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PL
Praca prezentuje wyniki dotyczące wytwarzania submikrometrowych wzorów techniką nanostemplowania. Eksperyment przeprowadzono na 3" podłożach krzemowych oraz 5×5 mm podłożach kwarcowych. Zaprezentowano dwa warianty techniki nanostemplowania tj. termiczny i UV oraz omówiono podstawowe parametry charakteryzujące jakość odwzorowania.
EN
We report on submicrometer pattern fabrication using nanoimprint lithography. The experiments were performed on 3" silicon and 5×5 mm quartz substrates. We demonstrate two modes of nanoimprint lithography i.e. thermal and UV, and discuss the parameters determining the quality of pattern replication.
EN
The paper presents recent results from studies of a surface topography of a platinum calibration grid on silicon substrate obtained in both contact and tapping modes of the AFM microscope. The results are analyzed in order to determine the influence of the scan set-up and the SPM probe onto estimated fractal parameters and surface anisotropy ratio.
PL
W pracy badano topografię powierzchni wielościennych nanorurek węglowych (WNW) otrzymanych metodą dwustopniową PVD (Physical Vapour Deposition)/CVD (Chemical Vapour Deposition). W metodzie PVD/CVD otrzymuje się nanostrukturalne warstwy węglowoniklowe zawierające wielościenne nanorurki węglowe (WNW). WNW zostały wyselekcjonowane poprzez rozprowadzenie warstwy w alkoholu etylenowym. Z uzyskanej zawiesiny zawierającej pojedyncze nanorurki, po odparowaniu na płytce krzemowej otrzymano preparat do badań AFM. Badany preparat przygotowano z warstwy zawierającej gęsto upakowane WNW o różnych długościach (od kilkudziesięciu nm do kilku μm) i średnicach (30–100 nm), a także o różnym stopniu zdefektowania i skręcenia.
EN
In this work topography of multiwall carbon nanotubes obtained in two steps method PVD (Physical Vapour Deposition)/CVD (Chemical Vapour Deposition) was investigated. In PVD/CVD method nanostructural carbonaceous – nickel films containing carbon nanotubes are obtained. Multiwall carbon nanotubes were selected by dissolution films in ethanol. From suspension of carbon nanotubes, after evaporation on silicon plate, was obtained sample to AFM study. The sample was prepared from film containing densely packed multiwall carbon nanotube with various length, diameter and different degree of defects and twist.
PL
Przedstawiono wykres CTPc z temperatury 800°C dla stali CMnAlSi i typową mikrostrukturę typu TRIP (Transformation Induced Plasticity) obserwowaną za pomocą mikroskopu świetlnego. Analizę topografii mikrostruktury stali CMnAlSi przeprowadzono za pomocą mikroskopu sił atomowych (AFM), wyróżniając ferrytyczno-bainityczną osnowę z wyspami martenzytycznymi i austenit szczątkowy.
EN
Continuous Transformation Phase diagram from 800°C for CMnAlSi steel and typical TRIP (Transformation Induced Plasticity) microstructure observed by light microscopy were presented. Topographical analysis of microstructure of CMnAlSi steel executed by Atomic Force Microscopy (AFM) was established discriminating ferrite-bainite matrix and islands of martensite and residual austenite in the structure.
EN
Roughness of surface of Intraocular Lens plays an important role, which can provide important information on the interaction between the surface of the implanted lens and lens capsule, among others. Although surfaces appear smooth to the naked eye, they are quite rough at the microscopic levels. The paper presents a technique for measuring surface roughness using AFM. It was found that the size of the scan area does not significantly affect the two standards parameters describing the surface roughness profile (Sa and Sq), however, significantly affect the parameters describing the shape irregularities (Ssk and Ska).
