A new environmentally friendly chemical mechanical polishing method applied for surface finishing Ti-6Al-4V alloy

• Autorzy: Quang Nguyen Minh , Quan Nguyen Ngoc , Mai Nguyen Trong , Thanh Le Thi Phuong , Tung Nguyen Tien , Tan Tran Ngoc , Hai Ha Thanh , Trinh Nguyen Duy

Identyfikatory

DOI

10.36897/jme/169614

• Języki publikacji: EN

Abstrakty

EN

A new eco-friendly slurry has been developed for the chemical mechanical polishing process with a solution of malic acid, deionized water, and an oxidizing agent hydrogen peroxide (H₂O₂). The surface quality of Ti-6Al-4V workpieces with the proposed chemical mechanical polishing slurry with optimal parameters include oxidizers (H₂O₂), colloidal (SiO₂) slurry, and deionized water by weight 8%, 45%, and 47% respectively, the pH concentration is adjusted 4 through the malic acid content present in the slurry. Experimental results obtained with the proposed chemical mechanical polishing method show a more improved surface quality than previous studies when applying for polishing Ti-6Al-4V alloy. The developed chemical mechanical polishing method's polishing results under optimal conditions obtain an ultra-fine surface quality with Ra = 0.696 nm over a measuring area of 53×70 μm². X-ray photoelectron (XPS) and electrochemical measurements were used to study the chemical reaction mechanisms in the proposed chemical mechanical polishing process. The chemical mechanical polishing processes for the surface of the Ti-6Al-4V alloy workpiece with the H₂O₂ oxidizing agent showed high suitability with the reactants formed on the surface such as Ti, V, and Al oxide. With the proposed oxidant and the established chemical mechanical polishing slurry, the feasibility and surface quality of the super smooth Ti-6Al-4V workpiece formed after polishing were demonstrated. The established chemical mechanical polishing method shows high applicability in environmental protection and Ti-6Al-4V alloy ultra-precision machining industries.

Słowa kluczowe

EN

chemical-mechanical polishing; hydrogen peroxide; TI-6AL-4V; silica; malic acid

• Wydawca: Wydawnictwo Wrocławskiej Rady FSNT NOT
• Czasopismo: Journal of Machine Engineering
• Rocznik: 2023
• Tom: Vol. 23, No. 4
• Strony: 64--76
• Opis fizyczny: Bibliogr. 30 poz., rys., tab.

Twórcy

autor

Quang Nguyen Minh

• Faculty of Mechanical Engineering, Hanoi University of Industry, Hanoi city, Vietnam

autor

Quan Nguyen Ngoc

• Faculty of Mechanical Engineering, Hanoi University of Industry, Hanoi city, Vietnam

autor

Mai Nguyen Trong

• Faculty of Mechanical Engineering, Hanoi University of Industry, Hanoi city, Vietnam

autor

Thanh Le Thi Phuong

• Faculty of Mechanical Engineering, Hanoi University of Industry, Hanoi city, Vietnam

autor

Tung Nguyen Tien

• Faculty of Mechanical Engineering, Hanoi University of Industry, Hanoi city, Vietnam

autor

Tan Tran Ngoc

• Faculty of Mechanical Engineering, Hanoi University of Industry, Hanoi city, Vietnam

autor

Hai Ha Thanh

• Faculty of Mechanical Engineering, Hanoi University of Industry, Hanoi city, Vietnam

autor

Trinh Nguyen Duy

• Faculty of Mechanical Engineering, Hanoi University of Industry, Hanoi city, Vietnam

Bibliografia

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Uwagi

Opracowanie rekordu ze środków MNiSW, umowa nr SONP/SP/546092/2022 w ramach programu "Społeczna odpowiedzialność nauki" - moduł: Popularyzacja nauki i promocja sportu (2024).