PL EN


Preferencje help
Widoczny [Schowaj] Abstrakt
Liczba wyników
Czasopismo
2014 | 1 | 1 |
Tytuł artykułu

FEBID fabrication and magnetic characterization of individual nano-scale and micro-scale Co structures

Treść / Zawartość
Warianty tytułu
Języki publikacji
EN
Abstrakty
EN
This work gives an illustration of the viability of FEBID to fabricate magnetic nano- and micro-structures and it demonstrates that by means of a combination of MOKE microscopy and MFM, one is able to analyze the size and shape effects in individual magnetic cobalt structures. With the help of our magnetic and functional study, we are able to demonstrate that by using FEBID, cobalt of uniform thickness and magnetic response can be deposited over several micron-size areas, establishing a most crucial ingredient of reliable structure and device fabrication. Furthermore, we show the suitability of FEBID to fabricate functional and complex 3-dimensional magnetic structures. The issue of unintended secondary deposits in FEBID is discussed, and a Xe-ion milling posttreatment for its removal is proposed and demonstrated as a successful pathway towards the fabrication of functionally independent magnetic nano-structures.
Słowa kluczowe
Wydawca

Czasopismo
Rocznik
Tom
1
Numer
1
Opis fizyczny
Daty
wydano
2014-01-01
otrzymano
2014-02-27
zaakceptowano
2014-05-06
online
2014-06-26
Twórcy
autor
  • CIC nanoGUNE Consolider, Tolosa
    Hiribidea 76, E-20018 Donostia-San Sebastian, Spain,
autor
  • CIC nanoGUNE Consolider, Tolosa
    Hiribidea 76, E-20018 Donostia-San Sebastian, Spain,
autor
  • CIC nanoGUNE Consolider, Tolosa
    Hiribidea 76, E-20018 Donostia-San Sebastian, Spain,
autor
  • CIC nanoGUNE Consolider, Tolosa
    Hiribidea 76, E-20018 Donostia-San Sebastian, Spain,
  • Ikerbasque, Basque Foundation for
    Science, E-48011 Bilbao, Spain
autor
  • CIC nanoGUNE Consolider, Tolosa
    Hiribidea 76, E-20018 Donostia-San Sebastian, Spain,
  • Ikerbasque, Basque Foundation for
    Science, E-48011 Bilbao, Spain
autor
  • CIC nanoGUNE Consolider, Tolosa
    Hiribidea 76, E-20018 Donostia-San Sebastian, Spain,
Bibliografia
  • [1] Piramanayagam S. N., Srinivasan K., Recording media researchfor future hard disk drives, J. Magn. Magn. Mater., 2009, 321,485–494.[WoS]
  • [2] Miller M. M., Prinz G. A., Cheng S.-F, Bounnak S., Detection of amicron-sized magnetic sphere using a ring-shaped anisotropicmagnetoresistance-based sensor : A model for a magnetoresistance-based biosensor, Appl. Phys. Lett., 2002, 81, 2211.[Crossref]
  • [3] Allwood D. A., Xiong G., Faulkner C. C., Atkinson D., Petit D.,Cowburn R. P., Magnetic domain-wall logic, Science, 2005, 309,1688–92.
  • [4] Repain V., Jamet J.-P., Vernier N., Bauer M., Ferré J., ChappertC., Gierak J., Mailly D., Magnetic interactions in dot arrays withperpendicular anisotropy, J. Appl. Phys., 2004, 95, 2614.[Crossref]
  • [5] Berger A., Lengsfield B., Ikeda Y., Determination of intrinsicswitching field distributions in perpendicular recording media,J. Appl. Phys., 2006, 99, 08E705.
