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2005 | 3 | 2 | 163-177
Tytuł artykułu

Multilayer mirror systems to form hard X-ray beams

Treść / Zawartość
Warianty tytułu
Języki publikacji
EN
Abstrakty
EN
This paper is an overview of the research activities carried out in the past five years at the Institute for Physics of Microstructures RAS and “X-ray” Company towards the manufacture of multilayer mirror systems capable of forming X-ray beams in the subnanometer range of wavelengths. The systems fabrication technology is presented, including techniques for producing supersmooth surfaces of specified shape, methods of graded multilayer structure deposition on such surfaces, and the principles of designing optimal mirror parameters. The characteristics of a quadrelliptical reflector-a novel high light-gathering power four-corner focusing system-are reported.
Wydawca

Czasopismo
Rocznik
Tom
3
Numer
2
Strony
163-177
Opis fizyczny
Daty
wydano
2005-06-01
online
2005-06-01
Twórcy
  • Institute for Physics of Microstructures of the Russian Academy of Science, “X-ray” Company, GSP-105, 603600, Nizhny Novgorod, Russia
  • Institute for Physics of Microstructures of the Russian Academy of Science, “X-ray” Company, GSP-105, 603600, Nizhny Novgorod, Russia, akh@ipm.sci-nnov.ru
  • Institute for Physics of Microstructures of the Russian Academy of Science, “X-ray” Company, GSP-105, 603600, Nizhny Novgorod, Russia
  • Institute for Physics of Microstructures of the Russian Academy of Science, “X-ray” Company, GSP-105, 603600, Nizhny Novgorod, Russia
  • Institute for Physics of Microstructures of the Russian Academy of Science, “X-ray” Company, GSP-105, 603600, Nizhny Novgorod, Russia
  • Institute for Physics of Microstructures of the Russian Academy of Science, “X-ray” Company, GSP-105, 603600, Nizhny Novgorod, Russia
Bibliografia
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  • [4] C. Michaelsen, P. Ricardo, D. Anders, M. Schuster, J. Schilling and H. Göbel: “Improved graded multilayer mirrors for XRD applications”, Adv. X-ray Anal., Vol. 42, (2000), pp. 308–320.
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  • [6] A.D. Akhsakhalyan, E.B. Kluenkov, V.A. Murav’ev and N.N. Salashchenko: “Optimization of multilayer x-ray mirrors in systems of elliptic cylinders and ellipsoids of revolution”, Proceeding of “X-ray optics 2003” Workshop, Nizhny Novgorod, Russia, 2003, pp. 160–172 (in Russian); to be published in:Surface Investigation. X-ray, Synchrotron and Neutron Technique, Vol. 2, (2005).
  • [7] P. Kirkpatrick and A.V. Baez: “Formation of Optical Images by X-Rays”, J. Opt. Soc. Am., Vol. 38 (1948), pp. 766–774. http://dx.doi.org/10.1364/JOSA.38.000766[Crossref]
  • [8] Y.T. Thathachari: “Theory of image formation in combination of X-ray focusing mirrors”, Proc. Indian Acad. Sci. A, Vol. 37, (1953), pp. 41–62.
  • [9] M. Montel: “The X-ray microscope with catamegonic rood-shape objective”, In: V.E. Cosslett, A. Engstrom and H.H. Pattee (Eds.)X-Ray Microscopy and Microradiography, Elsiver, Amsterdam, 1957, pp. 135–150.
  • [10] F. Seward, J. Dent and M. Boyle: “Calibrated “four-color” x-ray microscope for laser plasma diagnostics”, Rev. Sci. Instr., Vol. 47(4), (1976), pp. 464–470. http://dx.doi.org/10.1063/1.1134656[Crossref]
  • [11] Single Corner Kirkpatrick-Baez Beam Conditioning Optic Assembly, U.S. Patent, US006041099, Mar. 21 (2000).
  • [12] Multiple Corner Kirkpatrick-Baez Beam Conditioning Optic Assembly, U.S. Patent, US006014423, Jan. 11 (2000).
