Generation of thermal donors (TD’s) in oxygen-containing Cz-Si, also admixed with N or Ge, annealed at about 720 K for up to 20 h, also under Ar hydrostatic pressure (HP) up to 1.4 GPa, was investigated by electrical and X-ray methods. Contrary to annealing at 723 K - 105 Pa, processing under HP leads to TD’s concentration peaking at the wider temperature range, it is also dependent on dopants present in Cz-Si. HP processing results also in other hitherto not known effects.
PL
Zbadano, przy zastosowaniu metod elektrycznych i rentgenowskich, generację donorów termicznych (TD’s) w zawierającym tlen CzSi, w tym domieszkowanym N lub Ge i wygrzanym w ok. 720 K przez czas do 20 godzin w warunkach wysokiego ciśnienia hydrostatycznego Ar (HP), do 1,4 GPa. W przeciwieństwie do efektu wygrzania Cz-Si w 723 K pod ciśnieniem 105 Pa, wygrzanie w warunkach HP prowadzi do zwiększonej koncentracji TD’s w szerszym zakresie temperatur i innych nieznanych dotąd efektów.
2
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Domieszkowany borem krzem otrzymany metodą Czochralskiego (Cz-Si), o orientacji (001) i o koncentracji domieszki tlenowej ok. 9x1017 cm-3, został napromieniowany elektronami o energii 40 keV i dawkach do 2.5x1016 cm-2. W wyniku wygrzewania w temperaturze do 1400 K, także pod wysokim ciśnieniem (do 1,2 GPa) argonu, ulega wydatnej zmianie koncentracja elektronów przewodnictwa oraz struktura defektowa Cz-Si. Podano wyjaśnienie tego zjawiska i zaproponowano jego wykorzystanie do ujawnienia napromieniowania krzemu elektronami.
EN
Boron doped (001) orientated Czochralski grown silicon (Cz-Si) with concentration of oxygen interstitials of about 9x1017 cm-3, was irradiated with electrons (energy 40 keV, doses up to 2.5x1016 cm-2). In effect of annealing at 1400 K, also under high hydrostatic Ar pressure, up to 1.2 GPa, concentration of carriers in the conduction band and defect structure of Cz-Si are changing markedly. Explanation of this effect is proposed and its application for revealing the electron irradiation history of Cz-Si is suggested.
3
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The influence of thermal treatment on magnetic properties of Si/Mn crystals grown by the Czochralski and by floating zone methods and implanted with Mn+ ions was studied by the SQUID magnetometry and electron spin resonance. Depending on thermal and hydrostatic pressure annealing conditions, three groups of Si/Mn samples were found: samples with only ferromagnetic phase, samples with ferromagnetic and paramagnetic contributions, and diamagnetic samples. The Curie temperature of ferromagnetic phase exceeds room temperature. The ESR and SQUID measurements suggest that Si/Mn implanted layer is magnetically inhomogeneous.
4
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The effect of annealing at 720-920 K under enhanced pressure (up to 1.1 GPa) in argon ambient on electrical properties of the surface layer of the Czochralski-grown silicon (Cz-Si) subjected to neutron irradiation (doses of up to 1x10>sup>17 cm-2, E = 5 MeV) or germanium doping (doping level 7x1017 cm-3) was investigated by electrical C-V, I-V and admittance method. The stress-induced decrease in electron concentration was observed in both p- and n-type samples after neutron irradiation and annealing under a pressure of 1.1 GPa at 720 K for 10 hours, while in the germanium doped samples an ascending dependence of the creation of thermal donors and lack of dependence of new donors on hydrostatic pressure was observed. The effects observed can be explained as resulting, among others, from the irradiation-induced defects (generation of thermal acceptors) and pressure stimulated creation of thermal donors in germanium-doped silicon.