  • [6] Berger A., Supper N., Ikeda Y., Lengsfield B., Moser A.,Fullerton E. E., Improved media performance in optimallycoupled exchange spring layer media, Appl. Phys. Lett., 2008,93, 122502.[Crossref][WoS]
  • [7] Hovorka O., Liu Y., Dahmen K. A., Berger A., Simultaneousdetermination of intergranular interactions and intrinsicswitching field distributions in magnetic materials., Appl. Phys.Lett., 2009, 95, 192504.[Crossref][WoS]
  • [8] Fernández-Pacheco A., De Teresa J. M., Szkudlarek A., CórdobaR., Ibarra M. R., Petit D., O’Brien L., Zeng H. T., Lewis E. R.,Read D. E., et al. Magnetization reversal in individual cobaltmicro- and nanowires grown by focused-electron-beaminduced-deposition, Nanotechnology, 2009, 20, 475704.[Crossref][WoS]
  • [9] Breitkreutz S., Kiermaier J., Vijay Karthik S., Csaba G., Schmitt-Landsiedel D., Becherer M., Controlled reversal of Co/Pt dots fornanomagnetic logic applications, J. Appl. Phys., 2012, 111, 07A715.[WoS]
  • [10] Nikulina E., Idigoras O., Vavassori P., Chuvilin A., Berger A.,Magneto-optical magnetometry of individual 30 nm cobaltnanowires grown by electron beam induced deposition, Appl.Phys. Lett., 2012, 100, 142401.[Crossref]
  • [11] Neumann A., Thönnissen C., Frauen A., Hesse S., Meyer A.,Oepen H. P., Probing the magnetic behavior of single nanodots,Nano Lett., 2013, 13, 2199.[PubMed][Crossref][WoS]
  • [12] Chaves-O’Flynn G. D., Vanden-Eijnden E., Stein D. L., Kent A. D.,Energy barriers to magnetization reversal in perpendicularlymagnetized thin film nanomagnets, J. Appl. Phys., 2013, 113,023912.[Crossref][WoS]
  • [13] Ralph D. C., Stiles M. D., Spin transfer torques, J. Magn. Magn.Mater., 2008, 320, 1190–1216.
  • [14] Maruyama T., Shiota Y., Nozaki T., Ohta K., Toda N., MizuguchiM., Tulapurkar A. A., Shinjo T., Shiarishi M., Mizukami S., etal. Large voltage-induced magnetic anisotropy change in a fewatomic layers of iron, Nat. Nanotechnol., 2009, 4, 158–161.[Crossref]
  • [15] Parkin S. S. P., Hayashi M., Thomas L., Magnetic domain-wallracetrack memory, Science, 2008, 320, 190–194.
  • [16] van Dorp W. F., Hagen C. W., A critical literature review offocused electron beam induced deposition, J. Appl. Phys.,2008, 104, 081301.[Crossref][WoS]
  • [17] Utke I., Moshkalev S., Russel P., Nanofabrication using focusedion and electron beams: principles and applications; OxfordUniversity Press: New York, 2012.
  • [18] Huth M., Porrati F., Schwalb C., Winhold M., Sachser R., DukicM., Adams J., Fantner G., Focused electron beam induceddeposition: A perspective, Beilstein J. Nanotechnol., 2012, 3,597–619.[PubMed]
  • [19] van Dorp W. F., van Someren B., Hagen C. W., Kruit P., Crozier P.,Approaching the resolution limit of nanometer-scale electronbeam-induced deposition, Nano Lett., 2005, 5, 1303–7.[Crossref][PubMed]
  • [20] Lau Y. M., Chee P. C., Thong J. T. L., Ng V., Properties andapplications of cobalt-based material produced by electronbeam-induced deposition. J. Vac. Sci. Technol., A 2002, 20,1295.[Crossref]
  • [21] Fernández-Pacheco A., Serrano-Ramón L., Michalik J. M., IbarraM. R., De Teresa J. M., O’Brien L., Petit D., Lee J., Cowburn R.P., Three dimensional magnetic nanowires grown by focusedelectron-beam induced deposition, Sci. Rep., 2013, 3, 1492.[WoS]
  • [22] Serrano-Ramón L., Córdoba R., Rodríguez L. A., Magén C.,Snoeck E., Gatel C., Serrano I., Ibarra M. R., De Teresa J. M.,Ultrasmall functional ferromagnetic nanostructures grown byfocused electron-beam-induced deposition, ACS Nano, 2011, 5,7781–7787.[Crossref][WoS]
