1-D equivalent circuit for RF MEMS capacitive switch

• Autorzy: Kula S.
• Konferencja: Computer Applications in Electrical Engineering 2014 (28-29.04.2014; Poznań, Polska)
• Języki publikacji: EN

Abstrakty

EN

In this paper the equivalent circuit for an accurate model of the RF (Radio Frequency) MEMS (Micro Electro-Mechanical Systems) capacitive switch is presented. The capacitive switch consists of a thin metal membrane, which name is bridge suspended over central conductor and connected at both ends to the ground conductor of CPW (coplanar waveguide). The equivalent circuit was created based on multi-physic modelling, elements analogues, and electrical equivalences. Mechanical and electrical forces are included in the equivalent circuit as current sources. The usefulness and effectiveness of the model was verified through results comparison with the commercial APLAC software and mathematical modelling in Matlab software. The novelty of the paper is the equivalent circuit, which is useful to simulate linear and non-linear cases of the RF MEMS capacitive switch and also the novelty is an implementation of the equivalent circuit in LTSpice, which is a freeware circuits simulator.

Słowa kluczowe

EN

RF MEMS switch; equivalent circuits for MEMS; multiphysics modeling

• Wydawca: Wydawnictwo Politechniki Poznańskiej
• Czasopismo: Poznan University of Technology Academic Journals. Electrical Engineering
• Rocznik: 2014
• Tom: No. 80
• Strony: 175--181
• Opis fizyczny: Bibliogr. 5 poz., rys.

Twórcy

autor

Kula S.

• Kazimierz Wielki University in Bydgoszcz

Bibliografia

• [1] Kraus G., SPICE-Simulation using LTspice IV, Elektronikschule Tettnang, Germany, 2010.
• [2] Veijola T., Nonlinear Circuit Simulation of MEMS Components: Controlled Current Source Approach, ECCTD’01, 2001, Espoo, Finland.
• [3] Muldavin J.B., Rebeiz G.M., Nonlinear electro-mechanical modeling of MEMS switches, Microwave Symposium Digest, IEEE MTT-S International, Volume 3, ISSN 0149-645X , 2001.
• [4] Konishi T., Machida K., Masu K., and Toshiyoshi H., Multi-Physics Equivalent Circuit Model for MEMS Sensors and Actuators, ECS Trans., Volume 50, ISSN 1945-7111, 2013.
• [5] Tinttunen T., Veijola T., Nieminen H., Ermolov V. and Ryhanen T., Static Equivalent Circuit Model for a Capacitive MEMS RF Switch, Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems, Nanotech, Volume 1, ISBN:0-9708275-7-1, 2002.