Recently, many micro structure products are used for compact, high precision and others functions in the field of measuring instruments, medical instruments, information processing devices and so on. However, in the small sliding parts of these products, the surface contact pressure becomes lowered and then, higher adhesive force occurs, resulting larger coefficient of friction. On the other hand, in the field of machine tools, lubrication free sliding parts are also demanded for eco-friendly. In this study, the surface treatment for improvement of coefficient of friction for both light load and heavy load applications are investigated. When laser ray is applied on stainless steel surface, CrO2 layer with small concaves like dimple is generated. This CrO2 layer is used in light load applications. Next, TiAlN and DLC coating are being used on cutting tools for reducing coefficient of friction and cutting heat. Therefore, these coating materials are used for heavy load and oil free applications. The improvement of coefficient of friction and life of coating are investigated by experiments. It was concluded from the results that; (1) Coefficient of friction for light load application can be reduced by coating CrO2 layer. (2) Coefficients of friction for heavy load application were reduced by coating TiAlN and DLC layer. (3) Life of both CrO2 and DLC layers are sufficiently long for practical applications at light load and heavy load respectively.