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2003 | 1 | 1 | 191-209
Tytuł artykułu

Multilayer optics for XUV spectral region: technology fabrication and applications

Treść / Zawartość
Warianty tytułu
Języki publikacji
EN
Abstrakty
EN
We present research investigations in the field of multilayer optics in X-ray and extreme ultra-violet ranges (XUV), aimed at the development of optical elements for applications in experiments in physics and in scientific instrumentation. We discuss normal incidence multilayer optics in the spectral region of “water window”, multilayer optics for collimation and focusing of hard X-ray, multilayer dispersing elements for X-ray spectroscopy of high-temperature plasma, multilayer dispersing elements for analysis of low Z-elements. Our research pays special attention to optimization of multilayer optics for projection EUV-lithography (ψ-13nm) and short period multilayer optics.
Wydawca

Czasopismo
Rocznik
Tom
1
Numer
1
Strony
191-209
Opis fizyczny
Daty
wydano
2003-03-01
online
2003-03-01
Twórcy
autor
  • Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia
  • Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia
autor
  • Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia
autor
  • Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia
autor
  • Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia
autor
  • Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia
autor
  • Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia
autor
  • Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia
  • Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia
autor
  • BESSY II, Albert Einstein St. 15, D-12489, Berlin, FRG
autor
  • Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia
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Typ dokumentu
Bibliografia
Identyfikatory
Identyfikator YADDA
bwmeta1.element.-psjd-doi-10_2478_BF02475561
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