Low Humidity Characteristics of Polymer-Based Capacitive Humidity Sensors

• Autorzy: Majewski J.

Identyfikatory

DOI

10.1515/mms-2017-0048

• Języki publikacji: EN

Abstrakty

EN

Polymer-based capacitive humidity sensors emerged around 40 years ago; nevertheless, they currently constitute large part of sensors’ market within a range of medium (climatic and industrial) humidity 20-80%RH due to their linearity, stability and cost-effectiveness. However, for low humidity values (0-20%RH) that type of sensor exhibits increasingly nonlinear characteristics with decreasing of humidity values. This paper presents the results of some experimental trials of CMOS polymer-based capacitive humidity sensors, as well as of modelling the behaviour of that type of sensor. A logarithmic functional relationship between the relative humidity and the change of sensor output value at low humidity is suggested.

Słowa kluczowe

EN

polymer-based capacitive humidity sensors; low humidity measurement; humidity sensors modelling

• Wydawca: Komitet Metrologii i Aparatury Naukowej PAN
• Czasopismo: Metrology and Measurement Systems
• Rocznik: 2017
• Tom: Vol. 24, nr 4
• Strony: 607--616
• Opis fizyczny: Bibliogr. 29 poz., rys., wykr., wzory

Twórcy

autor

Majewski J.

• Lublin University of Technology, Faculty of Electrical Engineering and Computer Science, Nadbystrzycka 38A, 20-618 Lublin, Poland

