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2015 | 13 | 1 |
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T- and H- forms of dc oxygen discharge at medium pressures: spectroscopic study

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Języki publikacji
EN
Abstrakty
EN
The active DC glow discharge sustained in the pure oxygen can be employed in various technological applications, such as thin layer deposition or sterilization. Considering applied pressures of hundreds of Pascals, two different forms of the positive column of the discharge can co-exist: T- and H-form. These forms are commonly distinguished according to the values of the axial electric field strength: values in the H-form are generally one order of magnitude higher compared to the T-form. However, electric measurement itself may often affect the discharge plasma. Optical emission spectroscopy as a non-invasive diagnostic was therefore employed as an alternate characterization of both forms. We found that the H- and T-forms can be clearly recognized by values of intensities of particular oxygen spectral lines. This characterization enabled us to observe transition between the both particular forms when spatial distribution measurements were employed. Moreover, transition in the rotational temperature Trot was also observed.
EN
Wydawca
Czasopismo
Rocznik
Tom
13
Numer
1
Opis fizyczny
Daty
otrzymano
2014-01-29
zaakceptowano
2014-04-30
online
2014-11-26
Twórcy
  • Charles University in Prague, Faculty of Mathematics and Physics, Department of Surface and Plasma Science, V Holešovičkách 2, 180 00 Praha 8, Czech Republic
  • Charles University in Prague, Faculty of Mathematics and Physics, Department of Surface and Plasma Science, V Holešovičkách 2, 180 00 Praha 8, Czech Republic
autor
  • Charles University in Prague, Faculty of Mathematics and Physics, Department of Surface and Plasma Science, V Holešovičkách 2, 180 00 Praha 8, Czech Republic
  • Charles University in Prague, Faculty of Mathematics and Physics, Department of Surface and Plasma Science, V Holešovičkách 2, 180 00 Praha 8, Czech Republic
Bibliografia
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  • [11] Hrachová V., Kylián O., Kaňka A., Study of the vacuum purity influence on oxygen and nitrogen spectra properties in DC glow discharge, Vacuum, 2004, 76, 433-436.[Crossref]
  • [12] Schmiedt L., Kaňka A., Hrachová V., Study of rotational temperature of oxygen molecules in H and T forms of DC glow discharge sustained in pure oxygen, Vacuum, 2011, 85, 1093-1095.[WoS][Crossref]
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  • [14] Schmiedt L., Morávek M.J., Kaňka A., Hrachová V., Study of rotational temperature of oxygen DC glow discharge in Silica and Pyrex discharge tubes, Vacuum, 2010, 84, 72-74.[WoS][Crossref]
  • [15] Raizer J. P., Gas discharge physics, Springer-Verlag, Berlin, Heidelberg, 1997.
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Typ dokumentu
Bibliografia
Identyfikatory
Identyfikator YADDA
bwmeta1.element.-psjd-doi-10_1515_chem-2015-0050
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