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Materials Science Poland

Tytuł artykułu

Fabrication of micro- and nanostructures by scanning probe microscopy. Local anodic oxidation

Autorzy Kolanek, K.  Gotszalk, T.  Zielony, M.  Grabiec, P. 
Treść / Zawartość
Warianty tytułu
Języki publikacji EN
EN Atomic force microscopy (AFM) is a high resolution imaging technique in which a cantilever with a very sharp tip is scanned over a sample surface. AFM technique can also be used to fabricate micro- and nanostructures on metallic or semiconductor surfaces. Nanolithography by local anodic oxidation or by noncontact atomic force microscopy (NC-AFM) has strong potential to pattern the surface with a well defined feature size at the nanometer regime. In the paper, the growth rate of nanostructures produced by local anodic oxidation process has been investigated. Mechanisms of nanooxidation have been studied and dependences of its rate and resolution on the voltage applied between the tip and a sample surface, tip speed, and ambient humidity.
Słowa kluczowe
EN local anodic oxidation   nanolithography   scanning probe microscopy   atomic force microscope  
Wydawca Wrocław University of Science and Technology
Czasopismo Materials Science Poland
Rocznik 2008
Tom Vol. 26, No. 2
Strony 271--278
Opis fizyczny Bibliogr. 9 poz.
autor Kolanek, K.
autor Gotszalk, T.
autor Zielony, M.
autor Grabiec, P.
  • Wrocław University of Technology, Faculty of Microsystem Electronics and Photonics, ul. Janiszewskiego 11/17, 50-372 Wrocłlaw, Poland
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Kolekcja BazTech
Identyfikator YADDA bwmeta1.element.baztech-article-BPW7-0007-0193