Bibliografia

• [1] Rübner, K., Balköse, D., Robens, E. (2008). Methods of humidity determination. Part I: Hygrometry. J. Thermal Anal. Cal., 94(3), 669-673.
• [2] Dunmore, F. (1938). An Electric Hygrometer and Its Application to Radio Meteorography. J. Res. Natl. Bur. Stand., 20,723-744.
• [3] Salasmaa, E. (1986). Humicap® thin film humidity sensor. Gensler, W.G.(ed.). Advanced Agricultural Instrumentation. Dordrecht: Martinus Nijhoff Publishers.
• [4] Jason, C.A., Lees A. (1964). Hygrometric elements. US Patent 3,121,853.
• [5] Farahani, H., Wagiran, R., Hamidon, M.N. (2014). Humidity Sensors Principle, Mechanism and Fabrication Technologies: A Comprehensive Review. Sensors, 14, 7881-7939.
• [6] Hársanyi, G. (1995). Polymer Films in Sensor Applications. Basel: Technomic Publishing AG.
• [7] Rittersma, Z.M. (2002). Recent achievments in miniaturised humidity sensors - a review of transduction techniques. Sens. Actuators A, 96,196-210.
• [8] Hübert, T., Tiebe, C., Detjens, M., Majewski, J. (2016) On-Site Calibration System for Trace Humidity Sensors. Measurement. In Press, Accepted Manuscript 2016.05.13, doi:http://dx.doi.org/10.2016/j.measurement
• [9] Story, P.R., Galipeau, D.W., Mileham, R.D. (1995). A study of low-cost sensors for measuring low relative humidity. Sens. Actuators B, 24-25,681-685.
• [10] Harri, A.M., et al. (2014). Mars Science Laboratory relative humidity observations: Initial results.J. Geophys. Res. Planets, 119, 2132-2147.
• [11] Rübner, K., Balköse, D., Robens, E. (2008). Methods of humidity determination. Part II: Determination of material humidity. J. Thermal Anal. Cal., 94(3), 675-682.
• [12] Denton, D.D., Camou, J.B., Senturia, S.D. (1985). Effects of moisture uptake on the dielectric permittivity of polyimide films. Int. Symp. on Moisture and Humidity, Research Triangle Park, N. C., Instrument Soc. Amer., 505-513.
• [13] Anderson, P.S. (1995). Mechanism for the Behavior of Hydroactive Materials Used in Humidity Sensors. J. Atmos. and Oceanic Technol., 12, 662-667.
• [14] Yang, D.K., Koros, W.J., Hopfenberg, H.B., Stannett, V.T. (1985). Sorption and Transport Studies of Water in Kapton*Polyimide.I. J. Appl. Polymer Sci., 30, 1035-1047.
• [15] Musto, P., Mentisieri, G., Lavorgna, M., Scarinzi, G., Scherillo, G. (2012). Combining Gravimetric and Vibrational Spectroscopy Measurements to Quantify First- and Second-Shell Hydration Layers in Polyimides with Different Molecular Architectures. J. Phys. Chem. B, 116, 1209-1220.
• [16] Korotcenkov, G. (2013). Handbook of Gas Sensor Materials: Properties, Advantages and Shortcomings for Applications Volume 1: Conventional Approaches. Springer Science+Business Media, LLC.
• [17] Van Alsten, J.G., Coburn, J.C. (1994). Structural Effects on the Transport of Water in Polyimides. Macromolecules, 27, 3746-3752.
• [18] Mensitieri, G., Lavorgna, M., Larobina, D., Scherillo, G., Ragosta, G., Musto, P. (2008). Molecular Mechanism of H2O Diffusion into Polyimides: A Model Based on Dual Mobility with Instantaneous Local Nonlinear Equilibrium. Macromolecules, 41, 4850-4855.
• [19] Ravji, S.H. (2015). Mechanisms of water vapour transport in polyimide thin films for applications in humidity sensing. Ph.D. Thesis, University of Glasgow, UK.
• [20] Zent, A.P., et al. (2010). Initial results from the thermal electrical conductivity probe (TECP) on Phoenix, J. Geophys. Res. Planets, 115, E00E14, http://dx.doi.org/10.1029/2009JE003420.
• [21] Tetelin, A., Pellet, C. (2006). Modeling and Optimization of a Fast Response Capacitive Humidity Sensor. IEEE Sensors J., 6(3), 714-720.
• [22] Wildmann, N., Kaufmann, F., Bange, J. (2014). An inverse-modelling approach for frequency response correction of capacitive humidity sensorsin ABL research with small remotely piloted aircraft (RPA). Atmos. Meas. Tech., 7, 3059-3069.
• [23] Rückerl, A., Huppmann, S., Zeisel, R., Katz, S. (2014). Monolithic integrable capacitive humidity sensing method for material characterization of dielectric thin films. Microelectronics Reliability, 54, 1741-1744.
• [24] Sadaoka, Y. (2009). Capacitive-Type Relative Humidity Sensors with Hydrophobic Polymer Films. Ch.3, 109−152, in: Comini, E., Faglia, G., Sberveglieri, G. (eds.). Solid state Gas Sensing. New York: Springer Science & Business Media.
• [25] Fratoddi, I., Bearzotti, A., Venditti, I., Cametti, C., Russo, M.V. (2016). Role of nanostructured polymers on the improvement of electrical respons-based relative humidity sensors. Sens. Actuators B, 225, 96-108.
• [26] Żukowski, P., Kołtunowicz, T.N., Kierczyński, K., Subocz, J., Szrot, M. (2016). Formation of water nanodrops in cellulose impregnated with insulating oil. Cellulose, 22(1), 861-866.
• [27] Cirmirakis, D., Demosthenous, A., Saeidi, N. (2013). Humidity-to-Frequency Sensor in CMOS Technology With Wireless Readout. IEEE Sensors J., 13(3), 900-908.
• [28] Wang, B., Law, M.K., Bermak, A. (2012). A Low-Cost Capacitive Relative Humidity Sensor for Food Moisture Monitoring Application. Proc. of the 4th Asia Symposium on Quality Electronic Design.(ASQED), 509(2), 95-99.
• [29] Datasheet SHT21. Humidity and Temperature Sensor IC. https://www.sensirion.com (May 2016).

Uwagi

EN

The author is indebted to the team of the Working Group 8.1 at the Bundesanstalt für Materialforschung und -prüfung (Berlin, Germany) for practical support and scientific discussion.

PL

Opracowanie ze środków MNiSW w ramach umowy 812/P-DUN/2016 na działalność upowszechniającą naukę (zadania 2017).