Thermal analysis of micro-heaters using the 3D-TLM method and COMSOL multiphysics software for MEMS based gas sensor

• Autorzy: Djameleddine Kheris , Hocine Rachida

Identyfikatory

DOI

10.15199/48.2023.03.43

Warianty tytułu

PL

Analiza termiczna mikrogrzejników metodą 3D-TLM i oprogramowaniem COMSOL Multiphysics dla czujnika gazu MEMS

• Języki publikacji: EN

Abstrakty

EN

The gas sensors with Metal-Oxide (MOx) offer new opportunities for MEMS sensors due to their low congestion, high sensibility and fast answer. Microhotplate is the key component in these sensors to control the temperature of the sensing layer. In this work a meander platinum based heater has been fabricated and design. The transmission line matrix 3D-TLM method and COMSOL software are used to predict the homogeneous temperature distribution. Thus, temperatures control of hot areas of micro-heater are very important before any gas sensors and MEMS design.

PL

Czujniki gazu z tlenkiem metalu (MOx) oferują nowe możliwości dla czujników MEMS ze względu na ich niewielkie zatłoczenie, wysoką czułość i szybką odpowiedź. Płyta grzejna jest kluczowym elementem tych czujników do kontrolowania temperatury warstwy czujnikowej. W tej pracy wykonano i zaprojektowano meandrowy grzejnik na bazie platyny. Metoda 3D-TLM z macierzą linii transmisyjnych i oprogramowanie COMSOL są wykorzystywane do przewidywania jednorodnego rozkładu temperatury. Dlatego kontrola temperatury gorących obszarów mikropodgrzewacza jest bardzo ważna przed jakimikolwiek czujnikami gazu i projektowaniem MEMS.

Słowa kluczowe

EN

MEMS-based gas sensors; microheater; 3D-TLM; COMSOL multiphysics; homogeneous temperature distribution

PL

czujniki gazu; MEMS; mikronagrzewnica; 3D-TLM; jednorodny rozkład temperatury

• Wydawca: Wydawnictwo SIGMA-NOT
• Czasopismo: Przegląd Elektrotechniczny
• Rocznik: 2023
• Tom: R. 99, nr 3
• Strony: 241--245
• Opis fizyczny: Bibliogr. 22 poz., rys., tab.

Twórcy

autor

Djameleddine Kheris

• University of USTO-Oran, Department of Automatic

autor

Hocine Rachida

• Department of Automatics Engineering, University of Sciences and Technology of Oran, Algeria

• https://orcid.org/0000-0002-3781-9779

Bibliografia

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Uwagi

Opracowanie rekordu ze środków MNiSW, umowa nr SONP/SP/546092/2022 w ramach programu "Społeczna odpowiedzialność nauki" - moduł: Popularyzacja nauki i promocja sportu (2024).