Modelling of simply supported circular diaphragm for touch mode capacitive sensors

• Autorzy: Jindal S. K. , Raghuwanshi S. K.

Identyfikatory

DOI

10.15632/jtam-pl.53.2.431

• Języki publikacji: EN

Abstrakty

EN

This paper describes the power series solution for modelling of the simply supported circular diaphragm deflection under uniform load. The parameters such as touch point pressure and touch radius are defined. Moreover, these parameters are also computed by the algorithm proposed in the paper. Therefore, the power series solution can be applied for touch mode operation.

Słowa kluczowe

EN

touch mode; capacitive pressure sensor; circular diaphragm; power series

• Wydawca: Polskie Towarzystwo Mechaniki Teoretycznej i Stosowanej
• Czasopismo: Journal of Theoretical and Applied Mechanics
• Rocznik: 2015
• Tom: Vol. 53 nr 2
• Strony: 431--438
• Opis fizyczny: Bibliogr. 11 poz., rys.

Twórcy

autor

Jindal S. K.

• Department of Electronics Engineering, Indian School of Mines, Dhanbad, Jharkhand, India

autor

Raghuwanshi S. K.

• Department of Electronics Engineering, Indian School of Mines, Dhanbad, Jharkhand, India

Bibliografia

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• 4. Hejarzaribi Y., Hamidon M., Sidek R., Hossein K., 2011, Evaluation for Diaphragm’s De- flection for touch mode MEMS pressure sensors, The International Arab Journal of Information Technology, 8, 2, 141-146
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• 7. Ko W.H., Wang Q., Wang Y., 1996, Touch mode capacitive pressure sensors for industrial applications, Technical Digest Solid State Sensors and Actuators Workshop, Hilton Head Island
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• 9. Rosegren L., Soderkvist J., Smith L., 1992, Micromachined sensor structures with linear capacitive response, Sensors and Actuators A: Physical, 31, 200-205
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• 11. Wang Q., 1997, Touch mode capacitive pressure sensor and interface circuits, PhD Dissertration in Dept. of EEAP, Cleveland, CWRU