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Optica Applicata

Tytuł artykułu

Fabrication of a 2D thermally tunable reflective grating for measuring a CO2 laser beam profile

Autorzy Riahi, M.  Latifi, H. 
Treść / Zawartość
Warianty tytułu
Języki publikacji EN
EN In this article, application of a 2D thermally tunable reflective grating for measuring the beam profile of a CO2 laser is proposed. A 2D grating is first fabricated on a glass substrate by conventional lithography technique. The grooves of the grating are filled with nitrobenzene, the refractive index of which highly depends on temperature. A double side polished silicon wafer is then placed on the grating. If a CO2 laser is incoming from silicon side, a portion of it is transmitted and absorbed in the grating structure. Depending on the beam profile of the CO2 laser, a temperature profile is produced on the grating causing the same profile for efficiency of the grating for a visible light. The changes in the efficiency, cause changes in intensity of dif-fraction orders. By measuring the intensity of the first order of diffraction, the beam profile of the CO2 laser is imaged on a visible CCD camera.
Słowa kluczowe
EN tunable grating   laser beam profiler  
Wydawca Oficyna Wydawnicza Politechniki Wrocławskiej
Czasopismo Optica Applicata
Rocznik 2011
Tom Vol. 41, nr 3
Strony 735--742
Opis fizyczny Bibliogr. 9 poz.
autor Riahi, M.
autor Latifi, H.
  • Laser and Plasma Research Institute, Shahid Beheshti University, Evin, Tehran, Iran
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