On the approach to the analysis of the growth of epitaxial layers by pulsed laser deposition

• Autorzy: Pankratov Evgeny L.

Identyfikatory

DOI

10.7494/cmms.2021.4.0768

• Języki publikacji: EN

Abstrakty

EN

This paper considers an analytical approach for the prognosis of mass and heat transport during the growth of epitaxial layers by means of pulsed laser deposition. The approach provides the opportunity to make a prognosis which takes into account the spatial and temporal variations of their parameters and, at the same time, the nonlinearity of these processes. Based on this approach, the influence of the variation of several parameters on the growth process is investigated.

Słowa kluczowe

EN

pulsed laser deposition; mass transport; heat transport; analytical modelling

• Wydawca: Wydawnictwa AGH
• Czasopismo: Computer Methods in Materials Science
• Rocznik: 2021
• Tom: Vol. 21, No. 4
• Strony: 203--208
• Opis fizyczny: Bibliogr. 13 poz., rys.

Twórcy

autor

Pankratov Evgeny L.

• Nizhny Novgorod State University, 23 Gagarin Avenue, Nizhny Novgorod, 603950, Russia
• Nizhny Novgorod State Technical University, 24 Minin Street, Nizhny Novgorod, 603950, Russia

• https://orcid.org/0000-0001-6174-2612

Bibliografia

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Uwagi

Opracowanie rekordu ze środków MEiN, umowa nr SONP/SP/546092/2022 w ramach programu "Społeczna odpowiedzialność nauki" - moduł: Popularyzacja nauki i promocja sportu (2022-2023).