Optimization of radio frequency inductively coupled plasma enhanced chemical vapour deposition process of diamond-like carbon films

• Autorzy: Kijaszek W. , Oleszkiewicz W.

Identyfikatory

DOI

10.5277/oa160201

• Języki publikacji: EN

Abstrakty

EN

The diamond-like carbon materials have unique mechanical, optical, electrical and chemical properties. The material is commonly applied in automotive industry, medicine and in other everyday life products. However, the diamond-like carbons are not used in micro- and optoelectronics on a wider scale due to technological problems. The application of the diamond-like carbon films in electronic structure is limited because the standard methods do not ensure that the quality and properties of the deposited film will be satisfactory for a specific application. On the other hand, more sophisticated methods that allow manufacturing the diamond-like carbon film with adequate properties, such as microwave assisted chemical vapour deposition, require heating of the substrate to high temperature (above 1000°C). The solution to the problem is the radio frequency inductively coupled plasma enhanced chemical vapour deposition method that allows deposition of the diamond-like carbon films with satisfactory properties and the process can be carried out at room temperature. In the paper, basic information and issues concerning the diamond-like carbon films manufacturing technology by radio frequency inductively coupled plasma enhanced chemical vapour deposition method will be explained. The diamond-like carbon films were investigated by the Raman scattering spectroscopy and the spectroscopic ellipsometry.

Słowa kluczowe

EN

diamond-like carbon; radio frequency inductively coupled plasma enhanced chemical vapour deposition RF ICP PECVD; Raman scattering spectroscopy; spectroscopic ellipsometry

• Wydawca: Oficyna Wydawnicza Politechniki Wrocławskiej
• Czasopismo: Optica Applicata
• Rocznik: 2016
• Tom: Vol. 46, nr 2
• Strony: 167--172
• Opis fizyczny: Bibliogr. 11 poz., rys.

Twórcy

autor

Kijaszek W.

• Division of Microelectronics and Nanotechnology, Faculty of Microsystem Electronics and Photonics, Wrocław University of Science and Technology, Janiszewskiego 11/17, 50-372 Wrocław, Poland

autor

Oleszkiewicz W.

• Division of Microelectronics and Nanotechnology, Faculty of Microsystem Electronics and Photonics, Wrocław University of Science and Technology, Janiszewskiego 11/17, 50-372 Wrocław, Poland

Bibliografia

• [1] ROBERTSON J., Diamond-like amorphous carbon, Materials Science and Engineering R: Reports 37(4–6), 2002, pp. 129–281.
• [2] BEWILOGUA K., HOFMANN D., History of diamond-like carbon films – from first experiments to worldwide applications, Surface and Coatings Technology 242, 2014, pp. 214–225.
• [3] TREUTLER P.O., Industrial use of plasma-deposited coatings for components of automotive fuel injection systems, Surface and Coatings Technology 200(5–6), 2005, pp. 1969–1975.
• [4] ROY R.K., LEE K.R., Biomedical applications of diamond-like carbon coatings: a review, Journal of Biomedical Materials Research Part B: Applied Biomaterials 83B(1), 2007, pp. 72–84.
• [5] WON SEOK CHOI, KYUNGHAE KIM, JUNSIN YI, BYUNGYOU HONG, Diamond-like carbon protective anti-reflection coating for Si solar cell, Materials Letters 62(4–5), 2008, pp. 577–580.
• [6] RAY-HUA HORNG, WEI-CHENG KAO, SIN-LIANG OU, DONG-SING WUU, Effect of diamond like carbon layer on heat dissipation and optoelectronic performance of vertical-type InGaN light emitting diodes, Applied Physics Letters 101(17), 2012, article 171102.
• [7] OLESZKIEWICZ W., MARKOWSKI J., SRNANEK R., KIJASZEK W., GRYGLEWICZ J., KOVĂČ J., TŁACZAŁA M., Influence of RF ICP PECVD process parameters of diamond-like carbon films on DC bias and optical emission spectra, Optica Applicata 43(1), 2013, pp. 109–115.
• [8] OLESZKIEWICZ W., KIJASZEK W., GRYGLEWICZ J., ZAKRZEWSKI A., GAJEWSKI K., KOPIEC D., KAMYCZEK P., POPKO E., TŁACZAŁA M., Characterization of diamond-like carbon (DLC) films deposited by RF ICP PECVD method, Proceedings of SPIE 8902, 2013, article 89022H.
• [9] OLESZKIEWICZ W., KIJASZEK W., KOVĂČ J. JR, KOVĂČ J., ZAKRZEWSKI A., PATELA S., TŁACZAŁA M., Vacuum Technique & Technology, Monographies of Tele & Radio Research Institute, Warsaw 2014, pp. 123–136.
• [10] OLESZKIEWICZ W., KIJASZEK W., KOVĂČ J. JR, KOVĂČ J., ZAKRZEWSKI A., PATELA S., TŁACZAŁA M., Characterization of diamond-like carbon (DLC) films deposited by RF ICP PECVD method – Raman scattering spectroscopy and spectroscopic ellipsometry studies, Proceedings of ADEPT, June 1–4, 2015, Štrbské Pleso, Slovakia, pp. 190–193.
• [11] CLAPA M., MITURA S., NIEDZIELSKI P., KARCZEMSKA A., HASSARD J., Colour carbon coatings, Diamond and Related Materials 10(3–7), 2001, pp. 1121–1124.

Uwagi

PL

Opracowanie ze środków MNiSW w ramach umowy 812/P-DUN/2016 na działalność upowszechniającą naukę.