Ograniczanie wyników
Czasopisma help
Lata help
Autorzy help
Preferencje help
Widoczny [Schowaj] Abstrakt
Liczba wyników
Znaleziono wyników: 154
first rewind previous Strona / 8 next fast forward last
Wyszukiwano:
w słowach kluczowych:  magnetron sputtering
help Sortuj według:

help Ogranicz wyniki do:
1
100%
Elektronika : konstrukcje, technologie, zastosowania
PL W pracy opisano pięciokomorową linię potokową do nanoszenia powłok metodą jonowego rozpylania na wielkogabarytowe powierzchnie. Komory rozseparowane są czterema liniowymi zaworami śluzowymi dzielącymi linie na trzy sekcje: wejściową, wyjściową i obszar technologiczny. Obszar technologiczny z trzema [...]
EN The design and technical descriptions of the sputtering line is presented. Vacuum system is composed of 5 vacuum chambers divided by 4 isolating valves into 3 vacuum sections. All the chambers are made of low carbon mild steel welded together reinforced by steel bars with fore-buffer chamber, post-b[...]
2
100%
Elektronika : konstrukcje, technologie, zastosowania
PL Powłoki wielowarstwowe na szkle płaskim pozwalają na istotną modyfikację właściwości fizycznych końcowego produktu. W skali przemysłowej szkło płaskie pokrywa się różnymi rodzajami warstw przy pomocy procesu rozpylania magnetronowego. Specjalne linie produkcyjne wyposażone w wielkogabarytowe komory [...]
EN Multilayer glass coating can efficiently change the physical properties of the final product. Large area glass coatings are produced by magnetron sputtering method. Production lines equipped with large scale vacuum chambers are used to receive layers with the precisely controlled thickness and chemi[...]
3
100%
Optica Applicata
EN This work presents the study of the structural and optical properties of TiO2:Tb thin films deposited on Si (100) and SiO2 substrates by magnetron sputtering from metallic Ti-Tb mosaic target. Thin films were studied by means of scanning electron microscopy with energy disperse[...]
4
100%
Prace Naukowe Instytutu Podstaw Elektrotechniki i Elektrotechnologii Politechniki Wrocławskiej. Konferencje
EN The results of investigation of chemical composition of magnetron plasma by optical spectrophotometry method and its influence on the stoichiometry of Zn-Bi-0 oxide layers will be presented. Thin Zn-Bi-0 layers have been obtained by pulse magnetron sputtering. It was shown that the intensity of the [...]
5
100%
Elektronika : konstrukcje, technologie, zastosowania
PL Przedstawiono konstrukcję zasilacza dużej mocy do procesów jonowego rozpylania magnetronowego o regulowanych parametrach wyjściowych: napięcie oraz prąd. Cechą charakterystyczną zasilacza jest moduł sterownika tyrystorowego sterowanego napięciowym sygnałem zadającym, otrzymywanym automatycznie z nad[...]
EN A high power supply with controlled output parameters: UH - output voltage and I - output current for magnetron sputtering processes is presented in this paper. The most characteristic feature is a tyristor module controlled by voltage signal from higher level control unit (personal computer PC, pro[...]
6
100%
Nukleonika
2016 Vol. 61, No. 2 191--194
EN In this work, we present the first results of our research on the synergy of fields, electric and magnetic, in the initiation and development of glow discharge under reduced pressure. In the two-electrode system under reduced pressure, the breakdown voltage characterizes a minimum energy input of th[...]
7
100%
Optica Applicata
2016 Vol. 46, nr 2 181--185
EN Thin films of zinc oxide doped with aluminium were obtained by using the magnetron sputtering technique on glass substrates. The changes in magnetron power influence the structural, optical and electrical properties of the ZnO:Al layers. The deposited films are characterized by very good homogeneity[...]
8
100%
Optica Applicata
EN This work presents the results of optical emission from Eu3+, Tb3+ and Nd3+ luminescence centers in TiO2 thin films. Thin films were prepared by magnetron sputtering from metallic Ti-Eu, Ti-Tb, Ti-Nd targets, respectively. Optical properties were examined [...]
