Właściwości powłok AlCrN otrzymanych metodą katodowego odparowania łukowego

• Autorzy: Gilewicz A. , Warcholiński B.

Warianty tytułu

EN

Properties of AlCrN coatings obtained by means of cathodic arc evaporation

• Języki publikacji: PL

Abstrakty

PL

Powłoki AlCrN formowane są wieloma metodami, m.in. w procesie katodowego odparowania łukowego. Charakteryzuje się on dużą szybkością nanoszenia, ale gorszą jakością powierzchni w porównaniu z powłokami uzyskanymi np. metodą rozpylania magnetronowego. W niniejszej pracy opisano wpływ parametrów technologicznych (ciśnienia azotu w komorze roboczej, temperatury i napięcia polaryzacji podłoża) na niektóre właściwości mechaniczne, skład chemiczny oraz stan powierzchni otrzymywanych powłok. Zaobserwowano występowanie stosunkowo dużej ilości makrocząstek na powierzchni powłoki zależne od ciśnienia azotu i napięcia polaryzacji podłoża. Rezultaty badań wskazują, że wraz ze wzrostem ciśnienia azotu parametr chropowatości powłok Ra maleje, a wraz ze wzrostem napięcia polaryzacji podłoża jest prawie stały. Twardość powłok jest zależna od parametrów ich formowania: zwiększa się wraz ze wzrostem ciśnienia azotu w komorze i napięcia polaryzacji podłoży podczas formowania powłok, a maleje wraz ze wzrostem temperatury. Powłoki AlCrN charakteryzują się bardzo dobrą przyczepnością do podłoża. Siła krytyczna dla powłok otrzymywanych w ciśnieniu azotu od 0,8 Pa do 4 Pa jest stała i wynosi ok. 90 N, natomiast siła krytyczna dla powłok formowanych przy wyższych napięciach polaryzacji podłoża maleje do ok. 60 N.

EN

AlCrN coatings are formed by means of different deposition methods, among others cathodic arc evaporation. On one hand, this method is characterized by high deposition rate but on the other hand, the surface shows poorer quality than, for example, the surface gained by means of agnetron sputtering method. This paper describes the influence of process parameters (nitrogen pressure in the working chamber, temperature and substrate bias voltage) on some mechanical properties, chemical composition and the surface quality of the obtained coatings. Relatively large number of macroparticles on the surface of the coating dependent upon the nitrogen pressure and substrate bias voltage was observed. The research results indicate that along with the increasing nitrogen pressure coating the profile roughness parameter Ra coating decreases, and along with the increasing substrate bias voltage it is almost constant. The hardness of the coatings depends on the parameters of their formation: it increases along with the increase of the nitrogen pressure in the chamber and along with the substrate bias voltage during the formation of the coating, and it decreases along with the increasing temperature. AlCrN coatings are characterized by very good adhesion to the substrate. The critical force for the coatings obtained in the nitrogen pressure of 0.8 Pa to 4 Pa is fixed at about 90 N, but the critical force for the coatings formed at the high substrate bias voltage is reduced to about 60 N.

Słowa kluczowe

PL

powłoka; PVD; AlCrN; skład chemiczny; twardość; adhezja

EN

Coating; PVD; AlCrN; chemical composition; hardness; adhesion

• Wydawca: Sieć Badawcza Łukasiewicz – Instytut Mechaniki Precyzyjnej
• Czasopismo: Inżynieria Powierzchni
• Rocznik: 2015
• Tom: nr 4
• Strony: 11--18
• Opis fizyczny: Bibliogr. 36 poz., rys., tab., wykr.

Twórcy

autor

Gilewicz A.

• Politechnika Koszalińska, Wydział Technologii i Edukacji

autor

Warcholiński B.

• Politechnika Koszalińska, Wydział Technologii i Edukacji

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