  • [13] A.A. Fraerman, S.V. Gaponov, V.M. Genkin and N.N. Salashchenko: “The effect of the interfacial roughness on the reflection properties of multilayer x-ray mirrors”, Nucl. Instr. and Meth, Vol. A261, (1987), pp. 91–98.
  • [14] A.V. Biryukov, S.V. Gaponov, B.A. Gribkov, M.V. Zorina, V.L. Mironov and N.N. Salashchenko “AFM and X-Ray Investigations of Surface Roughness of Glass Substrates with Non-Gaussian Height Distribution”, Surface Investigation. X-ray, Synchrotron and Neutron Techniques. Vol. 2, (2003), pp. 17–20 (in Russian).
  • [15] A.D. Akhsakhalyan, B.A. Volodin, E.B. Kluenkov, V.A. Murav’ev, N.N. Salashchenko and A.I. Kharitonov: “Preparation of multilayer X-ray cylindrical reflectors”, Surface Investigation. X-ray, Synchrotron and Neutron Techniques, Vol. 15(1), (1999), pp. 233–237.
  • [16] A.D. Akhsakhalyan, B.A. Volodin, E.B. Kluenkov, V.A. Murav’ev, N.N. Salashchenko, A.I. Kharitonov and E.A. Shamov: “The thermoplastic method for fabrication of cylindrical surfaces of X-ray reflectors”, Surface Investigation. X-ray, Synchrotron and Neutron Techniques, Vol. 16(1), (2001), pp. 175–180.
  • [17] A.D. Akhsakhalyan, N.I. Chkhalo and A.I. Kharitonov: “Method of manufacturing of double bent X-Ray optics”, Nucl. Instr. and Meth., Vol. A470, (2001), pp. 142–144. http://dx.doi.org/10.1016/S0168-9002(01)01027-0[Crossref]
  • [18] A.A. Akhsakhalyan, A.D. Akhsakhalyan, V.A. Murav’ev and A.I. Kharitonov: “Manufacturing of cylindrical surfaces by the methods of a thermoplastic and elastic bending of glass plates”, Surface Investigation. X-ray, Synchrotron and Neutron Techniques, Vol. 1, (2002), pp. 51–54 (in Russian).
  • [19] A.A. Akhsakhalyan, A.D. Akhsakhalyan, D.G. Volgunov, S.V. Gaponov, N.A. Korotkova, L.A. Mazo, V.A. Murav’ev, V.L. Mironov, N.N. Salashchenko and A.I. Kharitonov: “Fabrication of cylinder X-ray reflectors by replication methods”, Surface Investigation. X-ray, Synchrotron and Neutron Techniques, Vol. 1, (2003), pp. 78–81 (in Russian).
  • [20] S.S. Andreev, A.D. Akhsakhalyan, M.S. Bibishkin, N.I. Chkhalo, S.V. Gaponov, S.A. Gusev, E.B. Kluenkov, K.A. Prokhorov, N.N. Salashchenko, F. Schafers and S.Yu. Zuev: “Multilayer optics for XUV spectral region: technology fabrication and applications”, CEJP, Vol. 1, (2003), pp. 191–209. (www.cesj.com).
  • [21] S.S. Andreev, A.D. Akhsakhalyan, M.N. Drosdov, N.I. Polushkin and N.N. Salashchenko: “High-resolution Auger depth profiling of multilayer structures Mo/Si, Mo/B4C, Ni/C”, Thin Solid Films, Vol. 263, (1995), pp. 169–174. http://dx.doi.org/10.1016/0040-6090(95)06537-7[Crossref]
  • [22] Yu. Ya. Platonov, N.I. Polushkin, N.N. Salashchenko, A.A. Fraerman: “X-ray investigation of characteristics of multilayer structures”, Journal of Technical Physics, Vol. 57(11), (1987), pp. 2192–2199 (in Russian).