  • [23] Belova L. M., Dahlberg E. D., Riazanova A., Mulders J. J. L.,Christophersen C., Eckert J., Rapid electron beam assistedpatterning of pure cobalt at elevated temperatures via seededgrowth, Nanotechnology, 2011, 22, 145305.[Crossref][WoS]
  • [24] Boero G., Utke I., Bret T., Quack N., Todorova M., Mouaziz S.,Kejik P., Brugger J., Popovic R. S., Hoffmann P., Submicrometerhall devices fabricated by focused electron-beam-induceddeposition, Appl. Phys. Lett., 2005, 86, 042503.[Crossref]
  • [25] Utke I., Michler J., Gasser P., Santschi C., Laub D., Cantoni M.,Buffat, P. A., Jiao C., Hoffmann P., Cross section investigationsof compositions and sub-structures of tips obtained by focusedelectron beam induced deposition, Adv. Eng. Mater., 2005, 7,323–331.[Crossref]
  • [26] Serrano-Ramón L., Fernández-Pacheco A., Ibarra M. R., Petit D.,Cowburn R. P., Tyliszeczak T., De Teresa J. M., Modification ofdomain-wall propagation in Co nanowires via Ga+ irradiation,Eur. Phys. J. B, 2013, 86, 97.[Crossref][WoS]
  • [27] Allwood D. A., Xiong G., Cooke M. D., Cowburn R. P., MagnetoopticalKerr effect analysis of magnetic nanostructures, J. Phys.D Appl. Phys., 2003, 36, 2175–2182.[Crossref]
  • [28] Zeng H. T., Read D., O’Brien L., Sampaio J., Lewis E. R., PetitD., Cowburn R. P., Asymmetric magnetic NOT gate and shiftregisters for high density data storage, Appl. Phys. Lett., 2010,96, 262510.[Crossref]
  • [29] Schäfer R., Handbook of magnetism and advanced magneticmaterials. Vol. 3: Novel techniques for characterizing andreparing samples. Part 5.; Kronmüller H., Parkin S. S., Eds.;John Wiley & Sons, Ltd, Chichester, 2007.
  • [30] Idigoras O., Vavassori P., Porro J. M., Berger A., Kerr microscopystudy of magnetization reversal in uniaxial Co-films, J. Magn.Magn. Mater., 2010, 322, L57–L60.[WoS]
  • [31] Hartmann U., Magnetic force microscopy, Annu. Rev. Mater.Sci., 1999, 29, 53–87.[Crossref]
  • [32] Rave W., Hubert A., Magnetic Ground State of a Thin-FilmElement, IEEE Trans. Magn., 2000, 36, 3886.[Crossref]
  • [33] Hankemeier S., Frömter, R., Mikuszeit N., Stickler D., StrillrichH., Pütter S., Vedmedenko E. Y., Oepen, H. P., Magnetic GroundState of Single and Coupled Permalloy Rectagle, Phys. Rev.Lett. 2009, 103, 147204.[Crossref][WoS]
  • [34] Xie K., Zhang X., Lin W., Zhang P., Sang H., Phys. Rev. B, 2011,84,054460.
  • [35] Donolato M., Torti A., Kostesha N., Deryabina M., Sogne E.,Vavassori P., Hansen M. F., Bertacco R., Magnetic domainwall conduits for single cell applications, Lab Chip, 2011, 11,2976–83.[Crossref][WoS][PubMed]
  • [36] Vavassori P., Metlushko V., Ilic B., Gobbi M., Donolato M.,Cantoni M., Bertacco R., Domain wall displacement in Py square ring for single nanometric magnetic bead detection,Appl. Phys. Lett., 2008, 93, 203502.[Crossref]
  • [37] Nikulina E., Idigoras O., Porro J. M., Vavassori P., ChuvilinA., Berger A., Origin and control of magnetic exchangecoupling in between focused electron beam deposited cobaltnanostructures. Appl. Phys. Lett., 2013, 103, 123112.[Crossref]
  • [38] De Teresa J.M., Córdoba R., Arrays of Desenly Packed IsolatedNanowires by Focused Beam Induced Deposition Plus Ar+Milling, ACS Nano, 2014, 8, 3788-95. [Crossref][WoS]
Typ dokumentu
Bibliografia
Identyfikatory
Identyfikator YADDA
bwmeta1.element.-psjd-doi-10_2478_nanofab-2014-0003
JavaScript jest wyłączony w Twojej przeglądarce internetowej. Włącz go, a następnie odśwież stronę, aby móc w pełni z niej korzystać.