Purpose: A review regarding the devices for vacuum heat treatment is presented. Design/methodology/approach: Devices for modern heat treatment has been reviewed. The devices has been classified regarding the heat treatment (quenching, carburizing, nitriding, tempering and annealing). The possible application, materials and parts for heat treatment as well as parameters of the devices has been analysed. Findings: There is a wide range of modern vacuum heat treatment devices. All currently used heat and thermo-chemical treatments may be proceed in vacuum equipment. It is also in many cases preferable to use vacuum- because of economic reasons, better metallurgical results or environmental friendliness. Also software simulators which facilitates the planning of heat treatment are available with the equipment. Practical implications: Because of the industry expectations regarding efficiency, quality, economy and safety, vacuum equipment becoming the subject of wider and wider attention. In particular, aerospace and automotive industries pay a lot of attention to these aspects. The basic task of vacuum devices is fast, effective, environmentally friendly production of high quality machine parts. Originality/value: The synthetic presentation of modern devices for vacuum heat treatment was presented, in particular furnaces for quenching, carburizing, nitriding, tempering and annealing. The products characteristic and applications has been presented. Also equipment for some advanced vacuum applications has been presented. Modern software which complements the devices in terms of designing heat treatment processes has been described.