9
100%
Bulletin of the Polish Academy of Sciences. Technical Sciences
EN The mechanical and tribological behavior of physical vapor deposited coatings on soft substrate materials gains increasing interest due to economical and environmental aspects – e.g. substitution of steels by light-weight metals or polymers in transport vehicles. Nevertheless, such soft materials re[...]
10
100%
International Journal of Electronics and Telecommunications
EN Deposition of the metallic multilayers is a part of the scientific program on the chemical reaction leading to intermetallic compound formation. This reaction is known as self propagation high temperature synthesis (SHS). The key problem in this investigation is to produce the metallic multilayer sy[...]
11
100%
Archives of Metallurgy and Materials
2018 Vol. 63, iss. 3 1339--1344
EN This work reports the results of a study of Mo thin films synthesis by DC Pulsed Magnetron Sputtering method (PMS), operating at pulse main frequency of 100 kHz and modulated by the additional modulation frequency, driving in the range of 5-1000 Hz (modulated Pulse Magnetron Sputtering – mPMS). We h[...]
12
100%
Optica Applicata
EN Transition metal oxides, whose optical band gap might be modified by doping or manufacturing using two (or more) oxides with different band gaps, are good candidates for host matrices in luminescent devices. This paper presents structural properties of TiHfOx thin films and analysis of dependence of[...]
13
100%
Technical Issues
2016 nr 3 53--59
EN Titanium dioxide (TiO2) is one of the most extensively studied metal oxides, also in a form of thin films. It is a polymorphous material known to exist in three crystalline forms, two tetragonal (anatase and rutile) and one orthorhombic (brookite). In the present paper, the way of deposition of thin[...]
14
100%
Nukleonika
EN Zirconium alloys used widely in nuclear industry as fuel claddings are prone to violent oxidation in water steam atmosphere in the case of loss of coolant accident (LOCA). Accompanying generation of large quantities of heat and explosive gaseous hydrogen may lead to destruction of nuclear core. As t[...]
15
100%
Engineering of Biomaterials
EN During the last few decades, a growing demand for medical implants may be observed on the market. This is a consequence of both the increasing number of people suffering from disabilities as well as technological development. As a result of growing number of trauma injuries, orthopaedic and bone imp[...]
16
100%
Inżynieria Materiałowa
PL Gradientowe warstwy Ti:C mogą być wytworzone dzięki połączeniu technik stałoprądowego rozpylania magnetronowego i wspomaganego plazmą chemicznego osadzania z fazy gazowej. Zastosowanie wyposażonego w magnetron reaktora plazmochemicznego RF PACVD umożliwia przeprowadzenie całego procesu bez konieczno[...]
EN Metal containing carbon layers can be deposited by combination of DC magnetron sputtering and plasma assisted chemical vapor deposition. Due to hybrid deposition system made up of a RF PACVD reactor equipped with a magnetron, the deposition process can be obtained without opening the reaction chambe[...]
17
100%
Materials Science Poland
2017 Vol. 35, No. 3 639--646
EN The synthesis of coatings on textiles fibers enables functionalization of their properties e.g.: changing the reaction on IR radiation. In our experiment, a magnetron with a grounded cathode and positively biased anode was used as a source of plasma. A ring anode was positioned at 8 cm distance from[...]
18
100%
Materials Science Poland
2015 Vol. 33, No. 3 470--481
EN Highly conductive gallium-doped zinc oxide (GZO) transparent thin films were deposited on glass substrates by RF magnetron sputtering. The deposited films were characterized by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), four-point probe and UV-Vis spectrophotometer, respectivel[...]
19
100%
Materials Science Poland
2015 Vol. 33, No. 4 669--676
EN This work presents the investigations of AlN thin films deposited on Si substrates by means of magnetron sputtering. Nine different sputtering processes were performed. Based on obtained results, the tenth process was prepared and performed (for future ISFET structures manufacturing). Round aluminum[...]
20
100%
Materials Science Poland
2015 Vol. 33, No. 4 894--901
EN Encouraged by recent studies and considering the well-documented problems occurring during AlN synthesis, we have chosen two diagnostic methods which would enable us to fully control the process of synthesis and characterize the synthesized aluminum nitride films. In our experiment we have compared [...]
first rewind previous Strona / 8 next fast forward last