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Content available Obróbka przetłoczno-ścierna stopu aluminium 2017A
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PL
Wstęp i cel: W pracy przedstawiono zasadę obróbki przetłoczno-ściernej oraz wyniki badań stereometrii powierzchni ukształtowanej po tej obróbce. Celem pracy było rozeznanie możliwości zastosowania tej metody do obróbki wykańczającej stopu aluminium 2017A. Materiał i metody: Badania wykonano na próbkach w kształcie tulejek ø30/20 i długości 30 mm, których otwory obrabiano przetłoczno-ściernie stosując jako medium pastę o składzie: elektrokorund + kauczuk metylowinylosilikonowy. Jako stan odniesienia przyjęto powierzchnie toczone wykańczająco. Stan powierzchni po obydwu rodzajach obróbki oceniano poprzez pomiar wybranych parametrów stereometrii powierzchni. Wyniki: Porównując wyniki toczenia wykańczającego i obróbki przetłoczno-ściernej stwierdzono, że wysokości nierówności po obróbce przetłoczno-ściernej są nieco mniejsze niż po toczeniu. Stwierdzono także, że za pomocą tej metody obróbki możliwe jest uzyskanie chropowatości powierzchni Sa < 0,9 µm. Uzyskano również lepszy ogólny stan stereometrii powierzchni - wartości tych parametrów stereometrii, które mogą mieć wpływ na właściwości tribologiczne części pracujących w warunkach tarcia ślizgowego ze smarowaniem. Wniosek: Rezultaty przeprowadzonych badań wykazały możliwości efektywnego wykorzystania metody przetłoczno-ściernej do obróbki wykańczającej oraz uzyskiwania dobrej jakości powierzchni stopu aluminium 2017A.
EN
Introduction and aim: The paper presents the principle of treating abrasive flow machining and investigation results of surface stereometry after this treatment. The aim of the study was to understanding the possibility of applying this method for the finishing of aluminum alloy 2017A. Material and methods: The tests were performed on samples in the form of sleeves ø30/20 mm and 30 mm length, which holes were treated by abrasive flow machining using medium composition: aluminium oxide + methylvinyl silicone rubber. As a reference state the turned surfaces were adopted. The surface condition after both kinds of treatment was evaluated through measurement surface stereometry. Results: Comparing the results of finish - turning and abrasive flow machining, it was found that the surface irregularities after AFM, are smaller than after turning. It was also found that by this method, it is possible to obtain a surface roughness Sa <0.9 µm. Also achieved better overall surface stereometry - the better values of these parameters that may have an influence on the tribological properties of parts working in conditions of sliding friction with lubrication. Conclusion: The results of the study showed the possibility of effective use abrasive flow machining and obtaining a good surface quality aluminum alloy 2017.
PL
W artykule omówiono konstrukcję modularnego mikroskopu "Shear force" z interferometryczną detekcją drgań ostrza skanującego umożliwiającego pomiar właściwości elektrycznych próbki w skali pojedynczych nanometrów. Przedstawiono także wstępne wyniki badań topografii i lokalnego prądu emisji wykonanych przy użyciu niniejszego mikroskopu.
EN
We describe here AFM microscope with optical tip oscillation detection. The modular Shearforce/Tunneling Microscope for surface topography measurement and local current emission is described. The measurement instrument presented here is based on the fiber Fabry-Perot interferometer used for the measurement of the conductive microtip oscillation. An advantage of this system its that quantitative measurements of tip vibration amplitude are easily performed. Current emission from the tip renders it possible to nanostructures fabrication by local surface anodisation process. It is also possible to investigate a local electrical surface parameters together with topography measurements.
EN
Modern heterogeneous micro- and nanostructures usually integrate modules fabricated using various materials and technologies. Moreover, it has to be emphasized that the macro and micro nanoscale material parameters are not the same. For this reason it has become crucial to identify the nanomechanical properties of the materials commonly used in micro- and nanostructure technology. One of such tests is a nanowear test performed using the atomic force microscope (AFM). However, to obtain quantitative measurement results a precision calibration step is necessary. In this paper a novel approach to calibration of lateral force acting on the tip of an AFM cantilever is discussed. Presented method is based on application of known lateral force directly on the tip using a special test structure. Such an approach allows for measurements of nanowear parameters (force, displacement) with the uncertainty better than š3%. The calibration structure designed specifically for this calibration method is also presented.
