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1
Content available Miniaturowy skaningowy mikroskop elektronowy MEMS
PL
W artykule przedstawiony jest pierwszy w świecie miniaturowy skaningowy mikroskop elektronowy MEMS. Urządzenie dzięki swoim niewielkim rozmiarom, małym poborem mocy, oraz wytrzymałą konstrukcją może być stosowane w miejscach dotychczas niedostępnych, m.in. w misjach kosmicznych do obrazowania próbek pyłów kosmicznych, gleby księżycowej lub marsjańskiej.
PL
W tym artykule przedstawiony jest przegląd kosmicznych aplikacji MEMSów oraz – w tym po raz pierwszy - opracowane w Polsce spektrometry plazmowe MEMS (cieczowy i gazowy) z odczytem optycznym i spektrometr mas jonów MEMS przewidziane dla misji wenusjańskiej, marsjańskiej i księżycowej. Opisano również Polskie subminiaturowe laboratorium biomedyczne typu lab-on-chip , które przetestowano na LEO, co otwiera nowe horyzonty w obszarze biomedycyny mikrograwitacyjnej. W artykule przedstawiono również cezowy mikrozegar atomowy CSAC i jego rolę w technice.
EN
This paper aims to present an approach to optimising MEMS-based vibration sensors by strategically placing the accelerometer to maximise the sensor’s performance. Optimisation requires establishing specific criteria, and in this case, the objective is to maximise SNR, which is crucial for ensuring accurate and reliable measurements. In practical applications, vibration signals received by sensors can be highly complex, often containing a cyclic fault signature that is distorted by the transmission path. In addition, signals are frequently obscured by noise from other sources, reducing overall SNR. Addressing these issues, sensor placement becomes critical, as different positions in the structure can either amplify or decrease fault signatures that are essential for diagnosis. In the past, MEMS vibration sensors were efficient only for low frequency bands. The selected MEMS sensor has a linear frequency response range up to 11 kHz, so research focused on maintaining the linear response in our range of interest, and therefore the sensor design proves the ability to cover a wide frequency band. Having such a MEMS sensor enables one to create Condition Monitoring (CM) for early detection of various faults. One of the problems in realisation of a sensor is the design of the mechanical part so that the vibrations of machinery are properly transmitted in the frequency band of a sensor. Equally important is finding a location within the sensor to achieve an optimal signal transfer path. Ultimately, this optimisation aims to provide a robust solution for diagnostics, making MEMS-based sensors a viable alternative to piezoelectric sensors in industrial environments.
EN
As part of the research conducted, the correctness of the serial peripheral interface (SPI) communication was tested using the Raspberry Pi 4B. The purpose of the experiment was to confirm the possibility of stable data exchange between the control unit and external peripheral circuits, with particular emphasis on analog-to-digital converters and micro-electro-mechanical systems (MEMS) sensors. The tests showed correct and stable operation of the SPI bus for both unidirectional and bidirectional transmission, and confirmed the usefulness of SPI in measurement systems requiring precise and fast data transfer. The experiments provide a basis for further work with real-time sensors and data acquisition systems under dynamic conditions.
EN
Collecting large amounts of real-world data can be expensive, time-consuming, or even impossible in some cases. This situation can be particularly acute for IMU-based gait-analysis data due to participant fatigue, changing walking surfaces, and instrumentation positioning. These factors can provoke changes in the characteristics (drift or distribution shift) of data collected over long durations or on different days, making analysis difficult. Ideally, one would prefer a larger data set whose distributional characteristics do not change. Data augmentation can help address this limitation by creating more training data from what is already available. It is a technique used to artificially increase the amount of data available for training machine learning models. It works by creating new data points from existing data through various modifications. We present a new data-augmentation technique based on modelling three types of common sensor disturbances: alignments, vibrations and drift. The new approach is compared to three state-of-the-art methods, and validated on three different data sets: two from publicly accessible repositories, and one from our own laboratory with 100 participants and 30 gait cycles per person. Improvements in classification accuracy are obtained for each data set: 35%, 90% and 21%, respectively. The experiments show that the use of data augmentation has a positive impact on the metrics of the gait biometric system. It enables increased efficiency in identifying subjects from a limited sample of data and does not require a problematic data acquisition process.
