Komputerowe modelowanie procesów zachodzących w plazmowych reaktorach chemicznych

• Autorzy: Kazimierski P. , Kotecka D.

Warianty tytułu

EN

Computer simulation of processes in plasma chemical reactors

• Języki publikacji: PL

Abstrakty

EN

A short introduction to Plasma Chemical Reactors (PChR), which are the main tool of plasma chemistry - expanding field of research and applications, is given. Authors indicate the importance of attempts to create software for design and analysis of PchR and demonstrate existing approaches in this field. A simple robust algorithm for simulation of RF plasma had been proposed. The software is fast enough to be tested on a regular PC computer.

Słowa kluczowe

PL

inżynieria plazmy; plazmowy reaktor chemiczny (PChR)

EN

plasma engineering; plasma chemical reactor (PCR)

• Wydawca: Wydawnictwo Politechniki Łódzkiej
• Czasopismo: Zeszyty Naukowe. Inżynieria Chemiczna i Procesowa / Politechnika Łódzka
• Rocznik: 2007
• Tom: Z. 31
• Strony: 85--90
• Opis fizyczny: Bibliogr. 9 poz.

Twórcy

autor

Kazimierski P.

autor

Kotecka D.

Bibliografia

• [1] Biederman H.: Chapter 1, in Plasma polymer films. London, Imperial College Press 2004.
• [2] Kazimierski P. and J. Tyczkowski: Deposition technology of a new multilayer system from twin amorphous hydrogenated materials. Surf. Coat. Technol. Vol. 116-119, 1999, pp. 614-617.
• [3] Tyczkowski J.: Cienkie Warstwy Polimerów Plazmowych. Warszawa, WNT 1990.
• [4] Huang K.: Mechanika statystyczna. Warszawa, PWN 1987.
• [5] Ivanov V et al.: Comparison of a one-dimensional particle-in-cell-Monte Carlo model and a one-dimensional fluid model for a CH4 OH2 capacitively coupled radio frequency discharge. J. Appl. Phys. Vol. 91, No. 10, 2002, pp. 6296-6301.
• [6] Nitschke T.E. and D.B. Graves: A comparison of particle in cell and fluid model simulations of low-pressure radio frequency discharges. Journal of Applied Physics. Vol. 76, No. 10, 1994, str. 5646-5660.
• [7] Bogaerts A. et al.: Comparison of modeling calculations with experimental results for rf glow discharge optical emission spectrometry. Spectrochimica Acta Part B. Vol. 57, 2002, pp. 109-119.
• [8] Kazimierski P. and D. Kotecka: Plasma Chemical Reactors (PChR). Simulation of Low-Temperature Radio-Frequency Discharges. Chemical and Process Engineering. Vol. 27, 2006, pp. 1595-1609.
• [9] National Institute for Fusion Science.: Databases on Atomic and Molecular Data 2006, Japan, https://dbshino.nifs.ac.jp/