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Graphene crystal growth by thermal precipitation of focused ion beam induced deposition of carbon precursor via patterned-iron thin layers

Treść / Zawartość
Warianty tytułu
Języki publikacji
EN
Abstrakty
EN
Recently, relevant advances on graphene as a building block of integrated circuits (ICs) have been demonstrated. Graphene growth and device fabrication related processing has been steadily and intensively powered due to commercial interest; however, there are many challenges associated with the incorporation of graphene into commercial applications which includes challenges associated with the synthesis of this material. Specifically, the controlled deposition of single layer large single crystal graphene on arbitrary supports, is particularly challenging. Previously, we have reported the first demonstration of the transformation of focused ion beam induced deposition of carbon (FIBID-C) into patterned graphitic layers by metal-assisted thermal treatment (Ni foils). In this present work, we continue exploiting the FIBID-C approach as a route for graphene deposition. Here, thin patterned Fe layers are used for the catalysis of graphenization and graphitization. We demonstrate the formation of high quality single and few layer graphene, which evidences, the possibility of using Fe as a catalyst for graphene deposition. The mechanism is understood as the minute precipitation of atomic carbon after supersaturation of some iron carbides formed under a high temperature treatment. As a consequence of the complete wetting of FIBID-C and patterned Fe layers, which enable graphene growth, the as-deposited patterns do not preserve their original shape after the thermal treatment
Słowa kluczowe
Wydawca

Czasopismo
Rocznik
Tom
1
Numer
1
Opis fizyczny
Daty
wydano
2014-01-01
zaakceptowano
2014-02-25
otrzymano
2014-03-21
online
2014-05-27
Twórcy
autor
  • Institut de Microelectronica de Barcelona, IMB-CNM-CSIC, Campus UAB, 08193, Bellaterra, Spain
  • Toyota Technological Institute, TTI, 2-12-1 Hisakata, Tempaku, 468-8511, Nagoya, Japan
Bibliografia
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  • [5] Electric Field Effect in Atomically Thin Carbon Films. K. S. Novoselov, A. K. Geim, S. V. Morozov, D. Jiang, Y. Zhang, S.V. Dubonos, I. V. Grigorieva, A. A. Firsov, Science 306, 666-669 (2004)
  • [6] Production: Beyond sticky tape. R. Van Noorden Nature 483, S32-S33 (2012)
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  • [9] Synthesis of Patterned Nanographene on Insulators from Focused Ion Beam Induced Deposition of Carbon. G. Rius, N. Mestres, M. Yoshimura, Journal of Vacuum Science and Technology B 2012, 30(3) 03D113-1
  • [10] Focused ion beam as a tool for graphene technology: Structural study of processing sequence by electron microscopy. G. Rius, A. H. Tavabi, N. Mestres, O. Eryu, T. Tanji, M.Yoshimura Jpn. J. Appl. Phys. 53 02BC22 (2014)[WoS]
  • [11] Metal-Induced Crystallization of Focused Ion Beam-Induced Deposition for Functional Patterned Ultrathin Nanocarbon. G. Rius, X. Borrise, N. Mestres FIB Nanostructures Lecture Notes in Nanoscale Science and Technology Volume 20,123-159 (2013)
  • [12] Nanographene patterns from focused ion beam induced deposition. Structural characterization of graphene materials by XPS and Raman scattering. M. Castellino, G. Rius, A. Virga, A.Tagliaferro. Handbook of Graphene Science, Taylor and Francis Ed. - (Book chapter. Under Review)
  • [13] Three-dimensional nanostructure fabrication by focused-ionbeam chemical vapor deposition. S. Matsui, T. Kaito, J. I. Fujita, M. Komuro, K. Kanda,Y. Haruyama J. Vac. Sci. Technol. B 18, 3181 (2000)[Crossref]
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  • [15] Raman Spectrum of Graphene and Graphene Layers. A. C. Ferrari,J. C. Meyer, V. Scardaci, C. Casiraghi, M. Lazzeri, F. Mauri, S. Piscanec, D. Jiang, K. S. Novoselov, S. Roth, A. K. Geim PRL 97, 187401 (2006)
  • [16] Raman spectroscopy of graphene and graphite: Disorder, electron-phonon coupling, doping and nonadiabatic effects. A. C. Ferrari Solid State Communications 143, 1-2, 47-57 (2007)[WoS]
  • [17] Edge-controlled growth and kinetics of single-crystal graphene domains by chemical vapor deposition. T. Ma, W. Ren, X. Zhang, Z. Liu, Y. Gao, L.-C. Yin, X.-.L. Ma, F. Ding, H.-M. Cheng Proc. Natl. Acad. Sci. USA 20386-20391 (2013)
  • [18] Chemical Vapor Deposition of Graphene Single Crystals. Z. Yan, Z. Peng, J. M. Tour Accounts of Chemical Research Article ASAP (2014)
  • [19] Raman Spectroscopy of Graphene Edges. C. Casiraghi, A. Hartschuh, H. Qian, S. Piscanec, C. Georgi, A. Fasoli, K. S. Novoselov, D. M. Basko, A. C. Ferrari Nano Lett., 9, 4, 1433-1441 (2009)[Crossref][PubMed]
  • [20] The P, T Phase and Reaction Diagram for Elemental Carbon. F. P. Bundy Journal of Geophysical Research, 85, B12, 6930-6936 (1980)
  • [21] Phase Diagram of Quasi-Two-Dimensional Carbon, From Graphene to Diamond. A. G. Kvashnin, L. A. Chernozatonskii, B.\ I. Yakobson, P. B. Sorokin Nano Lett. 14 (2), 676-681 (2014)[PubMed][WoS][Crossref]
  • [22] The surface science of graphene: Metal interfaces, CVD synthesis, nanoribbons, chemical modifications, and defects. M. Batzill Surface Science Reports 67, 3-4, 1, 83-115 (2012)[WoS]
  • [23] Prediction of carbon nanotube growth success by the analysis of carbon-catalyst binary phase diagrams. C. P. Deck, K. Vecchio Carbon 44, 2, 267-275 (2006)[Crossref]
  • [24] Growth of large-area graphene films from metal-carbon melts. S. Amini, J. Garay, G. Liu, A. A. Balandin, R. Abbaschian J. Appl. Phys. 108, 094321 (2010)
  • [25] Gas-assisted focused electron beam and ion beam processing and fabrication. I. Utke, P. Hoffmann, J. Melngailis J. Vac. Sci. Technol. B 26, 1197 (2008)[Crossref][WoS]
  • [26] Comparison of FIB-CVD and EB-CVD growth characteristics. J. Igaka, K. Kanda, Y. Haruyama, M. Ishida, Y. Ochiai, J.-I. Fujita, T. Kaito, S. Matsui Microelectronic Engineering 83, 4-9, 1225-1228 (2006)
Typ dokumentu
Bibliografia
Identyfikatory
Identyfikator YADDA
bwmeta1.element.-psjd-doi-10_2478_nanofab-2014-0001
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