EN
The rapid advancement of 5th Generation (5G) technology has driven the demand for high performance millimetre-wave (mmWave) antennas with enhanced efficiency and scalability. However, designing microstrip patch antennas (MPAs) at mmWave frequencies presents challenges in optimizing gain, bandwidth, and Voltage Standing Wave Ratio (VSWR) while maintaining cost-effectiveness and fabrication feasibility. This study proposes a novel MPA design incorporating an ET-shaped slot and three parasitic rectangular patches to achieve a balance between gain, bandwidth, and VSWR. The Micro-Electro-Mechanical Systems (MEMS)-based design explores tantalum and copper as alternative patch materials for 28 GHz radio frequency (RF) energy harvesting in 5G mmWave systems. CST simulations are conducted to evaluate key performance metrics, including VSWR, gain, and reflection coefficient, S_11 across material thicknesses of 35 µm, 1 µm, and 700 nm. Among the tested configurations, the 1 µm thick tantalum patch demonstrates the best performance, achieving an S_11 of -21.474 dB, a VSWR of 1.18, and a gain of 6.14 dB at 28 GHz. These findings highlight tantalum’s potential as a scalable, high-performance material for MEMS-based 5G mmWave antenna applications.
EN
This paper introduces a methodology, algorithms, and the achieved results for determining the damping coefficient using a microelectromechanical systems (MEMS) accelerometer, specifically for finite element method (FEM) simulations. The paper not only showcases the results but also employs several independent verification procedures to confirm the validity of the obtained damping coefficient. The determined damping coefficient is presented directly in SI units, making it readily applicable to a specific object, while it is usually given as a percentage. The accuracy of the determined damping ratio was validated through unbiased experiments, an in-house computational Python program. Additionally, to ensure the correctness of the determined damping coefficient, a practical example was provided wherein FEM simulation was executed using a discrete element as a damper within ANSYS LS-Dyna software to corroborate the results. The authors emphasize that the proposed method for determining the damping coefficient is both efficient and can be implemented without the necessity of complex equipment. This novel methodology for assessing a damping coefficient serves as a promising alternative to Rayleigh Damping, which lacks a direct physical correlation. Moreover, it opens up significant possibilities for broader application in various engineering fields, including structural dynamics, vibration analysis, and mechanical system optimization.
EN
In recent years, due to the proliferation of inertial measurement units (IMUs) in mobile devices such as smartphones, attitude estimation using inertial and magnetic sensors has been the subject of considerable research. Traditional methods involve probabilistic and iterative state estimation; however, these approaches do not generalize well over continuously changing motion dynamics and environmental conditions. Therefore, this paper proposes a deep learning-based approach for attitude estimation. This approach segments data from sensors into different windows and estimates attitude by separately extracting local features and global features from sensor data using a residual network (ResNet18) and a long short-term memory network (LSTM). To improve the accuracy of attitude estimation, a multi-scale attention mechanism is designed within ResNet18 to capture finer temporal information in the sensor data. The experimental results indicate that the accuracy of attitude estimation using this method surpasses that of other methods proposed in recent years.
9
Content available MEMS Modeling in the Context of Inertial Navigation
EN
Underwater navigation is a research topic current undertaken in many areas of underwater research. The article presents an analysis resulting from MEMS modelling in the context of inertial navigation. The ideal approach was confronted with its limitations, but a non-linear approach, close to the real one, was also presented. Both models were compared in the context of inertial navigation. Random disturbances and their impact on linear and nonlinear dynamic systems, and in this context on Brownian noise motion, were also analysed. The linear velocity and displacement estimates generated by the presented models were compared to the ideal responses. The phenomenon of bifurcation in the context of inertial measurements is presented. Some of the analysis is performed on real data, but for greater clarity, some is performed on simulated data to highlight design issues and limitations.
EN
Measurements of seismic activity induced by mining operations are a basic tool for assessing the level of dynamic load associated with the occurrence of tremors. Knowledge of the location of the source of vibrations and the nature of seismicity is the basis for the safe planning of operations and design of both underground and surface infrastructure. The key parameter influencing the quality and reliability of seismic measurements is the coverage density of the analysed area with measurement stations. Unfortunately, the cost of seismic networks using standard devices is so high that in most cases the density of the network is much lower than needed for a good resolution and low event detection threshold. A certain breakthrough in this area may be the introduction of cost-effective measuring devices based on MEMS technology. This study compares the seismic data collected with the use of MEMS-IMU accelerometers with standard accelerometers for field seismic monitoring. The basis for the comparison was the analysis of data recorded by both devices located on the same site for two months. The comparison was carried out in terms of the characteristics of seismic waveforms, their amplitude distribution, frequency characteristics and effective duration of vibrations. Based on the results of the analysis, it was shown that MEMS-IMU accelerometers can be successfully used to monitor seismicity induced by mining activities in the near wave field.