EN
Nonlinear motion of the microcantilever probe in the Atomic Force Microscope (AFM) has been extensively studied considering mainly the van der Waals forces. Since the behavior of the microcantilever is vital to quality of generated images, the study of control strategies that force the probe to avoid undesired behavior such as chaotic motion, is also of significant importance. A number of published works has shown that the microcantilever is subject to chaotic motion for a certain combination of parameters. For such a parameter combination, the control system must suppress the chaotic motion. Here, an study of the AFM mathematical model is presented, aiming to find a region of operation of the AFM where the motion is chaotic. In order to suppress the chaotic motion, a periodic orbit of the system is obtained, and the controller forces the system to that periodic orbit. Two control strategies are used, namely: The State Dependent Riccati Equation (SDRE) and the Optimal Linear Feedback Control (OLFC). Both control strategies consider the complete nonlinearities of the system, and the OLFC guarantees the global stability. The numerical simulations carried out showed the efficiency of the control methods as well as the sensitivity of each control strategy to parametric errors. Without the parametric errors, both control strategies were effective in maintaining the system into the desired orbit. On the other hand, in the presence of parametric errors, the SDRE technique was more robust than the OLFC.
PL
Podstawowym problemem towarzyszącym detekcji sił atomowych w mikroskopii bliskich oddziaływań jest pomiar wielkości elektrycznych proporcjonalnych do nanosiły lub nanowychyleń. Sygnał sondy, odpowiadający bliskiemu oddziaływaniu, narażony jest na wiele zakłóceń w torze pomiarowym. Aby zminimalizować ten problem koniecznie należy zastosować układ wstępnego wzmocnienia, którego budowa uzależniona jest od sposobu pomiaru topografii powierzchni. W opracowaniu przedstawiono rozwiązania przedwzmacniaczy współpracujących z systemem mikroskopii sił atomowych, w których rolę sondy siły skupionej na mikroostrzu pełni piezoelektryczny rezonator kwarcowy.
EN
Quartz tuning forks are widely applied in noncontact scanning probe micrcscopy as force sensors. Forces acting at the microtip, which is attached to one of the prong of the tuning fork, are used to describe surface parameters. The amplitude of the osscillation is at thelevelofnanometers, so generated piezoelectric voltage is very low. To obtain correct topography of the sample, it is crucial to detect these electric signal avoiding large voltage noise at the output. Therefore it is neccessary to use electronic input circuits, which preamplify signal produced by the tuning fork. In this article we present several tuning fork based schemes for atomic force microscopy applications. We compare current and voltage preamplifiers to determine which solution gives better results.
13
Content available remote Conductive atomic force microscope for investigation of thin-film gate insulators
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EN
In modern microelectronics progress has been made towards low power ultra large-scale integration (ULSI), and nano-structure devices such as single electron transistors and quantum dots. In this technology application of new materials, which includes high-k dielectrics for the MOSFET transistors, with extraordinary purity and uniformity is required. Failure analysis and reliability investigations of such films very often requires high-resolution local measurements of electrical surface parameters. This kind of experiments can be performed using conductive atomic force microscopy, which provides simultaneous measurement of surface topography and current flowing through the investigated layer. In order to acquire reliable data, there was designed a precise measurement and control system, which included a low-noise current-to-voltage converter of picoampere resolution, a scanning stage with control electronics and a data acquisition system. In the paper we describe the architecture of the de-signed and applied experimental set-up. We also present results of simultaneous measurements of topography and current on gold and highly oriented pyrolytic graphite (HOPG).
14
Content available remote Control of sputtering parameters for deposition of NbN thick films
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EN
We report a detailed study on control of sputtering parameters for synthesizing NbN superconducting thick films. The NbN films are deposited on single crystalline silicon (100) by DC reactive sputtering, i.e., deposition of Nb in the presence of reactive N2 gas. After several runs, samples were prepared with Ar:N2 partial gas ratios of 90:10, 80:20 and 70:30 for a deposition time of 10 minutes. The fabricated films (400 nm thick) crystallize with a cubic structure, with a small quantity of Nb/NbOx embedded in the main NbN phase. All three samples are characterized by scanning electron microscopy (SEM) and energy dispersive X-ray spectroscopy (EDAX), to examine their microstructure and elemental compositional distributions, respectively. The roughness was mesured by atomic force microscopy (AFM). The optimized film prepared with Ar:N2 gas ratio of 80:20 has a Tc(R = 0) in zero and 140 kOe fields of 14.8 K and 8.8 K, respectively. The upper critical field Hc2(0) of the studied superconducting films is calculated from magneto-transport [R(T )H] measurements using GL and WHH equations.
