Experimental study of non-measured points on surface measurement using structured illumination microscopy

• Autorzy: Li Zhen , Gröger Sophie

Identyfikatory

DOI

10.24425/mms.2022.143071

• Języki publikacji: EN

Abstrakty

EN

Non-measured points (NMPs) are one of vital problems in optical measurement. The number and location of NMPs affect the obtained surface texture parameters. Therefore, systematic studying of the NMP is meaningful in understanding the instrument performance and optimizing measurement strategies. This paper investigates the influence of measurement settings on the non-measured points ratio (NMPR) using structured illumination microscopy. It is found that using a low magnification lens, high exposure time, high dynamic range (HDR) lighting levels, and low vertical scanning interval may help reduce the NMPR. In addition, an improved approach is proposed to analyze the influence of NMP on areal surface texture parameters. The analysis indicates that the influence of NMP on some parameters cannot be ignored, especially for extreme height parameters and feature parameters.

Słowa kluczowe

EN

non-measured points; structured illumination microscopy; areal surface texture parameters; measurement uncertainty

• Wydawca: Komitet Metrologii i Aparatury Naukowej PAN
• Czasopismo: Metrology and Measurement Systems
• Rocznik: 2022
• Tom: Vol. 29, nr 4
• Strony: 763--778
• Opis fizyczny: Bibliogr. 24 poz., rys., tab., wykr., wzory

Twórcy

autor

Li Zhen

• Chemnitz University of Technology, Department of Production Measuring Technology, Reichenhainer Straße 70, 09126 Chemnitz, Germany

autor

Gröger Sophie

• Chemnitz University of Technology, Department of Production Measuring Technology, Reichenhainer Straße 70, 09126 Chemnitz, Germany

Bibliografia

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Uwagi

Opracowanie rekordu ze środków MEiN, umowa nr SONP/SP/546092/2022 w ramach programu "Społeczna odpowiedzialność nauki" - moduł: Popularyzacja nauki i promocja sportu (2022-2023).