EN
The gas sensors with Metal-Oxide (MOx) offer new opportunities for MEMS sensors due to their low congestion, high sensibility and fast answer. Microhotplate is the key component in these sensors to control the temperature of the sensing layer. In this work a meander platinum based heater has been fabricated and design. The transmission line matrix 3D-TLM method and COMSOL software are used to predict the homogeneous temperature distribution. Thus, temperatures control of hot areas of micro-heater are very important before any gas sensors and MEMS design.
PL
Czujniki gazu z tlenkiem metalu (MOx) oferują nowe możliwości dla czujników MEMS ze względu na ich niewielkie zatłoczenie, wysoką czułość i szybką odpowiedź. Płyta grzejna jest kluczowym elementem tych czujników do kontrolowania temperatury warstwy czujnikowej. W tej pracy wykonano i zaprojektowano meandrowy grzejnik na bazie platyny. Metoda 3D-TLM z macierzą linii transmisyjnych i oprogramowanie COMSOL są wykorzystywane do przewidywania jednorodnego rozkładu temperatury. Dlatego kontrola temperatury gorących obszarów mikropodgrzewacza jest bardzo ważna przed jakimikolwiek czujnikami gazu i projektowaniem MEMS.
PL
Stosowanie innowacyjnych technologii w procesie produkcji węgla kamiennego jest nieodzownym elementem budowania przedsiębiorstwa na miarę współczesnych czasów. Tempo zachodzących zmian środowiskowych i społecznych powoduje potrzebę ciągłego doskonalenia procesu produkcyjnego, którego najważniejszym elementem są maszyny i urządzenia. Wymagają one stałego monitorowania ich parametrów pracy w celu zapewnienia ciągłości produkcyjnej oraz bezpieczeństwa. Propozycją rozwiązania tego problemu jest układ pomiarowy rejestrujący parametry pracy obudowy zmechanizowanej, wykorzystujący technologię MEMS do pomiaru zmian nachylenia poprzecznego i podłużnego elementów oraz wysokości obudowy. Praca układu pozwala określić parametry pracy zmechanizowanej obudowy w ścianie wydobywczej. W artykule przedstawiono przykład wykorzystania technologii MEMS w czujnikach układu pomiarowego oraz etapy badań zrealizowanych w celu przystosowania obudowy zmechanizowanej do wdrożenia przedstawionego rozwiązania w warunkach rzeczywistych.
EN
Innovative technologies in hard coal production are indispensable for building a modern business enterprise. The pace of environmental and social changes inspires the need for continuous improvement of the coal mining process. The domain of machinery and equipment is the most important element of the entire production process. Machines and equipment require the constant monitoring of their operating parameters to ensure production continuity and safety. A solution addressing those needs is a measuring system that records the parameters of the powered roof support. The constructed measuring system uses MEMS technologies to measure changes in the transverse and longitudinal inclination of the elements and the height of the powered roof support. The measuring system allows for determining the parameters of the powered roof support's operation in the mining wall. The following paper presents an example of the use of MEMS technology in the measuring system sensors, as well as the stages of real-life research on adapting the powered roof support to the measuring system.
EN
Innovative technologies in hard coal production are indispensable for building a modern business enterprise. The pace of environmental and social changes inspires the need for continuous improvement of the coal mining process. The domain of machinery and equipment is the most important element of the entire production process. Machines and equipment require the constant monitoring of their operating parameters to ensure production continuity and safety. A solution addressing those needs is a measuring system that records the parameters of the powered roof support. The constructed measuring system uses MEMS technologies to measure changes in the transverse and longitudinal inclination of the elements and the height of the powered roof support. The measuring system allows for determining the parameters of the powered roof support's operation in the mining wall. The following paper presents an example of the use of MEMS technology in the measuring system sensors, as well as the stages of real-life research on adapting the powered roof support to the measuring system.
PL
Stosowanie innowacyjnych technologii w procesie produkcji węgla kamiennego jest nieodzownym elementem budowania przedsiębiorstwa na miarę współczesnych czasów. Tempo zachodzących zmian środowiskowych i społecznych powoduje potrzebę ciągłego doskonalenia procesu produkcyjnego, którego najważniejszym elementem są maszyny i urządzenia. Wymagają one stałego monitorowania ich parametrów pracy w celu zapewnienia ciągłości produkcyjnej oraz bezpieczeństwa. Propozycją rozwiązania tego problemu jest układ pomiarowy rejestrujący parametry pracy obudowy zmechanizowanej, wykorzystujący technologię MEMS do pomiaru zmian nachylenia poprzecznego i podłużnego elementów oraz wysokości obudowy. Praca układu pozwala określić parametry pracy zmechanizowanej obudowy w ścianie wydobywczej. W artykule przedstawiono przykład wykorzystania technologii MEMS w czujnikach układu pomiarowego oraz etapy badań zrealizowanych w celu przystosowania obudowy zmechanizowanej do wdrożenia przedstawionego rozwiązania w warunkach rzeczywistych.
