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2012 | 10 | 1 | 225-231
Tytuł artykułu

Multiaxis interferometric displacement measurement for local probe microscopy

Treść / Zawartość
Warianty tytułu
Języki publikacji
EN
Abstrakty
EN
We present an overview of design approaches for nanometrology measuring setups with a focus on interferometry techniques and associated problems. The design and development of a positioning system with interferometric multiaxis monitoring and control is presented. The system is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length.
Słowa kluczowe
Wydawca

Czasopismo
Rocznik
Tom
10
Numer
1
Strony
225-231
Opis fizyczny
Daty
wydano
2012-02-01
online
2011-12-03
Twórcy
autor
  • Institute of Scientific Instruments, Královopolská 147, 612 64, Brno, Czech Republic, joe@isibrno.cz
autor
  • Institute of Scientific Instruments, Královopolská 147, 612 64, Brno, Czech Republic
  • Institute of Scientific Instruments, Královopolská 147, 612 64, Brno, Czech Republic
  • Czech Metrology Institute, Okružní 31, 638 00, Brno, Czech Republic
  • Institute of Scientific Instruments, Královopolská 147, 612 64, Brno, Czech Republic
Bibliografia
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  • [22] M. Vermeulen, PhD thesis, Eindhoven University of Technology (Eindhoven, The Netherlands, 1999)
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Typ dokumentu
Bibliografia
Identyfikatory
Identyfikator YADDA
bwmeta1.element.-psjd-doi-10_2478_s11534-011-0093-5
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