Czasopismo
Tytuł artykułu
Warianty tytułu
Języki publikacji
Abstrakty
We report results obtained from measurements of optical transmittance spectra carried out on a series of silicon thin films deposited by plasma-enhanced chemical vapour deposition (PECVD) from silane diluted with hydrogen. Hydrogen dilution of silane results in an inhomogeneous growth during which the material evolves from amorphous hydrogenated silicon (a-Si:H) to microcrystalline hydrogenated silicon (µc-Si:H). Spectral refractive indices and absorption coefficients were determined from transmittance spectra. The spectral absorption coefficients were used to determine the Tauc optical band gap energy, the B factor of the Tauc plots, E 04 (energy at which the absorption coefficient is equal to 104 cm−1), and the Urbach energy as a function of the hydrogen dilution. The results were correlated with microstructure, namely volume fractions of the amorphous and crystalline phase with voids, and with the grain size.
Czasopismo
Rocznik
Tom
Numer
Strony
315-320
Opis fizyczny
Daty
wydano
2009-06-01
online
2009-04-26
Twórcy
autor
- Department of Engineering Fundamentals, Faculty of Electrical Engineering, University of Žilina, ul. kpt. J. Nálepku 1390, 031 01, Liptovský Mikuláš, Slovakia, mullerova@lm.uniza.sk
autor
- Department of Materials and Technology, New Technology Research Center, University of West Bohemia, Univerzitnà 8, 306 14, Plzeň, Czech Republic
autor
- Department of Materials and Technology, New Technology Research Center, University of West Bohemia, Univerzitnà 8, 306 14, Plzeň, Czech Republic
Bibliografia
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- [7] G. van Elzakker, J. Müllerová, P. Šutta, M. Zeman, Proceedings of The 22nd European Photovoltaic Solar Energy Conference, 2161 (2007)
- [8] P. J. Lee, J. Park, E. K. Kim, Y. Lee, Opt. Express 13, 6445 (2005) http://dx.doi.org/10.1364/OPEX.13.006445[Crossref]
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- [15] J. Müllerová, V. Vavruňková, V. Šutta, R. Srnánek, Proc. SPIE, 7141, 714103 (2008)
- [16] D. A. G. Bruggeman, Ann. Phys.-Leipzig 24, 636 (1935) http://dx.doi.org/10.1002/andp.19354160705[Crossref]
- [17] J. Müllerová, P. Šutta, G. van Elzakker, M. Zeman, M. Mikula, Appl. Surf. Sci. 254, 3690 (2008) http://dx.doi.org/10.1016/j.apsusc.2007.10.069[Crossref]
- [18] D. K. Basa, Thin Solid Films 406, 75 (2002) http://dx.doi.org/10.1016/S0040-6090(01)01781-3[Crossref]
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- [21] M. Verbaan, G. van Elzakker, M. Zeman, Proc. SAFE, Veldhoven (STW Technology Foundation, Utrecht, the Netherlands, 2006) 444
Typ dokumentu
Bibliografia
Identyfikatory
Identyfikator YADDA
bwmeta1.element.-psjd-doi-10_2478_s11534-009-0023-y