14
Content available remote Czujnik zawartości wodoru w gazie ziemnym
PL
W niniejszym artykule opisano czujnik składu gazu pozwalający na badania dowolnych mieszanin trójskładnikowych. Opisano pierwotnie planowane zastosowanie czujnika, jego zasadę działania, budowę oraz możliwości zastosowania w badaniu udziału wodoru w składzie gazu ziemnego. Podano zalety proponowanego rozwiązania jak i jego ograniczenia.
EN
This article describes the gas composition sensor that allows testing of any ternary mixtures. The originally planned application of the sensor, its principle of operation, construction and applicability in testing the proportion of hydrogen in the composition of natural gas are described. The advantages of the proposed solution as well as its limitations are given.
EN
MEMS technology has made sensors for measuring barometric pressure and altitude above sea level very cheap and widely used in many consumer electronic devices. This paper presents a theoretical analysis of the sources and types of errors in the barometric altimeter using the standard atmosphere model (ISA). Methods for correcting principal errors caused by non-standard sea level conditions are described and compared. A method of correcting errors in the case of altimeter horizontal movement to the air column and total pressure measurement was proposed. It was compared with another method known from the literature. In the numerical experiment, data recorded by a bicycle computer equipped with a MEMS-based barometric altimeter was analyzed. As the GPS data of the route covered was also known, it was possible to compare the recorded altimeter data with the heights determined from the digital terrain model (DTM), which in this case were considered accurate. The error of the measured altitude calculated in this way was tried to be divided into the principal error, the external error caused by the sensor movement, and the barometer drift. Hence, a numerical experiment was carried out in which, based on the recorded data, an attempt was made to reconstruct non-standard sea level conditions and the impact of speed on the sensor measurements. Furthermore, a method of solving such a reverse problem was proposed. The results of the presented studies can be used in the design of systems correcting the indications of barometric altimeters. The accuracy of the altitude measurement is especially important for small controlled flying objects (UAH) and when recording the route of vehicles moving on the ground.
EN
The horizontal movement of the pressure sensor in relation to air masses may cause erroneous indications of the altimeter due to the possible measurement of the total pressure, which is the sum of the static and dynamic pressure. This problem mainly concerns devices of small dimensions equipped with barometric altimeters made in MEMS technology, performing complex movements. Small dimensions make it difficult to arrange the pressure intake slots in a way that ensures the measurement of static pressure. Examples include drones (UAH) or bike computers. The aim of the research was to develop an altitude correction formula depending on the speed of the pressure sensor relative to air, which, contrary to those found in the literature, would take into account changes in air density with altitude. The theoretical analysis of the influence of the speed of movement on the indications of the barometric altimeter was evaluated in this paper based on the standard atmosphere model. Methods of correcting errors caused by the measurement of total pressure were proposed. The effectiveness of the proposed methods was verified with simulations (Matlab). Experimental studies were also carried out, which confirmed the theoretical considerations. The experiments performed showed that the problem of correcting errors caused by incorrect measurement of static pressure is very complex. The inertia of the barometer indications plays an important role. The direction of airflow and pressure distribution on the flowing object are also important. The results presented in this paper can be used in the design of systems that improve the quality of barometric altimeter readings. This is particularly important when designing low-budget drone navigation systems and it will improve flight safety.
17
Content available remote Estimation of traffic flow using measurements of road surface vibrations
EN
Road traffic parameters in a selected road cross-section can be measured using various techniques. Such measurements can be made in the visible wave band, the audible frequency band or they can be based on vibrations. Most vibrations in the roadway are generated by vehicles moving in a traffic flow. This paper presents a simplified way of traffic flow measurement based on an analysis of road surface vibrations generated by vehicles. The vibrations originating from individual vehicles depend on the latter’s specifications and technical condition, as well as on the road’s pavement type, design class and condition. As part of this research an attempt at the parametrization of the traffic flow in a selected road cross-section was made using a road surface vibration analysis method. For this purpose a prototype measuring system equipped with an ADLX335 accelerometer was built. Road pavement vibration measurements acquired in this way were collated with measurement data obtained from a manual traffic recorder. The results show that the presented method is suitable for road traffic flow estimation.
