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Nano-proximity direct ion beam writing

Treść / Zawartość
Warianty tytułu
Języki publikacji
EN
Abstrakty
EN
Focused ion beam (FIB) milling with a 10 nm resolution is used to directly write metallic metasurfaces and micro-optical elements capable to create structured light fields. Surface density of fabricated nano-features, their edge steepness as well as ion implantation extension around the cut line depend on the ion beam intensity profile. The FIB beam intensity cross section was evaluated using atomic force microscopy (AFM) scans of milled line arrays on a thin Pt film. Approximation of two Gaussian intensity distributions describes the actual beam profile composed of central high intensity part and peripheral wings. FIB fabrication reaching aspect ratio of 10 in gold film is demonstrated.
Wydawca
Czasopismo
Rocznik
Tom
2
Numer
1
Opis fizyczny
Daty
otrzymano
2015-09-02
zaakceptowano
2015-11-23
online
2016-02-25
Twórcy
  • Centre
    for Micro-Photonics, Faculty of Science, Engineering and Technology,
    Swinburne University of Technology, Hawthorn, VIC 3122,
    Australia, & Melbourne Centre for Nanofabrication, 151 Wellington
    Road, Clayton, VIC 3168, Australia
  • Centre
    for Micro-Photonics, Faculty of Science, Engineering and Technology,
    Swinburne University of Technology, Hawthorn, VIC 3122,
    Australia, & Melbourne Centre for Nanofabrication, 151 Wellington
    Road, Clayton, VIC 3168, Australia
autor
  • The Institute of Microelectronics Madrid, Isaac Newton,
    8 PTM, 28760, Spain,
  • Centre
    for Micro-Photonics, Faculty of Science, Engineering and Technology,
    Swinburne University of Technology, Hawthorn, VIC 3122,
    Australia, & Melbourne Centre for Nanofabrication, 151 Wellington
    Road, Clayton, VIC 3168, Australia
  • University of Bordeaux, CNRS,
    Laboratoire Ondes et Matière d’Aquitaine, 351 cours de la libération,
    33400 Talence, France
  • University of Bordeaux, CNRS,
    Laboratoire Ondes et Matière d’Aquitaine, 351 cours de la libération,
    33400 Talence, France
  • Centre
    for Micro-Photonics, Faculty of Science, Engineering and Technology,
    Swinburne University of Technology, Hawthorn, VIC 3122,
    Australia, & Melbourne Centre for Nanofabrication, 151 Wellington
    Road, Clayton, VIC 3168, Australia
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Typ dokumentu
Bibliografia
Identyfikatory
Identyfikator YADDA
bwmeta1.element.-psjd-doi-10_1515_nanofab-2015-0006
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