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Practical precursor aspects for electron beam induced deposition

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Treść / Zawartość
Warianty tytułu
Języki publikacji
EN
Abstrakty
EN
The purity of a structure made with electron beam induced deposition (EBID) is a the major concern when creating micro and nano-scale functionalities, for example for rapid prototyping. Substantial research focuses on the improvements of the purity using chemical vapor deposition (CVD) based precursors. However, from a practical point of view, many other aspects of a precursor are very relevant in the design of a process and the actual use of a tool for EBID. To a large extent, these precursorrelated characteristics will determine whether or not a precursor can successfully be applied. Some of these characteristics include: vapor pressure range, transition behavior, chemical stability, pyrolitic thresholds, release of corrosive ligands during deposition, toxicity, commercial availability, compatibility with the instrument and operator safety. These characteristic are discussed in more detail here in order to understand what an ideal EBID precursor may be. Although some parameters such as toxicity or flammability seem less important, in practice they can be a road block for application unless the main instrument, such as a regular scanning electron microscope (SEM), is adapted accordingly.
Słowa kluczowe
EN
Wydawca

Czasopismo
Rocznik
Tom
1
Numer
1
Opis fizyczny
Daty
otrzymano
2014-03-14
zaakceptowano
2014-07-17
online
2014-08-07
Twórcy
Bibliografia
  • [1] Utke I., Moshkalev S., Russel P., Nanofabrication Using FocusedIon and Electron Beams, Oxford University Press, 2012, ISBN978-0-19-973421-4.
  • [2] Koops H.W., Kaya A, Weber M., Fabrication and characterizationof platinum nanocrystalline material grown by electronbeaminduced deposition, J. Vac. Sci. Technol. B, 1995, 13,2400-2403.[Crossref]
  • [3] Brintlinger T., Fuhrer M.S., Melngailis J., Utke I., Bret T.,Perentes A., et al., Electrodes for carbon nanotube devices byfocused electron beam induced deposition of gold, J. Vac. Sci.Technol. B, 2005, 23, 3174-3177.[Crossref]
  • [4] Fernandez-Pacheo A., DeTeresa J.M., Cordoba R., Ibarra M.R.,Magnetotransport properties of high-quality cobalt nanowiresgrown by focused-electron-beam-induced deposition, J. Phys.D Appl. Phys., 2009, 42, 055005.
  • [5] Wnuk J.D., Gorham J.M., Rosenberg S.G., van Dorp W.F., Madey,T.E., Hagen C.W., Fairbrother D.W., Electron Induced SurfaceReactions of the Organometallic Precursor Trimethyl(methylcyclopentadienyl)platinum(IV), J. Phys. Chem. C, 2009, 113,2487-2496.[WoS]
  • [6] Botman A., Mulders J.J.L., Weemaes R., Mentink S., Purificationof platinum and gold structures after electron-beam-induceddeposition, Nanotechnology, 2006, 17, 3779-3785.[Crossref]
  • [7] Kakefuda Y., Yamashita Y., Mukai K., Yoshinobu J., CompactUHV system for fabrication and in situ analysis of electronbeam deposited structures using a focused low energy electronbeam, Rev. Sci. Instrum., 2006, 77, 053702.
  • [8] Belova L.M., Dahlberg E.D., Riazanova A., Mulders J.J.L.,Christophersen C., Eckert J., Rapid electron beam assistedpatterning of pure cobalt at elevated temperatures via seededgrowth, Nanotechnology, 2011, 22, 145305.[PubMed][Crossref][WoS]
  • [9] Mehendale S., Mulders J.J.L., Trompenaars P.H.F., A newsequential EBID process for the creation of pure Pt structuresfrom MeCpPtMe3, Nanotechnology, 2013, 24, 145303.[Crossref][WoS]
  • [10] Mulders J.J.L., Belova L.M., Raizanova A., Electron beaminduced deposition at elevated temperatures: compositionalchanges and purity improvement, Nanotechnology, 2011, 22,055302.[WoS][Crossref][PubMed]
Typ dokumentu
Bibliografia
Identyfikatory
Identyfikator YADDA
bwmeta1.element.-psjd-doi-10_2478_nanofab-2014-0007
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