  • [23] A.D. Akhsakhalyan, A.A. Fraerman, N.I. Polushkin, Yu.Ya. Platonov and N.N. Salashchenko: “Determination of Layered Synthetic Microstructure parameters”, Thin Solid Films. Vol. 203, (1991), pp. 317–326. http://dx.doi.org/10.1016/0040-6090(91)90139-O[Crossref]
  • [24] A.A. Fraerman, S.V. Mitenin, N.N. Salashchenko and E.A. Shamov: “Determination of short-period X-ray multilayer mirrors parameters”, Surface Investigation. X-ray, Synchrotron and Neutron Techniques. Vol. 12, (1997), pp. 51–57 (in Russian).
  • [25] N.N. Salashchenko, A.A. Fraerman, S.V. Mitenin, K.A. Prokhorov and E.A. Shamov: “Short-period X-ray multilayers based on Cr/Sc, W/Sc”, Nucl. Instr. and Meth., Vol. A405, (1998), pp. 292–296. http://dx.doi.org/10.1016/S0168-9002(97)00163-0[Crossref]
  • [26] A.A. Akhsakhalyan, A.D. Akhsakhalyan, M.S. Bibishkin, B.A. Volodin, E.B. Kluenkov, V.A. Murav’ev, N.N. Salashchenko, A.I. Kharitonov and N.I. Chkhalo: “Features of fabrication of short-focus cylindrical X-ray reflection systems”, Surface Investigation. X-ray, Synchrotron and Neutron Techniques, Vol. 1, (2003), pp. 81–86 (in Russian).
  • [27] A.D. Akhsakhalyan, V.A. Murav’ev and N.N. Salashchenko: “A new technique for measurement of shape and distribution of the period of cylindrical multilayer mirrors”, In:Proceeding of “X-ray optics 2004”, Workshop, Nizhny Novgorod, Russia, 2004, pp. 166–170 (in Russian); to be published in:Surface Investigation. X-ray, Synchrotron and Neutron Technique, (2005).
  • [28] A.D. Akhsakhalyan, E.B. Kluenkov, V.A. Murav’ev and N.N. Salashchenko: “Optimization of multilayer x-ray mirrors in systems of parabolic cylinders”, Surface Investigation. X-ray, Synchrotron and Neutron Techniques, Vol. 1, (2003), pp. 86–94 (in Russian).
  • [29] A.D. Akhsakhalyan, E.B. Kluenkov, V.A. Murav’ev and N.N. Salashchenko: “Lighting systems on multilayer X-ray mirrors of the cylindrical shape with directrix as a logarithmic spiral”, Proceeding of “X-ray optics 2003” Workshop, Nizhny Novgorod, Russia, 2003, pp. 192–197 (in Russian); to be published in:Surface Investigation. X-ray, Synchrotron and Neutron Technique, Vol. 5, (2005).
  • [30] A.A. Akhsakhalyan, A.D. Akhsakhalyan B.A. Volodin, E.B. Kluenkov, V.A. Murav’ev, N.N. Salashchenko and A.I. Kharitonov: “Quadrelliptical reflector based on multilayer structures for the hard x-ray range”, In:Proceeding of “X-ray optics 2003” Workshop, Nizhny Novgorod, Russia, 2003, pp. 187–191 (in Russian).
  • [31] A.A. Akhsakhalyan, A.D. Akhsakhalyan, N.I. Chkhalo, A.I. Kharitonov, E.B. Klyuenkov, V.A. Murav’ev, N.N. Salashchenko and B.A. Volodin: “Four-corner X-ray imaging system based on multilayer mirrors”, In:Proceeding of the 7th Int. Conf. On the Physics of Multilayer Structures, p1-03, Rusutsu Resort, Sapporo, Japan, 2004.
  • [32] A.A. Akhsakhalyan, A.D. Akhsakhalyan, B.A. Volodin, E.B. Kluenkov, V.A. Murav’ev, N.N. Salashchenko and A.I. Kharitonov: “Quadrelliptical reflector based on multilayer structures for the hard x-ray range”, Izvestiya Academii Nauk, Vol. 68(4), (2004), pp. 569–572 (in Russian).
Typ dokumentu
Bibliografia
Identyfikatory
Identyfikator YADDA
bwmeta1.element.-psjd-doi-10_2478_BF02475584
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