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Czasopismo
2011 | 9 | 2 | 300-306
Tytuł artykułu

Topography and nanomechanical properties of Pd-C films

Treść / Zawartość
Warianty tytułu
Języki publikacji
EN
Abstrakty
EN
Atomic force microscopy (AFM) topographical studies and results of nanoindentation experiment for several palladium-carbon films (Pd-C film) deposited on various substrates and with varying palladium content are presented. Pd-C films were prepared by a physical vapor decomposition (PVD) process and next were modified by a chemical vapor decomposition (CVD) method to obtain carbonaceous porous structure with dispersed palladium nanograins and a variation in roughness. The dependence of film topography on the kind of substrate such as Al2O3, Mo polycrystalline foil and fused silica was studied by AFM. Nanomechanical properties such as hardness and the reduced indentation modulus were determined by nanoindentation. A comparison of these values for films with different Pd content deposited on various substrates is presented.
Słowa kluczowe
Wydawca

Czasopismo
Rocznik
Tom
9
Numer
2
Strony
300-306
Opis fizyczny
Daty
wydano
2011-04-01
online
2011-02-20
Twórcy
  • Tele & Radio Research Institute, Ratuszowa 11, 03-450, Warsaw, Poland
autor
  • Dept. of Engineering Physics, Univ. of Applied Sciences Wildau, Bahnhofstrasse 1, 15745, Wildau, Germany
Bibliografia
  • [1] X.M.H. Huang, M. Manolidis, Seong Chan Jun, J. Hone, Appl. Phys. Lett. 86, 143104 (2005) http://dx.doi.org/10.1063/1.1897445[Crossref]
  • [2] S.E. Lyshevski, Nano- and micro-electromechanical systems: fundamentals of nano- and micro engineering (CRC Press, Boca Raton, FL, 2005)
  • [3] R. Duś, E. Nowicka, R. Nowakowski, Acta Phys. Pol. A 114, 29 (2008)
  • [4] G. Timp, Nanotechnology (Springer, New York, 1999) http://dx.doi.org/10.1007/978-1-4612-0531-9[Crossref]
  • [5] A.C. Fischer-Cripps, Nanoindentation (Springer-Verlag, New York, 2002)
  • [6] E. Czerwosz et al., Vacuum 82, 372 (2008) http://dx.doi.org/10.1016/j.vacuum.2007.08.003[Crossref]
  • [7] M. Kozłowski et al., Journal of Achievements in Materials and Manufacturing Engineering 37, 304 (2009)
  • [8] W.C. Oliver, G.M. Pharr, J. Mater. Res. 7, 1564 (1992) http://dx.doi.org/10.1557/JMR.1992.1564[Crossref]
  • [9] B. Wolf, A. Richter, New Journal of Physics 5, 15.1 (2003) http://dx.doi.org/10.1088/1367-2630/5/1/315[Crossref]
  • [10] A. Richter, R. Ries, R. Smith, M. Henkel, B. Wolf, Diam. Relat. Mater. 9, 170 (2000) http://dx.doi.org/10.1016/S0925-9635(00)00188-6[Crossref]
Typ dokumentu
Bibliografia
Identyfikatory
Identyfikator YADDA
bwmeta1.element.-psjd-doi-10_2478_s11534-010-0134-5
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