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http://yadda.icm.edu.pl:80/baztech/element/bwmeta1.element.baztech-article-BAT3-0022-0007

Czasopismo

Journal of Telecommunications and Information Technology

Tytuł artykułu

Diagnostics of micro- and nanostructure using the scanning probe microscopy

Autorzy Gotszalk, T.  Janusz, P.  Marendziak, A.  Czarnecki, P.  Radojewski, J.  Szeloch, R. F.  Grabiec, P.  Rangelow, I. W. 
Treść / Zawartość
Warianty tytułu
Języki publikacji EN
Abstrakty
EN In this paper we summarize the results of our research concerning the diagnostics of micro- and nanostructure with scanning probe microscopy (SPM). We describe the experiments performed with one of the scanning probe microscopy techniques enabling also insulating surfaces to be investigated, i.e., atomic force microscopy (AFM). We present the results of topography measurements using both contact and non-contact AFM modes, investigations of the friction forces that appear between the microtip and the surface, and experiments connected with the thermal behaviour of integrated circuits, carried out with the local resolution of 20 nm.
Słowa kluczowe
EN scannig probe microscopy   microsystem   nanofabrication  
Wydawca Instytut Łączności - Państwowy Instytut Badawczy
Czasopismo Journal of Telecommunications and Information Technology
Rocznik 2005
Tom nr 1
Strony 41--46
Opis fizyczny Bibliogr. 6 poz., fot.
Twórcy
autor Gotszalk, T.
  • Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology Janiszewskiego st 11/17, 50-372 Wrocław, Poland, teodor.gotszalk@pwr.wroc.pl
autor Janusz, P.
  • Institute of Electron Technology Lotników av. 32/46 02-668 Warsaw, Poland, janus@ite.waw.pl
autor Marendziak, A.
  • Faculty of Microsystem Electronics and Photonics Wrocław University of Technology Janiszewskiego st 11/17 50-372 Wrocław, Poland, andrzej.marendziak@pwr.wroc.pl
autor Czarnecki, P.
  • Faculty of Microsystem Electronics and Photonics Wrocław University of Technology Janiszewskiego st 11/17 50-372 Wrocław, Poland, piotr.czarnecki@pwr.wroc.pl
autor Radojewski, J.
  • Faculty of Microsystem Electronics and Photonics Wrocław University of Technology Janiszewskiego st 11/17 50-372 Wrocław, Poland, jacek.radojewski@pwr.wroc.pl
autor Szeloch, R. F.
  • Faculty of Microsystem Electronics and Photonics Wrocław University of Technology Janiszewskiego st 11/17 50-372 Wrocław, Poland, roman.szeloch@pwr.wroc.pl
autor Grabiec, P.
autor Rangelow, I. W.
  • Institute of Technical Physics University of Kassel Heinrich-Plett Str. 32 34-109 Kassel, Germany, rangelow@uni-kassel.de
Bibliografia
[1] G. Binnig, H. Rohrer, and E. Weibel, "Surface studies by scanning tunneling microscopy", Phys. Rev. Lett., vol. 49, p. 726, 1982.
[2] G. Binnig, C. F. Quate, and Ch. Gerber, "Atomic force microscopy", Phys. Rev. Lett., vol. 56, p. 930, 1986.
[3] T. Gotszalk, P. Grabiec, and I. W. Rangelow, "Piezoresistive sensors for scanning probe microscopy", Ultramicroscopy, vol. 82, p. 39, 2000.
[4] T. Gotszalk, F. Shi, P. Grabiec, P. Dumania, P. Hudek, and I. W. Rangelow, "Fabrication of the multipurpose piezoresistive Wheatstone bridge cantilever with conductive microtip for electrostatic force and scanning capacitance microscopy", J. Vac. Sci. Technol., vol. B16, no. 6, p. 3948, 1998.
[5] R. F. Szeloch, T. Gotszalk, and P. Janus, "Scanning thermal microscopy in microsystem reliability analysis", Microelectron. Reliab., vol. 42, p. 1719, 2002.
[6] T. Gotszalk, P. Czarnecki, P. Grabiec, K. Doma«ski, M. Zaborowski, and I. W. Rangelow, "Microfabricated cantilever with metallic tip for electrostatic and capacitance microscopy and its application to investigation of semiconductor devices", J. Vac. Sci. Technol., vol. B1622, p. 506, 2004.
Kolekcja BazTech
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