Technology and measurements of magnetoresistance in thin-layered ferromagneti C structures

• Autorzy: Kisała Jakub , Czarnacka Karolina , Gęca Mateusz , Kociubiński Andrzej

Identyfikatory

DOI

10.35784/iapgos.896

Warianty tytułu

PL

Technologia i pomiary magnetooporu w cienkowarstwowych strukturach ferromagnetycznych

• Języki publikacji: EN

Abstrakty

EN

The paper presents the technology for obtaining NiFe/Ti/NiFe layer structures in MEMS technology using magnetron purge with the assumption of being used as semi-magnetic sensors. A series of samples was made on a glass substrate with a sandwich structure, where the individual layers were 100 nm NiFe, 10 nm Ti and on top again NiFe with a thickness of 100 nm. Measurements of DC resistance of the obtained structures in a constant magnetic field, which was produced by neodymium magnets and an electromagnet, were carried out. The obtained results confirm the occurrence of phenomena known as the magnetoresistance effect. The influence of the spatial arrangement of structures relative to the constant magnetic field vector was checked and proved.

PL

W pracy przedstawiono technologię otrzymywania struktur warstwowych NiFe/Ti/NiFe w technologii MEMS metodą rozpylania magnetronowego w założeniu mających służyć jako czujniki pól magnetycznych. Wykonano serię próbek na szklanym podłożu o budowie kanapkowej, gdzie poszczególne warstwy stanowiły 100 nm NiFe,10 nm Ti oraz na wierzchu ponownie NiFe o grubości 100 nm. Przeprowadzono pomiary rezystancji stałoprądowej otrzymanych struktur w stałym polu magnetycznym, które było wytwarzane przez magnesy neodymowe oraz elektromagnes. Otrzymane wyniki potwierdzają występowanie zjawisk określanych jako efekt magnetooporowy. Sprawdzony oraz udowodniony został wpływ ułożenia przestrzennego struktur względem wektora stałego pola magnetycznego.

Słowa kluczowe

EN

static magnetic field; magnetron sputtering; MEMS; magnetoresistance

PL

statyczne pole magnetyczne; rozpylanie magnetronowe; MEMS; magnetoopór

• Wydawca: Wydawnictwo Politechniki Lubelskiej
• Czasopismo: Informatyka, Automatyka, Pomiary w Gospodarce i Ochronie Środowiska
• Rocznik: 2020
• Tom: T. 10, nr 1
• Strony: 44--47
• Opis fizyczny: Bibliogr. 22 poz., rys.

Twórcy

autor

Kisała Jakub

• Lublin University of Technology, Lublin, Poland

autor

Czarnacka Karolina

• niversity of Life Sciences, Lublin, Poland

autor

Gęca Mateusz

• Lublin University of Technology, Lublin, Poland

autor

Kociubiński Andrzej

• Lublin University of Technology, Lublin, Poland

Bibliografia

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Uwagi

Opracowanie rekordu ze środków MNiSW, umowa Nr 461252 w ramach programu "Społeczna odpowiedzialność nauki" - moduł: Popularyzacja nauki i promocja sportu (2020).