Numerical Analysis of Sensitivity of SAW Structure to the Effect of Toxic Gases

• Autorzy: Hejczyk T. , Pustelny T. , Wszołek B. , Jakubik W. , Maciak E.

Identyfikatory

DOI

10.1515/aoa-2016-0072

• Języki publikacji: EN

Abstrakty

EN

The paper presents the results of numerical analysis of the SAW gas sensor in the steady and non-steady states. The effect of SAW velocity changes vs surface electrical conductivity of the sensing layer is predicted. The conductivity of the porous sensing layer above the piezoelectric waveguide depends on the profile of the diffused gas molecule concentration inside the layer. The Knudsen’s model of gas diffusion was used. Numerical results for the effect of gas CH₄ on layers: WO₃, TiO₂, NiO, SnO₂ in the steady state and CH₄ in the non-steady state in recovery step in the WO₃ sensing layer have been shown. The main aim of the investigation was to study thin film interaction with target gases in the SAW sensor configuration based on simple reaction-diffusion equation. The results of the numerical analysis allow to select the sensor design conditions, including the morphology of the sensor layer, its thickness, operating temperature, and layer type. The numerical results basing on the code elaborated numerical system (written in Python language), were analysed. The theoretical results were verified and confirmed experimentally.

Słowa kluczowe

EN

surface acoustics wave SAW; SAW; Ingebrigtsen’s formula; gas diffusion equations; gaseous acoustic sensors; numerical analyses of SAW structures

• Wydawca: Instytut Podstawowych Problemów Techniki PAN ; Komitet Akustyki PAN ; Polskie Towarzystwo Akustyczne
• Czasopismo: Archives of Acoustics
• Rocznik: 2016
• Tom: Vol. 41, No. 4
• Strony: 747--755
• Opis fizyczny: Bibliogr. 15 poz., rys., wykr.

Twórcy

autor

Hejczyk T.

• ENTE Sp. z o.o., Gaudiego 7, 44-100 Gliwice, Poland

autor

Pustelny T.

• Department of Optoelectronics, Silesian University of Technology, Akademicka 2A, 44-100 Gliwice, Poland

autor

Wszołek B.

• ENTE Sp. z o.o., Gaudiego 7, 44-100 Gliwice, Poland

autor

Jakubik W.

• Institute of Physics, Silesian University of Technology, B. Krzywoustego 22b, 44-100 Gliwice, Poland

autor

Maciak E.

• Department of Optoelectronics, Silesian University of Technology, Akademicka 2A, 44-100 Gliwice, Poland

Bibliografia

• 1. Hejczyk T., Urbanczyk M. (2011), WO3-Pd Structure in SAW Sensor Hydrogen Detection, Acta Physica Polonica A, 120, 4, 616–620.
• 2. Hejczyk T., Urbanczyk M., Jakubik W. (2010), Analytical Model of Semiconductor Sensor Layers in SAW Gas Sensors, Acta Physica Polonica A, 118, 6, 1148–1152.
• 3. Hejczyk T., Urbanczyk M., Pustelny T., Jakubik W. (2015), Numerical and Experimental Analysis of the Response of a SAW Structure with WO3 layers an Action of Carbon Monoxide, Archives of Acoustics, 40, 1, 19–24.
• 4. Hejczyk T., Urbanczyk M., Witula R., Maciak E. (2012), SAW sensors for detection of hydrocarbons. Numerical analysis and experimental results, Bulletin of the Polish Academy of Sciences: Technical Sciences, 60, 3, 589–595.
• 5. Jasek K., Miluski W., Pasternak M. (2011), New approach to saw gas sensors array response measurement, Acta Physica Polonica A, 120, 4, 639–641.
• 6. Jasek K., Neffe S., Pasternak M. (2012), SAW sensor for mercury vapour detection, Acta Physica Polonica A, 122, 5, 825–828.
• 7. Kawalec A., Pasternak M. (2008), Microwave humidity sensor based on surface acoustic wave resonator with nafion layer, IEEE Transactions on Instrumentation and Measurement, 9, 57, 2019–2023.
• 8. Kawalec A., Pasternak M., Jasek K. (2008), Measurements results of SAW humidity sensor with nafion layer, European Physical Journal: Special Topics, 154, 121–126.
• 9. Matsumaga N., Sakai G., Shimonoe K., Yamazoe N. (2001), Diffusion equation-based study of thin film semiconductor gas sensor-response transient, Sensors and Actuators B, 83, 216–221.
• 10. Matsumaga N., Sakai G., Shimonoe K., Yamazoe N. (2003), Formulation of gas diffusion dynamics for thin film semiconductor gas sensor based on simple reaction-diffusion equation, Sensors and Actuators B, 96, 226–233.
• 11. Porter J., Hilal H. S. (2004), Thermodynamic correlations and band gap calculations in metal oxides, Elsevier, Progress in Solid State Chemistry, 32, 207–217.
• 12. Pustelny B., Pustelny T. (2009), Transverse acoustoelectric effect applying in surface study of GaP: Te(111), Acta Physica Polonica A, 116, 3, 383–384.
• 13. Urbanczyk M. (2011a), Analytical model of a SAW gas sensor, WIT Transactions on Computational Methods and Experimental Measurements, Proceedings of the CMEM11, WIT Press Southampton, 48, 229–239.
• 14. Urbanczyk M. (2011b), Gas Sensors on the base of Surface Acoustic Wave [in Polish], Monograph, 213, Edited by SUT, Gliwice.
• 15. Urbanczyk M., Hejczyk T. (2011), Analysis of nonsteady state in SAW gas sensors with semiconducting sensor layers, Acta Phys. Polonica A, 120, 4, 789–793.

Uwagi

Opracowanie ze środków MNiSW w ramach umowy 812/P-DUN/2016 na działalność upowszechniającą naukę.