EN
In this study, the effect of roughness of particles on flotation efficiency along with surface forces among interacting particles was investigated. Glass beads representing smooth spherical particles with a size fraction of -150+90 μm were used. The etching technique was used to produce roughness of different degrees. Microflotation of round+smooth, and its corresponding etched samples were used to evaluate the efficiency of flotation in the case of smooth and rough systems. Atomic Force Microscope (AFM) was used to reveal the interaction forces between the smooth and rough surfaces. According to the results, roughness of particles increased the flotation efficiency. Although the roughness of particles increased with the etching, excess etching time caused a decrease on the roughness and in turn in the flotation recoveries. The interaction forces between the glass beads changed from repulsion to attraction with the increasing hexadecyltrimethylammonium bromide (HTAB) concentration. Further, the increase in HTAB concentration caused a change in the reversal of interaction forces from attraction to repulsion for both smooth and rough surfaces. This change started at low HTAB concentrations for rough surfaces compared to smooth ones though the magnitude of interacting forces decreased for the rough surfaces. The extent and kinetics of HTAB adsorption was dramatically influenced by the roughness of particles that affected the interaction forces as revealed by AFM measurements, and governs the flotation efficiency of particles. These results showed that roughness of particles causes significant improvement in flotation recoveries.
17
Content available remote Evaluation of AlGaN/GaN heterostructures properties by QMSA and AFM techniques
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EN
Atomic force microscopy and Quantitative Mobility Spectrum Analysis (QMSA) were applied for characterization and evaluation of the quality of AlGaN/GaN heterostructures. The structural uniformity, growth mode and electrical properties of the heterostructures were determined. The obtained results indicated that the time of growth of the low temperature GaN nucleation layer influenced the morphology and electrical properties of the AlGaN/GaN heterostructure.
EN
Very fast development of large scale integrated circuits causes downsizing of the structures. Due to this fact, the thickness of oxide layer in the gate area decreases as well. In order to perform test of dielectric layer with nanometer resolution in a lateral plane, one can use AFM with a conductive tip. Biased tips can be used to measure current flow to the surface of the sample in order estimate its electrical properties. In the paper a modular shear force emission microscope has been presented. A metallic scanning microtip is used as a nano e-beam and it allows one to measure the local surface emission and investigate the quality of dielectric layers in semiconductor chips.
19
Content available remote Cr ohmic contact on an Ar+ ion modified 6H-SiC(0001) surface
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EN
Chromium layers were vapor deposited under ultrahigh vacuum onto samples cut out of a single crystal of 6H-SiC(0001) that were Ar+ bombardment modified. The substrates and electrical contacts formed by the Cr adlayer were characterized in situ by current-sensing atomic force microscopy (CS-AFM) and X-ray photoelectron spectroscopy (XPS). Cr/SiC contacts reveal a good I-V characteristic linearity without the use of heavy impurity doping and high-temperature annealing.
EN
The present paper determines static and dynamic friction forces and friction coefficients using atomic force microscope during the hydrodynamic viscoelastic liquid flow in the thin boundary layer around the cells of two cooperating bodies. Atomic force microscope is necessary in performed experimental investigations and measurements of friction forces. Therefore, proper parameters of microscope are described and illustrated in specific enlargement. The use of microscope of atomic forces AFM for complex technical investigations to a large extent has facilitated carrying-out the measurements of tissue surface features and control of its growing process in human joint and deforming process in micro-bearing alloy. During conventional nano-scale measurements of surface topography, the AFM microscope makes it possible to simultaneously map local lateral forces and oscillatory phases of translations, which may be interpreted as a representation of local friction forces and local adhesive forces as well as values of elasticity modules. One of the important advantages of the AFM microscope application in the area of investigations with the use of bio-reactors is the possibility of carrying out measurements directly in liquid, namely that surrounds the cells or micro-bearing gaps
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