, 59, 4, 401–407.