Dynamic tilt testing of MEMS inclinometers based on conical motions

• Autorzy: Yang Qihang , Cai Chenguang , Yang Ming , Kong Ming , Liu Zhihua , Liang Feng

Identyfikatory

DOI

10.24425/mms.2023.144398

• Języki publikacji: EN

Abstrakty

EN

The MEMS inclinometer integrates a tri-axis accelerometer and a tri-axis gyroscope to solve the perceived dynamic inclinations through a complex data fusion algorithm, which has been widely used in the fields of industrial, aerospace, and monitoring. In order to ensure the validity of the measurement results of MEMS inclinometers, it is necessary to determine their dynamic performance parameters. This study proposes a conical motion-based MEMS inclinometer dynamic testing method, and the motion includes the classical conical motion, the attitude conical motion, and the dual-frequency conical motion. Both the frequency response and drift angle of MEMS inclinometers can be determined. Experimental results show that the conical motions can accelerate the angle drift of MEMS inclinometers, which makes them suitable for dynamic testing of MEMS inclinometers. Additionally, the tilt sensitivity deviation of the MEMS inclinometer by the proposed method and the turntable-based method is less than 0.26 dB. We further provide the research for angle drift and provide discussion.

Słowa kluczowe

EN

MEMS inclinometer; sensitivity; dynamic testing; conical motion; angle drift

• Wydawca: Komitet Metrologii i Aparatury Naukowej PAN
• Czasopismo: Metrology and Measurement Systems
• Rocznik: 2023
• Tom: Vol. 30, nr 1
• Strony: 31--47
• Opis fizyczny: Bibliogr. 30 poz., rys., tab., wykr., wzory

Twórcy

autor

Yang Qihang

• College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou 310018, China

autor

Cai Chenguang

• National Institute of Metrology of China, Beijing 100013, China

autor

Yang Ming

• College of Electrical Engineering, Guizhou University, Guiyang 550025, China

autor

Kong Ming

• College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou 310018, China

autor

Liu Zhihua

• National Institute of Metrology of China, Beijing 100013, China

autor

Liang Feng

• Shenyang Aircraft Corporation, Shenyang 110031, China

Bibliografia

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Uwagi

1. This work was supported in part by National Natural Science Foundation of China (No. 52075512; No. 52265066; No. 62203132); National Key R&D Program of China (No. 2017YFF0205003); Doctor Foundation Project of Guizhou University (No. Guida Renji Hezhi [2020] 30); Youth Science and Technology Talents Development Project of Guizhou Education Department (No. Qianjiaohe KY [2022] 138).

2. Opracowanie rekordu ze środków MNiSW, umowa nr SONP/SP/546092/2022 w ramach programu "Społeczna odpowiedzialność nauki" - moduł: Popularyzacja nauki i promocja sportu (2024).