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A laser measurement system for measuring straightness and parallelism error using a semiconductor laser was proposed. The designing principle of the developed system was analyzed. Addressing at the question of the divergence angle of the semiconductor laser being quite large and the reduction of measurement accuracy caused by the diffraction effect of the light spot at the long working distance, the optical structure of the system was optimized through a series of simulations and experiments. A plano-convex lens was used to collimate the laser beam and concentrate the energy distribution of the diffraction effect. The working distance of the system was increased from 2.6 m to 4.6 m after the optical optimization, and the repeatability of the displacement measurement is kept within 2.2 m in the total measurement range. The performance of the developed system was verified by measuring the straightness of a machine tool through the comparison tests with two commercial multi-degree-of-freedom measurement systems. Two different measurement methods were used to verify the measurement accuracy. The comparison results show that during the straightness measurement of the machine tool, the laser head should be fixed in front of the moving axis, and the sensing part should move with the moving table of the machine tool. Results also show that the measurement error of the straightness measurement is less than 3 m compared with the commercial systems. The developed laser measurement system has the advantages of high precision, long working distance, low cost, and suitability for straightness and parallelism error measurement.
Słowa kluczowe
Czasopismo
Rocznik
Tom
Strony
479--495
Opis fizyczny
Bibliogr. 17 poz., rys., tab., wykr., wzory
Twórcy
autor
- Hefei University of Technology, School of Instrument Science and Opto-Electronics Engineering, Hefei, China
autor
- Hefei University of Technology, School of Instrument Science and Opto-Electronics Engineering, Hefei, China
autor
- Hefei University of Technology, School of Instrument Science and Opto-Electronics Engineering, Hefei, China
autor
- Hefei University of Technology, School of Instrument Science and Opto-Electronics Engineering, Hefei, China
autor
- Hefei University of Technology, School of Instrument Science and Opto-Electronics Engineering, Hefei, China
autor
- Dalian University of Technology, School of Mechanical Engineering, Dalian, China
Bibliografia
- [1] Schwenke, H., Knapp, W., & Haitjema, H. (2008). Geometric error measurement and compensation of machines - an update. CIRP Annals, 57(2), 660-675. https://doi.org/10.1016/j.cirp.2008.09.008
- [2] Chen, Z., & Liu, X. (2020). A Self-adaptive interpolation method for sinusoidal sensors. IEEE Transactions on Instrumentation and Measurement, 69(10), 7675-7682. https://doi.org/10.1109/TIM.2020.2983094
- [3] Acosta, D., & Albajez, J. A. (2018). Verification of machine tools using multilateration and a geometrical approach. Nanomanufacturing and Metrology, 1(1), 39-44. https://doi.org/10.1007/s41871-018-0006-y
- [4] Chen, B. Y., Zhang, E. Z., & Yan, L. P. (2009). A laser interferometer for measuring straightness and its position based on heterodyne interferometry. Review of Scientific Instruments, 80(11), 115113. https://doi.org/10.1063/1.3266966
- [5] Zhu, L. J., Li, L., Liu, & J. H. (2009). A method for measuring the guideway straightness error based on polarized interference principle. International Journal of Machine Tools and Manufacture, 49(3-4), 285-290. https://doi.org/10.1016/j.ijmachtools.2008.10.009
- [6] Lin, S. T. (2001). A laser interferometer for measuring straightness. Optics & Laser Technology, 33(3), 195-199. https://doi.org/10.1016/S0030-3992(01)00024-X
- [7] Jywe, W. Y., Liu, C. H., Shien, W. H., Shyu, L. H., & Fang, T. H. (2006). Development of a multidegree of freedoms measuring system and an error compensation technique for machine tools. Journal of Physics Conference Series, 48(1), 761-765. https://doi.org/10.1088/1742-6596/48/1/144
- [8] Feng, Q. B., Zhang, B. & Cui, C. X. (2013). Development of a simple system for simultaneous measuring 6DOF geometric motion errors of a linear guide. Optics Express, 21(22), 25805-25819. https://doi.org/10.1364/OE.21.025805
- [9] Liu, C. H., Chen, J. H., & Teng, Y. F. (2009). Development of a straightness measurement and compensation system with multiple right-angle reflectors and a lead zirconate titanate-based compensation stage. Review of Scientific Instruments, 80(11), 115105. https://doi.org/10.1063/1.3254018
- [10] Fan, K. C. (2000). A laser straightness measurement system using optical fiber and modulation techniques. International Journal of Machine Tools Manufacture, 40(14), 2073-2081. https://doi.org/10.1016/S0890-6955(00)00040-7
- [11] Hsieh, T. H., Chen, P. Y., & Jywe, W. Y. (2019). A geometric error measurement system for linear guideway assembly and calibration. Applied Sciences, 9(3), 574. https://doi.org/10.3390/app9030574
- [12] Ni, J., & Huang, P. S. (1992). A multi-degree-of-freedom measuring system for CMM geometric errors. Journal of Manufacturing Science and Engineering, 114(3), 362-369. https://doi.org/10.1115/1.2899804
- [13] Rahneberg, I., & Büchner, H. J. (2009). Optical system for the simultaneous measurement of two-dimensional straightness errors and the roll angle. Proceedings of the International Society for Optics and Photonics, the Czech Republic, 7356. https://doi.org/10.1117/12.820634
- [14] Chou, C., Chou, L. Y. & Peng, C. K. (1997). CCD-based CMM geometrical error measurement using Fourier phase shift algorithm. International Journal of Machine Tools and Manufacture, 37(5): 579-590. https://doi.org/10.1016/S0890-6955(96)00078-8
- [15] Sun, C., Cai, S., & Liu, Y. (2020). Compact laser collimation system for simultaneous measurement of five-degree-of-freedom motion errors. Applied Sciences, 10(15), 5057. https://doi.org/10.3390/app10155057
- [16] Huang, Y., Fan, Y., Lou, Z., Fan, K. C., & Sun, W. (2020). An innovative dual-axis precision level based on light transmission and refraction for angle measurement. Applied Sciences, 10(17), 6019. https://doi.org/10.3390/app10176019
- [17] Born M., & Wolf E. (2013). Principles of Optics: Electromagnetic Theory of Propagation, Interference and Diffraction of Light. Elsevier. https://www.sciencedirect.com/book/9780080264820/principles-of-optic
Uwagi
1. This research was funded by the National Key R&D Program of China under Grant no. 2019YFB2004901.
2. Opracowanie rekordu ze środków MNiSW, umowa Nr 461252 w ramach programu "Społeczna odpowiedzialność nauki" - moduł: Popularyzacja nauki i promocja sportu (2021).
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-011813f9-2392-461f-904f-42e0f680f595