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2005 | 3 | 4 | 668-673
Tytuł artykułu

Laser assisted selective chemical metalization of Al2O3 films

Treść / Zawartość
Warianty tytułu
Języki publikacji
EN
Abstrakty
EN
Thick aluminum oxide films are prepared on Al plates by anodizing. On the ceramic surface thus obtained a very thin Ag film is deposited via vacuum thermal evaporation. The Ag/Al2O3/Al samples prepared are irradiated by Nd:YAG laser through a suitable metal mask in order to remove the top metal film in the exposed areas. Thus, a negative silver image of the copied mask is obtained. Further, the samples are processed in Ni electroless chemical bath activated by the rest of silver. All processing steps are studied by scanning electron microscopy (SEM). EDS X-ray mapping is applied to study the final distribution of Al and Ni in the processed areas. In addition, the DC conductivity of the fabricated Ni wires obtained is measured. The proposed new method for selective chemical deposition of electroconductive Ni onto laser microstructured Ag/Al2O3/Al samples is simple, versatile and not restricted to the metal/ceramic system studied as well as to the electroless deposited metal.
Wydawca

Czasopismo
Rocznik
Tom
3
Numer
4
Strony
668-673
Opis fizyczny
Daty
wydano
2005-12-01
online
2005-12-01
Twórcy
autor
  • Central Laboratory of Photoprocesses “Acad. J. Malinowski”, Bulgarian Academy of Sciences, 1113, Sofia, Bulgaria, emodk@clf.bas.bg
  • Institute of Physical Chemistry, Bulgarian Academy of Sciences, 1113, Sofia, Bulgaria
  • Central Laboratory of Photoprocesses “Acad. J. Malinowski”, Bulgarian Academy of Sciences, 1113, Sofia, Bulgaria, nstar@clf.bas.bg
Bibliografia
  • [1] J. Gong, Q. Cheng, W. Fei and S. Seal: “Micromachined nanocrystalline SnO2 gas sensor for electronic nose”, Sens. Actuators B, Vol. 102, (2004), pp. 117–125. http://dx.doi.org/10.1016/j.snb.2004.02.055[Crossref]
  • [2] S. T. Kim, M. S. Park and H. M. Kim: “Systematic approach for the evaluation of the optimal fabrication conditions of a H2S gas sensor with Taguchi method”, Sens. Actuators B, Vol. 102, (2004), pp. 253–260. http://dx.doi.org/10.1016/j.snb.2004.04.029[Crossref]
  • [3] T. Tong, J. Li, Q. Chen, J. P. Longtion, S. Tankiewicz and S. Sampath: “Utrafast laser micromachining of thermal sprayed coatings for mcroheaters: design, fabrication and characterization”, Sens. Actuators A, Vol. 114, (2004), pp. 102–111. http://dx.doi.org/10.1016/j.sna.2004.02.012[Crossref]
  • [4] M. Baroncini, P. Placidi, G. C. Cardinali and A. Scorzoni: “Thermal characterization of a microheater for micromachined gas sensor”, Sens. Actuators A, Vol. 115, (2004), pp. 8–14. http://dx.doi.org/10.1016/j.sna.2004.03.012[Crossref]
  • [5] W. I. Jang, C. A. Choi, C. H. Jun, Y. T. Kim and M. Esashi: “Surface micromachined thermally driven micropump”, Sens. Actuators A, Vol. 115, pp. 151–158.
  • [6] S. Dinev: The lasers in the modern technologies, Alfa, Sofia, 1993 (in Bulgarian).
  • [7] D. Hellrung, L. Y. Yeh, F. Depiereux, A. Gillner and R. Poprawe: “High-accuracy micromachining of ceramics by frequency-tripled Nd:YAG-lasers”, SPIE, Vol. 3618, (1999), pp. 348–356.
  • [8] K. Starbova, V. Mankov, N. Starbov, D. Popov, D. Nihtianova, K. Kolev and L. D. Laude: “Phase transition in excimer laser irradiated zirconia thin films”, Appl. Surf. Sci., Vol. 173, (2001), pp. 177–183. http://dx.doi.org/10.1016/S0169-4332(00)00830-8[Crossref]
  • [9] E. Krumov, K. Starbova, D. Popov, G. Schlaghecken and E. W. Kreutz: “Excimer laser modification of electron-beam deposited alumina thin films”, In: E. Balabanova and I. Dragieva (Eds.): Nanoscience and Nanotechnology, Heron press, Sofia, 2005.
  • [10] K. Starbova, E. Krumov, M. Radoeva, N. Starbov, D. Popov, G. Schlaghecken and E. W. Kreutz: “Laser assisted surface microstructuring of Me/ZrO2 bilayered thin film system”, Appl. Surf. Sci., Vol. 217, (2003), pp. 118–124. http://dx.doi.org/10.1016/S0169-4332(03)00526-9[Crossref]
Typ dokumentu
Bibliografia
Identyfikatory
Identyfikator YADDA
bwmeta1.element.-psjd-doi-10_2478_BF02475195
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