Modeling of mechanical influence of double-beam laser on single-crystalline silicon

• Autorzy: Shalupaev S. V. , Serdyukov A. N. , Mityurich G. S. , Aleksiejuk M. , Nikitjuk Y. V. , Sereda A. A.

Identyfikatory

DOI

10.2478/amm-2013-0179

Warianty tytułu

PL

Modelowanie mechanicznego wpływu podwójnej wiązki laserowej na krystaliczny krzem

• Konferencja: Composites and Ceramic Materials - Technology, Application and Testing (13 ; 13-15.05.2013 ; Białowieża, Poland)
• Języki publikacji: EN

Abstrakty

EN

The results of finite-element modeling of controlled laser thermosplitting of crystalline silicon are presented. The case of treatment by two laser beam with wavelengths, namely 0.808 μm and 1.06 μm is studied. Calculations of the thermoelastic fields formed in a single-crystalline silicon wafer as a result of consecutive two-beam laser heating and action of coolant were performed for silicon crystalline orientations: (100), (110), (111). Modeling was performed for circular and U-shaped laser beams. The results received in the presented work, can be used for the process optimization concerning the precise separation of silicon wafers by laser cutting.

PL

W pracy przedstawiono wyniki modelowania metoda elementów skonczonych termorozszczepiania krystalicznego krzemu przy pomocy wiazek laserowych. Analizowano przypadek działania dwóch wiazek laserowych o długosci fali 0,808 μm i 1,06 μm. Obliczenia pól termosprężystych, formowanych w krystalicznym waflu krystalicznym, prowadzono jako efekt kolejnych działan dwuwiązkowego ogrzewania laserowego i chłodzenia dla orientacji (100), (110), (111) krystalicznego krzemu. Modelowanie prowadzone było dla wiązek o przekroju kolistym oraz w kształcie litery U. Otrzymane wyniki mogą być wykorzystane do optymalizacji precyzyjnego cięcia laserem wafli krzemowych.

Słowa kluczowe

EN

laser cutting; thermoelastic stresses; silicon wafers; crack

PL

cięcie laserowe; naprężenia termoelastyczne; wafle krystaliczne; pękanie

• Wydawca: Institute of Metallurgy and Materials Science of Polish Academy of Sciences ; Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences
• Czasopismo: Archives of Metallurgy and Materials
• Rocznik: 2013
• Tom: Vol. 58, iss. 4
• Strony: 1381--1385
• Opis fizyczny: Bibliogr. 23 poz., rys., tab., wzory

Twórcy

autor

Shalupaev S. V.

• Department of Physics “Gomel State University by F. Skorina”, Sovetskaya 104, 246019 Gomel, Belarus

autor

Serdyukov A. N.

• Department of Physics “Gomel State University by F. Skorina”, Sovetskaya 104, 246019 Gomel, Belarus

autor

Mityurich G. S.

• Educational Establishment "Belarusian Trade and Economics University of Consumer Cooperatives", Gomel

autor

Aleksiejuk M.

• Institute of Fundamental Technological Reasearch Polish Academy of Sciences, 5b Pawińskiego, 02-106 Warszawa, Poland

autor

Nikitjuk Y. V.

• Department of Physics “Gomel State University by F. Skorina”, Sovetskaya 104, 246019 Gomel, Belarus

autor

Sereda A. A.

• Department of Physics “Gomel State University by F. Skorina”, Sovetskaya 104, 246019 Gomel, Belarus

Bibliografia

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