The Investigation of Conductive Via Properties

• Autorzy: Jurków D. , Dorczyński M. , Golonka L.

Identyfikatory

DOI

10.1515/mms-2015-0007

• Języki publikacji: EN

Abstrakty

EN

The investigation ofthe Low Temperature Co-fired Ceramic (L TCC) via filling process quality is presented in this paper. The goal of this paper was to propose and to validate a way of the verification whether the L TCC fabrication was conducted correctly. The work presents an application of the Design of the Experiment (DoE) methodology in such validation and discusses usefulness and drawbacks of the chosen solution. The optimized technology of via filling will be applied in the fabrication of tactile displays for blind people.

Słowa kluczowe

EN

LTCC; DoE; experiment; via; electrical

• Wydawca: Komitet Metrologii i Aparatury Naukowej PAN
• Czasopismo: Metrology and Measurement Systems
• Rocznik: 2015
• Tom: Vol. 22, nr 1
• Strony: 39--50
• Opis fizyczny: Bibliogr. 18 poz., rys., tab., wykr.

Twórcy

autor

Jurków D.

• Wroclaw University of Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego 11117, 50-372 Wroclaw, Poland

autor

Dorczyński M.

• Wroclaw University of Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego 11117, 50-372 Wroclaw, Poland

autor

Golonka L.

• Wroclaw University of Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego 11117, 50-372 Wroclaw, Poland

Bibliografia

• [1] Baborowski, J., Mouaziz, S., Overstolz, T., Niedermann, P., Fazekas, S., Agoston, A., Martinez, G., Leung-Ki, Y., Gamper, S., Schäfer, E., Grotz, U. (2012). A hybrid elastomer-MEMS actuator for tactile graphical display. In Proc. of ACTUATOR 2012. Bremen, Germany.
• [2] Jurków, D., Bechtold, F., Baborowski, J., Fazekas, S., Agoston, A., Leung Ki, Y., Mingorance, D.C., Mateos-Aparicio, L.M., Colina Oe Vivero, M. Dorczyński, M., Golonka, L., Grotz U. (20 13). Low temperature Cofired Ceramic/PDMS hybrid actuator for Interactive Graphical Tactile Display for people with visual impairments. In Proc. of Deutsche IMAPS-Konferenz 2013. Munich, Germany. CD-ROM.
• [3] Gongora-Rubio, M.R., Espinoza-Vallejos, P., Sola-Laguna, L., Santiago-Aviles, J. (2001). Overview of low temperature co-fired ceramies tape technology for meso-system technology (MsST). Sensorsand Actuators A, 89, 222-241.
• [4] Golonka, L. (2006). Technology and applications of low temperature cofrred ceramic (L TCC) based sensors and microsystems. Bulletin of the Polish Academy of Science, Technical Science, 54, 221-231.
• [5] Thelemann, T., Thust, H., Hintz, M. (2002). Using L TCC for microsystems. Microelectronics International, 19(3), 19-23.
• [6] Hagen, G., Rebenklau, L. (2006). Fabrication of smallest vias in LTCC Tape. In Electronics System integration Technology Conference, 642-647. Dresden, Germany.
• [7] Wang, G., Folk, E.C., Barlow, F., Elshabini, A. (2006). Fabrication of microvias for multilayer LTCC substrates.IEEE Transactions on Electronics Packaging Manufacturing, 29(1), 32-41.
• [8] Tsai, C. C., Cheng, Y. S., Huang, T. Y., Hsu, Y.A., Wu, R.B. (20 11). Design of microstrip-to-microstrip via transition in multilayered L TCC for frequencies up to 67 GHz. Components, IEEE Transactions on Packaging and Manufacturing Technology, 1, 595-601.
• [9] Montgomery, D.C. (2001). Design and Analysis of Experiments. New York: John Wiley & Sons, lnc.
• [10] Ranjit, R. (2010). A primer on the Taguchi method. Dearbom: Society of Manufacturing Engineers.
• [11] Taguchi, G., Chowdhury, S., Wu, Y. (2005). Taguchi’s Quality Engineering Handbook. New Jersey: John Wiley & Sons, Inc.
• [12] Korzyński, M. (2006). Metodologia eksperymentu (Experiment methodology). Warsaw: WNT.
• [13] Jurków, D. (2013). Investigation of Co-firing Process Conditions of Low Temperature Co-fired Ceramies Using Design of Experiment. International Journal of Applied Ceramic Technology, DOI:10.1111/ijac.12207.
• [14] Jurków, D. (2013). Three axial Low Temperature Cofired Ceramic accelerometer. Microelectronics International, 30, 125-133.
• [15] Jurków, D., Golonka, L. (2013). Application of Design of the Experiment in Preliminary Investigations on the end Milling of Low Temperature Co-fired Ceramics. International Journal of Applied Ceramic Technology, 10, 671-681.
• [16] Weiss, D. J. (2006). Analysis of Variance and Functional Measurement: A Practical Guide. Oxford: Oxford University Press.
• [17] Kita, J., Dziedzic, A., Golonka, L., Zawada, T. (2002). Laser treatment of LTCC for 3D structures and elements fabrication. Microelectronics International, 19, 14-18.
• [18] Jurków, D., Malecha, K., Stiernstedt, J., Golonka, L. (2011). Influence of tapes’ properties on the laser cutting process. Journal of the European Ceramic Society, 31, 1589-1595.

Uwagi

EN

The TACMON2 project is co-funded by the European Commission through the Seventh Framework Programme (FP7) through the funding scheme “Research for the Benefit of SME-s” under Grant Agreement No. 315305. The authors wish to thank Przemysław Matkowski for X-ray tomography analyses.