Crystal Lattice Damage and Recovery of Rare-Earth implanted Wide Bandgap Oxides

• Autorzy: Sarwar Mahwish , Ratajczak Renata , Ivanov Vitalii , Mishra Sushma , Turek Marcin , Wierzbicka Aleksandra , Woźniak Wojciech , Guziewicz Elżbieta

Identyfikatory

DOI

10.12913/22998624/153942

• Języki publikacji: EN

Abstrakty

EN

Rare earth (RE) elements are important for the optical tuning of wide bandgap oxides (WBO) such as β-Ga2O3 or ZnO, because β-Ga2O3:RE or ZnO:RE show narrow emission lines in the visible, ultra-violet and infra-red region. Ion implantation is an attractive method to introduce dopant into the crystal lattice with an extraordinary control of the dopant ion composition and location, but it creates the lattice damage, which may render the dopant optically inactive. In this research work, we investigate the post-implantation crystal lattice damage of two matrices of wide-bandgap oxides, β-Ga2O3 and ZnO, implanted with rare-earth (RE) to a fluence of 5 x 10^14, 1 x 10^15 and 3 x 10^15 atoms/cm^2, and post-growth annealed in Ar and O2 atmosphere, respectively. The effect of implantation and annealing on both crystal lattices was investigated by channeling Rutherford backscattering spectrometry (RBS/C) technique. The level of crystal lattice damage caused by implantation with the same RE fluences in the case of β-Ga2O3 seems to be higher than in the case of ZnO. Low temperature photoluminescence was used to investigate the optical activation of RE in both matrices after performed annealing.

Słowa kluczowe

EN

wide bandgap oxides; zinc oxide; gallium oxide; rare earth; ion implantation; Rutherford backscattering spectrometry; low temperature photoluminescence

• Wydawca: Lublin University of Technology ; Polish Society of Ecological Engineering (PTIE), Branch of PTIE in Lublin
• Czasopismo: Advances in Science and Technology. Research Journal
• Rocznik: 2022
• Tom: Vol. 16, no 5
• Strony: 147--154
• Opis fizyczny: Bibliogr. 24 poz., fig., tab.

Twórcy

autor

Sarwar Mahwish

• Institute of Physics, Polish Academy of Sciences, al. Lotnikow 32/46, 02-668 Warsaw, Poland

autor

Ratajczak Renata

• National Centre for Nuclear Research, ul. Soltana 7, 05–400 Otwock, Poland

• https://orcid.org/0000-0001-8596-2230

autor

Ivanov Vitalii

• National Centre for Nuclear Research, ul. Soltana 7, 05–400 Otwock, Poland

• https://orcid.org/0000-0002-4651-8476

autor

Mishra Sushma

• Institute of Physics, Polish Academy of Sciences, al. Lotnikow 32/46, 02-668 Warsaw, Poland

autor

Turek Marcin

• Institute of Physics, Maria Curie-Sklodowska University, pl. Sklodowskiej 1, 20-031 Lublin, Poland

• https://orcid.org/0000-0001-8577-6032

autor

Wierzbicka Aleksandra

• Institute of Physics, Polish Academy of Sciences, al. Lotnikow 32/46, 02-668 Warsaw, Poland

• https://orcid.org/0000-0003-1379-5941

autor

Woźniak Wojciech

• Institute of Physics, Polish Academy of Sciences, al. Lotnikow 32/46, 02-668 Warsaw, Poland

autor

Guziewicz Elżbieta

• Institute of Physics, Polish Academy of Sciences, al. Lotnikow 32/46, 02-668 Warsaw, Poland

• https://orcid.org/0000-0001-6158-5258

Bibliografia

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Uwagi

Opracowanie rekordu ze środków MEiN, umowa nr SONP/SP/546092/2022 w ramach programu "Społeczna odpowiedzialność nauki" - moduł: Popularyzacja nauki i promocja sportu (2022-2023).