PL
Pomiar parametrów ruchu drogowego w wybranym przekroju drogi zrealizowany może być z wykorzystaniem różnych technik. Pomiar może być wykonany w pasmie fal widzialnych, pasmie akustycznym lub z wykorzystaniem drgań. Większość drgań w pasie drogowym wywołują pojazdy poruszające się w strumieniu ruchu. W artykule przedstawiono sposób uproszczonego pomiaru natężenia strumienia ruchu z wykorzystaniem analizy drgań powierzchni jezdni wywoływanych przez pojazdy. Drgania pochodzące od poszczególnych pojazdów zależą od ich parametrów technicznych i stanu technicznego, jak również od rodzaju nawierzchni, klasy technicznej i stanu drogi. W artykule przedstawiono także próbę parametryzacji strumienia ruchu drogowego w wybranym przekroju drogi z wykorzystaniem metody analizy drgań nawierzchni. W tym celu użyto prototyp układu pomiarowego wyposażonego w akcelerometr ADLX335. Uzyskane w ten sposób wyniki pomiarów drgań nawierzchni zestawiono z danymi pomiarowymi z ręcznego rejestratora ruchu. Na podstawie otrzymanych wyników wykazano, że prezentowana metoda pozwala na szacowanie natężenia strumienia ruchu drogowego.
18
Content available Druga rewolucja w konstrukcji lamp rentgenowskich
PL
W artykule przedstawiono najnowsze osiągnięcia w konstrukcji lamp rentgenowskich, które można określić drugą rewolucją. Mianowicie podstawowy problem jaki stwarzają dotychczasowe rozwiązania wynikające ze stosowania termicznego źródła elektronów (m.in. problem chłodzenia, sterowania pracą lampy) został rozwiązany poprzez wykorzystanie nanotechnologii do konstrukcji innowacyjnych źródeł elektronów w oparciu o emisję polową (nanorurki węglowe czy mikro-ostrza).
EN
The article presents the latest achievements in the design of X-ray tubes, which can be described as the second revolution. Namely, the basic problem posed by the current solutions resulting from the use of a thermal electron source (including the problem of cooling, tubes control) has been solved by using nanotechnology to construct innovative electron sources based on field emission (carbon nanotubes or micro-tips).
EN
Numerous technological applications use MEMS capacitive sensing technique as a major component, because of their ease of fabrication process, inexpensive and high sensitivity. The paper aims at modeling interdigitated capacitive (IDC) sensing. Virtually observe the contribution of variations in geometrical parameters to sensor efficiency and optimization factor. The sensor design is verified through ANSYS simulations. Results indicate “an efficient but poorly optimized sensor is better than a well-optimized sensor”. It is difficult to detect capacitance in the range of few pF generated using capacitive sensing. How it can be maximized with dimension optimization is focused in this paper.
EN
The demand for smartphone positioning has grown rapidly due to increased positioning accuracy applications, such as land vehicle navigation systems used for vehicle tracking, emergency assistance, and intelligent transportation systems. The integration between navigation systems is necessary to maintain a reliable solution. High-end inertial sensors are not preferred due to their high cost. Smartphone microelectromechanical systems (MEMS) are attractive due to their small size and low cost; however, they suffer from long-term drift, which highlights the need for additional aiding solutions using road network that can perform efficiently for longer periods. In this research, the performance of the Xiaomi MI 8 smartphone's single-frequency precise point positioning was tested in kinematic mode using the between-satellite single-difference (BSSD) technique. A Kalman filter algorithm was used to integrate BSSD and inertial navigation system (INS)-based smartphone MEMS. Map matching technique was proposed to assist navigation systems in global navigation satellite system (GNSS)-denied environments, based on the integration of BSSD-INS and road network models applying hidden Marcov model and Viterbi algorithm. The results showed that BSSD-INS- map performed consistently better than BSSD solution and BSSD–INS integration, irrespective of whether simulated outages were added or not. The root mean square error (RMSE) values for 2D horizontal position accuracy when applying BSSD-INS-map integration improved by 29% and 22%, compared to BSSD and BSSD-INS navigation solutions, respectively, with no simulated outages added. The overall average improvement of proposed BSSD-INS-map integration was 91%, 96%, and 98% in 2D horizontal positioning accuracy, compared to BSSD-INS algorithm for six GNSS simulated signal outages with duration of 10, 20, and 30 s, respectively.
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