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2011 | 9 | 5 | 1351-1356
Tytuł artykułu

Hydrogen gas sensors based on nanocrystalline TiO2 thin films

Treść / Zawartość
Warianty tytułu
Języki publikacji
EN
Abstrakty
EN
Titanium dioxide thin films are extensively studied for applications in solid state gas sensor devices. Their gas sensing properties are strongly dependent on deposition technique, annealing temperature, film thickness and consequent properties like crystalline structure, grain size or amount of defects and impurities. In this work we report the gas sensing properties of TiO2 thin films prepared by reactive magnetron sputtering technique and subsequently annealed at temperatures 600°C and 900°C. The films were exposed to different concentrations of H2 gas up to 10 000 ppm. Their sensitivity to gas at various operating temperatures, ranging from 250°C to 450°C, was obtained by measuring their resistance.
Słowa kluczowe
Wydawca

Czasopismo
Rocznik
Tom
9
Numer
5
Strony
1351-1356
Opis fizyczny
Daty
wydano
2011-10-01
online
2011-09-15
Twórcy
autor
  • Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University, Bratislava, Czechoslovakia
  • Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University, Bratislava, Czechoslovakia
autor
  • Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University, Bratislava, Czechoslovakia
  • Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University, Bratislava, Czechoslovakia
autor
  • Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University, Bratislava, Czechoslovakia
autor
  • Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University, Bratislava, Czechoslovakia
  • Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University, Bratislava, Czechoslovakia
  • Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University, Bratislava, Czechoslovakia
autor
  • Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University, Bratislava, Czechoslovakia
  • Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University, Bratislava, Czechoslovakia, plecenik@fmph.uniba.sk
Bibliografia
  • [1] U. Diebold, Surf. Sci. Rep. 48, 53 (2003) http://dx.doi.org/10.1016/S0167-5729(02)00100-0[Crossref]
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  • [4] Y.-K. Jun et al., Sensor. Actuat. B-Chem. 120, 69 (2006) http://dx.doi.org/10.1016/j.snb.2006.01.045[Crossref]
  • [5] H. Tang et al., Sensor. Actuat. B-Chem. 26–27, 71 (1995) http://dx.doi.org/10.1016/0925-4005(94)01559-Z[Crossref]
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  • [7] N.O. Savage et al., Sensor. Actuat. B-Chem. 72. 239 (2001) http://dx.doi.org/10.1016/S0925-4005(00)00676-6[Crossref]
  • [8] A.M. Ruiz et al., Sensor. Actuat. B-Chem. 93, 509 (2003) http://dx.doi.org/10.1016/S0925-4005(03)00183-7[Crossref]
  • [9] I. Alessandri et al., Sensor. Actuat. B-Chem. 128, 312 (2007) http://dx.doi.org/10.1016/j.snb.2007.06.020[Crossref]
  • [10] M.-H. Seo et al., Procedia Chemistry 1, 192 (2009) http://dx.doi.org/10.1016/j.proche.2009.07.048[Crossref]
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  • [12] I. Hayakawa et al., Sensor. Actuat. B-Chem. 62, 55 (2000) http://dx.doi.org/10.1016/S0925-4005(99)00303-2[Crossref]
  • [13] M. Radecka et al., Sensor. Actuat. B-Chem. 47, 194 (1998) http://dx.doi.org/10.1016/S0925-4005(98)00023-9[Crossref]
  • [14] N. Barsan, U. Weimar, J. Electroceram. 7, 143 (2001) http://dx.doi.org/10.1023/A:1014405811371[Crossref]
  • [15] P. Singh et al., Physica B 403, 3769 (2008) http://dx.doi.org/10.1016/j.physb.2008.07.021[Crossref]
  • [16] N. Sbai et al., Surf. Sci. 601, 5649 (2007) http://dx.doi.org/10.1016/j.susc.2007.09.019[Crossref]
  • [17] K. Zakrzewska, Titanium Dioxide Thin Films for Gas Sensors and Photonic Applications (AGH University of Science and Technology, Krakow, 2003)
  • [18] C. Malagu et al., Appl. Phys. Lett. 84, 4158 (2004) http://dx.doi.org/10.1063/1.1755419[Crossref]
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Typ dokumentu
Bibliografia
Identyfikatory
Identyfikator YADDA
bwmeta1.element.-psjd-doi-10_2478_s11534-011-0042-3
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