A review on echo and phase inverted scanning in acoustic microscopy for failure analysis

• Autorzy: Ahmad Badrul Hisham , Al-Shaikhli Taha Raad , Hassan Nornikman , Ibrahim Ayman Mohammed , Lim P. E. , Nordin Nurul Syahira

Identyfikatory

DOI

10.15199/48.2021.03.02

Warianty tytułu

PL

Przegląd metod wykorzystania mikroskopów akustycznych do analizy uszodzeń układów półprzewodnikowych

• Języki publikacji: EN

Abstrakty

EN

This paper is a review on the part of the failure analysis in the semiconductor region, especially in the integrated circuit (IC) design. Initially, the literature review depends on the keyword of acoustic-microscopy. Then, it followed by the example on the scanning acoustic-microscope (SAM), confocal scanning acoustic-microscope (CSAM), and C-mode scanning acoustic-microscope (C-SAM) technique. These three SAM techniques are used in various situation and have a different effect on the sample. Previous works on SAM, C-SAM and CSAM related technologies are reviewed by many researchers in this paper.

PL

W artykule przedstawiono przegląd analizy defektów układów półprzewodnikowych (obwodów scalonych) z wykorzystaniem mikroskopów akustycznych. Zaprezentowano mikroskop akustyczny SAM, mikroskop skaningowy CSAM i mikroskop typu C C-SAM. Każda z tych metod pozwala na różnego typu badania.

Słowa kluczowe

EN

acoustic microscopy; C-mode scanning acoustic-microscope; C-SAM; Confocal scanning acoustic-microscope; CSAM; scanning acoustic microscopy

PL

mikroskop akustyczny; mikroskop skaningowy; SEM; mikroskop SAM; CSAM

• Wydawca: Wydawnictwo SIGMA-NOT
• Czasopismo: Przegląd Elektrotechniczny
• Rocznik: 2021
• Tom: R. 97, nr 3
• Strony: 9--14
• Opis fizyczny: Bibliogr. 29 poz., rys.

Twórcy

autor

Ahmad Badrul Hisham

• Center for Telecommunication Research and Innovation (CeTRI), Faculty of Electronic and Computer Engineering (FKeKK), Universiti Teknikal Malaysia Melaka (UTeM), Malaysia

autor

Al-Shaikhli Taha Raad

• Center for Telecommunication Research and Innovation (CeTRI), Faculty of Electronic and Computer Engineering (FKeKK), Universiti Teknikal Malaysia Melaka (UTeM), Malaysia

autor

Hassan Nornikman

• Center for Telecommunication Research and Innovation (CeTRI), Faculty of Electronic and Computer Engineering (FKeKK), Universiti Teknikal Malaysia Melaka (UTeM), Malaysia

autor

Ibrahim Ayman Mohammed

• Center for Telecommunication Research and Innovation (CeTRI), Faculty of Electronic and Computer Engineering (FKeKK), Universiti Teknikal Malaysia Melaka (UTeM), Malaysia

autor

Lim P. E.

• ST Microelectronics sdn. bhd, Tanjong Agas, Muar, Johor, Malaysia

autor

Nordin Nurul Syahira

• Center for Telecommunication Research and Innovation (CeTRI), Faculty of Electronic and Computer Engineering (FKeKK), Universiti Teknikal Malaysia Melaka (UTeM), Malaysia

Bibliografia

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Uwagi

Opracowanie rekordu ze środków MNiSW, umowa Nr 461252 w ramach programu "Społeczna odpowiedzialność nauki" - moduł: Popularyzacja nauki i promocja sportu (2021).