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2006 | Vol. 54, nr 2 | 221-231
Tytuł artykułu

Technology and applications of Low Temperature Cofired Ceramic (LTCC) based sensors and microsystems

Autorzy
Warianty tytułu
Języki publikacji
EN
Abstrakty
EN
The paper presents general information on LTCC materials, manufacturing processes and properties of fired modules. A Multichip Module package has been the main application of Low Temperature Cofired Ceramic (LTCC) technology. Recently, this technology is also used for production of sensors, actuators and microsystems. The research and development on the LTCC sensors and microsystems carried out in the Laboratory of Thick Film Microsystems at Wroc1aw University of Technology are presented. LTCC microfluidic system is described in detail. Moreover, a short information is given on other LTCC applications.
Słowa kluczowe
Wydawca

Rocznik
Strony
221-231
Opis fizyczny
Bibliogr. 74 poz., 18 rys., 1 tab.
Twórcy
  • Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, 27 Wybrzeże Wyspianskiego St., 50-370 Wrocław, Poland, leszek.golonka@pwr.wroc.pl
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bwmeta1.element.baztech-article-BPG5-0014-0101
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