Wide-band optical fibre system for investigation of MEMS and NEMS deflection

• Autorzy: Orłowska K. , Świątkowski M. , Kunicki P. , Słupski P. , Sankowska A. , Gotszalk T.

Identyfikatory

DOI

10.2478/mms-2014-0032

• Języki publikacji: EN

Abstrakty

EN

In this work the construction of experimental setup for MEMS/NEMS deflection measurements is presented. The system is based on intensity fibre optic detector for linear displacement sensing. Furthermore the electronic devices: current source for driving the light source and photodetector with wide-band preamplifier are presented.

Słowa kluczowe

EN

fibre optic sensors; amplitude detection; intensity detection; MEMS/NEMS deflection measurement

• Wydawca: Komitet Metrologii i Aparatury Naukowej PAN
• Czasopismo: Metrology and Measurement Systems
• Rocznik: 2014
• Tom: Vol. 21, nr 3
• Strony: 381--388
• Opis fizyczny: Bibliogr. 11 poz., rys., wykr.

Twórcy

autor

Orłowska K.

• Wroclaw University of Technology, Faculty of Electronics Microsystems and Photonics, Division of Micro- and Nanostructures Metrology

autor

Świątkowski M.

• Wroclaw University of Technology, Faculty of Electronics Microsystems and Photonics, Division of Micro- and Nanostructures Metrology

autor

Kunicki P.

• Wroclaw University of Technology, Faculty of Electronics Microsystems and Photonics, Division of Micro- and Nanostructures Metrology

autor

Słupski P.

• Wroclaw University of Technology, Faculty of Electronics Microsystems and Photonics, Division of Micro- and Nanostructures Metrology

autor

Sankowska A.

• Wroclaw University of Technology, Faculty of Electronics Microsystems and Photonics, Division of Micro- and Nanostructures Metrology

autor

Gotszalk T.

• Wroclaw University of Technology, Faculty of Electronics Microsystems and Photonics, Division of Micro- and Nanostructures Metrology

Bibliografia

• [1] Ekinci, K. L., Roukes, M. L., (2005). Nanoelectromechanical systems, Review of Scientific Instruments 76, 061101.
• [2] Azak, N. O., Shagam, M. Y., Karabacak, D. M., Ekinci, K. L., Kim, D. H., Jang, D. Y. (2007). Nanomechanical displacement detection using fiber-optic interferometry, Applied Physics Letters, 91, 093112.
• [3] Li, M., Tang, H. X., Roukes, M. L. (2007) Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications, Nature Nanotechnology, 2, 114-120.
• [4] Lavrik, N. V., Datkos, P. G. (2003). Femtogram mass using phototermally actuated nanomechanical resonators, AppliedPhisics Letters 82,16.
• [5] Brokenshire, R. E., Pratt, R. G., (1976). Fiber Optic Displacement Transducer, US Patent 3,961,185.
• [6] Lagakos, N., Litovitz, T., Macedo, P., Mohr, R., Meister, R., (1981). Multimode optical fiber displacement sensor, Applied Optics 20, 2.
• [7] Faria, J. B., (1998). A Theoretical Analysis of the Bifurcated Fiber Bundle Displacement Sensor, IEE Transactions on Instrumentation and Measurement, 47, 3.
• [8] Udd, E., (1992) Fiber Optic Sensors, John Wiley & Sons.
• [9] ThorLabs photodiode (February 2013) http://www.thorlabs.com/catalogpages/V21/1588.PDF.
• [10] PI piezoceramics and PI Piezo Driver (February 2013) http://www.piceramic.com/site/stack_002.htmlhttp://www.physikinstrumente.com/en/pdf/E660_Datasheet.pdf.
• [11] User manual SIOS SP-120.

Uwagi

EN

The research was partly funded by „High-resolution force and mass metrology using actuated MEMS/NEMS devices – FoMaMet” project, realized under the TEAM Programme of the Foundation for Polish Science (Fundacja na rzecz Nauki Polskiej) and the statutory funding S30035 of Wroclaw University Of Technology.